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1. 发明授权

EP3333578B1 PHYSICAL QUANTITY SENSOR, PHYSICAL QUANTITY SENSOR DEVICE, ELECTRONIC APPARATUS, AND VEHICLE 有权
公开(公告)号：EP3333578B1
公开(公告)日：2019-06-19
申请号：EP17205432.2
申请日：2017-12-05
申请人： Seiko Epson Corporation
发明人： Tanaka, Satoru
IPC分类号： G01P15/125

2. 发明公开

EP1821406A2 Lamb wave type frequency device and method thereof 审中-公开
标题翻译：兰姆波型频率装置及其方法
公开(公告)号：EP1821406A2
公开(公告)日：2007-08-22
申请号：EP07003135.6
申请日：2007-02-14
申请人： SEIKO EPSON CORPORATION
发明人： Tanaka, Satoru
IPC分类号： H03H9/02 , H03H3/02
CPC分类号： H03H9/02228 , H03H3/02 , H03H9/02023 , H03H9/1014 , H03H2003/027 , Y10T29/42
摘要： A Lamb wave type high frequency device comprises: a piezoelectric substrate (20); an interdigital transducer (IDT) electrode (30) formed on a first main surface of the piezoelectric substrate; a reinforcing substrate (50) connected to a second main surface of the piezoelectric substrate; a space portion (54) formed in one of the piezoelectric substrate and the reinforcing substrate, an area of the space portion being larger than a region in which a Lamb wave is propagated; and a connecting surface (52) formed in a periphery of the space portion.
摘要翻译：兰姆波型高频器件包括：压电基片（20）; 形成在压电基片的第一主表面上的叉指式换能器（IDT）电极（30）加强基板（50），连接到所述压电基板的第二主表面; 空间部分，形成在所述压电基板和所述增强基板中的一个中，所述空间部分的面积大于其中传播兰姆波的区域; 和形成在该空间部分周围的连接表面（52）。

3. 发明公开

EP3333578A1 PHYSICAL QUANTITY SENSOR, PHYSICAL QUANTITY SENSOR DEVICE, ELECTRONIC APPARATUS, AND VEHICLE 有权
公开(公告)号：EP3333578A1
公开(公告)日：2018-06-13
申请号：EP17205432.2
申请日：2017-12-05
申请人： Seiko Epson Corporation
发明人： Tanaka, Satoru
IPC分类号： G01P15/125
CPC分类号： G01P15/125 , B60G17/01941 , B60G2400/10 , G01P2015/0814
摘要： A physical quantity sensor according to the invention includes a stationary electrode section, a movable section which can be displaced in an X-axis direction, and a movable electrode section provided to the movable section. The stationary electrode section includes a first movable electrode section and a second movable electrode section arranged side by side along the Y-axis direction, the first stationary electrode section includes a plurality of first stationary electrode fingers extending from a first trunk section toward both sides in the Y-axis direction, and the second stationary electrode section includes a plurality of second stationary electrode fingers extending from a second trunk section toward both sides in the Y-axis direction. The movable electrode section includes a first movable electrode section and a second movable electrode section arranged side by side in the Y-axis direction, the first movable electrode section includes a plurality of first movable electrode fingers located on both sides in the Y-axis direction of the first trunk section, and opposed to the first stationary electrode fingers, and the second movable electrode section includes plurality of second movable electrode fingers located on both sides in the Y-axis direction of the second trunk section, and opposed to the second stationary electrode fingers.

4. 发明授权

EP3144685B1 PHYSICAL QUANTITY SENSOR, SENSOR DEVICE, ELECTRONIC APPARATUS, AND MOVING OBJECT 有权
公开(公告)号：EP3144685B1
公开(公告)日：2018-05-23
申请号：EP16188503.3
申请日：2016-09-13
申请人： Seiko Epson Corporation
发明人： Tanaka, Satoru
IPC分类号： G01P15/125 , G01P15/08
CPC分类号： G01C19/5755 , G01C19/5769 , G01P15/125 , G01P2015/0831 , G01P2015/0874
摘要： A physical quantity sensor includes a base substrate, a movable portion that is oscillatably provided around an axis while facing the base substrate and that is divided into a first movable portion and a second movable portion of which an area is larger than that of the first movable portion with the axis as a boundary in a plan view of the base substrate, a first fixed electrode that is disposed on the base substrate facing the first movable portion, and a second fixed electrode that is disposed on the base substrate facing the second movable portion. The first fixed electrode and the second fixed electrode are configured so as to offset at least a part of a difference between a first fringe capacitance, which is between the first movable portion and the first fixed electrode, and a second fringe capacitance, which is between the second movable portion and the second fixed electrode.

