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    • 1. 发明公开
    • Semiconductor device with memory cell region and a peripheral circuit and method of manufacturing the same
    • 具有用于存储单元和外围电路,以及它们的制造方法的一个区域的半导体器件。
    • EP0355951A2
    • 1990-02-28
    • EP89305217.5
    • 1989-05-23
    • SEIKO EPSON CORPORATION
    • Maruo, Yukata
    • H01L27/115H01L21/82H01L29/08G11C17/00
    • H01L27/0925H01L21/823456H01L27/105Y10S257/90
    • A semi-conductor memory comprises a memory cell region and a peripheral circuit. The memory cell region includes a plurality of memory transistors (Qn, Qm) of a first conductivity type and a plurality of select transistors (Qn, Qw) of the first conductivity type. The peripheral circuit includes transistors (Qn) of the first conductivity type and also transistors (Qp) of a second conductivity type. The transistors of the first conductivity type each have a first off-set region (21, 121) defined by a low concentration impurity region having a substantially flat surface, the first off-set region being formed in a substrate (10, 110) adjacent to a first gate electrode (20, 120). The transistors of the second conductivity type each have a thick insulating film (15) provided adjacent to a second gate electrode (16) with a part thereof buried in the substrate, and a second off-set region (17) defined by a low concentration impurity region provided in a portion of the substrate under the thick insulating film.
    • 的半导体存储器包括存储单元区域和外围电路。 存储单元区包括一第一导电型的存储晶体管(QN,QM)和第一导电类型的选择晶体管的多个(QN,QW)的复数。 外围电路包括第二导电类型的第一导电类型的晶体管(QN),因此晶体管(QP)。 第一导电类型的晶体管的每个具有第一偏置的区域(21,121)由具有基本上平坦表面的低浓度杂质区域所定义的,第一脏区域在一个基板(10,110)相邻而形成 到第一栅电极(20,120)。 第二导电类型的晶体管的每个具有(15)相邻设置的第二栅极电极(16)其一部分埋在基材由低浓度所定义的厚的绝缘片,以及一个第二偏置的区域(17) 厚的绝缘电影下在基板的一部分上设置杂质区域。