5. 发明公开

EP3144685A1 PHYSICAL QUANTITY SENSOR, SENSOR DEVICE, ELECTRONIC APPARATUS, AND MOVING OBJECT 有权
标题翻译：物理机器人传感器，传感器，ELEKTRONISCHE VORRICHTUNG UND BEWEGTOBJEKT
公开(公告)号：EP3144685A1
公开(公告)日：2017-03-22
申请号：EP16188503.3
申请日：2016-09-13
申请人： Seiko Epson Corporation
发明人： Tanaka, Satoru
IPC分类号： G01P15/125 , G01P15/08
CPC分类号： G01C19/5755 , G01C19/5769 , G01P15/125 , G01P2015/0831 , G01P2015/0874
摘要： A physical quantity sensor includes a base substrate, a movable portion that is oscillatably provided around an axis while facing the base substrate and that is divided into a first movable portion and a second movable portion of which an area is larger than that of the first movable portion with the axis as a boundary in a plan view of the base substrate, a first fixed electrode that is disposed on the base substrate facing the first movable portion, and a second fixed electrode that is disposed on the base substrate facing the second movable portion. The first fixed electrode and the second fixed electrode are configured so as to offset at least a part of a difference between a first fringe capacitance, which is between the first movable portion and the first fixed electrode, and a second fringe capacitance, which is between the second movable portion and the second fixed electrode.
摘要翻译：物理量传感器包括基底基板，可动部分，其围绕轴线可摆动地设置，同时面向基底基板，并且被分成第一可动部分和第二可移动部分，该第一可动部分和第二可移动部分的面积大于第一可移动部分的面积在基底基板的平面图中以轴线为边界的部分，设置在与第一可动部分相对的基底基板上的第一固定电极，以及设置在基板上面对第二可动部分的第二固定电极。第一固定电极和第二固定电极被配置为偏移第一可移动部分和第一固定电极之间的第一条纹电容和第二条纹电容之间的差异的至少一部分，第二可动部和第二固定电极。

6. 发明公开

EP1821406A3 Lamb wave type frequency device and method thereof 审中-公开
标题翻译： Lamb波频率装置及其方法
公开(公告)号：EP1821406A3
公开(公告)日：2007-11-21
申请号：EP07003135.6
申请日：2007-02-14
申请人： Seiko Epson Corporation
发明人： Tanaka, Satoru
IPC分类号： H03H9/02 , H03H3/02
CPC分类号： H03H9/02228 , H03H3/02 , H03H9/02023 , H03H9/1014 , H03H2003/027 , Y10T29/42
摘要： A Lamb wave type high frequency device comprises: a piezoelectric substrate (20); an interdigital transducer (IDT) electrode (30) formed on a first main surface of the piezoelectric substrate; a reinforcing substrate (50) connected to a second main surface of the piezoelectric substrate; a space portion (54) formed in one of the piezoelectric substrate and the reinforcing substrate, an area of the space portion being larger than a region in which a Lamb wave is propagated; and a connecting surface (52) formed in a periphery of the space portion.

7. 发明公开

EP1722474A2 Lamb wave type high frequency device 审中-公开
标题翻译： Mit Lambwellen arbeitende Hoch-Frequenz-Vorrichtung
公开(公告)号：EP1722474A2
公开(公告)日：2006-11-15
申请号：EP06009637.7
申请日：2006-05-10
申请人： SEIKO EPSON CORPORATION
发明人： Tanaka, Satoru
IPC分类号： H03H9/25 , H03H9/02 , H03H9/145
CPC分类号： H03H9/02842 , H03H9/02228 , H03H9/02551 , H03H9/14552 , H03H9/6426 , H03H9/643
摘要： A lamb wave type high frequency device includes: an interdigital transducer (IDT) electrode having an electrode finger interdigitated therein; a pair of reflectors having an electrode finger and being disposed at both sides of a propagation direction of a lamb wave excited by the IDT electrode; and a piezoelectric substrate on a surface of which the IDT electrode and the reflectors are disposed, wherein a pitch of the electrode finger of the IDT electrode and a pitch of the electrode finger of the reflectors are different from one another.
摘要翻译：一种兰姆波型高频器件包括：叉指式换能器（IDT）电极，其中具有电极指相交; 一对具有电极指的反射器，设置在由IDT电极激发的兰姆波的传播方向的两侧; 以及其上设置有IDT电极和反射器的表面上的压电基板，其中IDT电极的电极指的间距和反射器的电极指的间距彼此不同。

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