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1. 发明公开

EP4157787A1 MEMS DEVICE WITH VIBRATION-INSULATING PLATE 审中-实审
公开(公告)号：EP4157787A1
公开(公告)日：2023-04-05
申请号：EP21727170.9
申请日：2021-05-25
申请人： Politecnico di Milano , Nanjing University Of Science And Technology
发明人： YAO, Zhichao , ZEGA, Valentina , SU, Yan , ZHANG, Jing , CORIGLIANO, Alberto
IPC分类号： B81B7/00 , H03H1/00 , F16F1/00

2. 发明公开

EP3317539A1 MICROPUMP WITH ELECTROSTATIC ACTUATION 有权
标题翻译： MICROPUMP静电驱动
公开(公告)号：EP3317539A1
公开(公告)日：2018-05-09
申请号：EP16739578.9
申请日：2016-07-01
申请人： Politecnico di Milano
发明人： CORIGLIANO, Alberto , ARDITO, Raffaele , BERTARELLI, Emanuele , FERRERA, Marco
IPC分类号： F04B43/04 , F04B45/04 , F04B45/047 , F16K99/00
CPC分类号： F04B43/043 , F04B45/041 , F04B45/047 , F04B49/06 , F04B53/1072
摘要： A micropump includes: a pumping chamber, between a first semiconductor substrate and a second semiconductor substrate bonded to each other; an inlet valve, having an inlet shutter element between an inlet passage and the pumping chamber; an outlet valve, having an outlet shutter element between the pumping chamber and an outlet passage; a first recess for housing the inlet shutter element when the inlet valve is in the open configuration, the first recess and the pumping chamber being fluidly coupled; a second recess for housing the outlet shutter element when the outlet valve is in the open configuration, the second recess and the pumping chamber being fluidly decoupled.

3. 发明公开

EP3695136A1 LOW-FREQUENCY AND WIDE BANDGAP VIBRATION-INSULATING MODULE DEVICE AND RELATIVE PERIODIC STRUCTURE 有权转让
公开(公告)号：EP3695136A1
公开(公告)日：2020-08-19
申请号：EP18785325.4
申请日：2018-10-08
申请人： Politecnico di Milano
发明人： D'ALESSANDRO, Luca , BELLONI, Edoardo , ARDITO, Raffaele , BRAGHIN, Francesco , CORIGLIANO, Alberto
IPC分类号： F16F7/116

4. 发明公开

EP3740699A1 LOW-FREQUENCY AND BROAD-SPECTRUM VIBRO-ACOUSTIC INSULATING MODULE DEVICE, AND RELATIVE PERIODIC STRUCTURE 有权转让
公开(公告)号：EP3740699A1
公开(公告)日：2020-11-25
申请号：EP19700605.9
申请日：2019-01-18
申请人： Politecnico di Milano
发明人： D'ALESSANDRO, Luca , ZEGA, Valentina , RIVA, Emanuele , ARDITO, Raffaele , BRAGHIN, Francesco , CORIGLIANO, Alberto
IPC分类号： F16F15/06 , E04H9/02 , F16F7/116 , G10K11/16

5. 发明授权

EP2643702B1 RESONANT BIAXIAL ACCELEROMETER STRUCTURE OF THE MICROELECTROMECHANICAL TYPE 有权
标题翻译：微电子机械型共振双轴加速度计结构
公开(公告)号：EP2643702B1
公开(公告)日：2015-08-05
申请号：EP11799844.3
申请日：2011-11-25
申请人： STMicroelectronics S.r.l. , Politecnico Di Milano
发明人： COMI, Claudia , CORIGLIANO, Alberto , SIMONI, Barbara
IPC分类号： G01P15/097 , G01P15/18 , G01P15/08
CPC分类号： G01P15/097 , G01P15/0888 , G01P15/18 , G01P2015/082

6. 发明公开

EP2643702A1 RESONANT BIAXIAL ACCELEROMETER STRUCTURE OF THE MICROELECTROMECHANICAL TYPE 有权
标题翻译：微电子机械型共振双轴加速度计结构
公开(公告)号：EP2643702A1
公开(公告)日：2013-10-02
申请号：EP11799844.3
申请日：2011-11-25
申请人： STMicroelectronics S.r.l. , Politecnico Di Milano
发明人： COMI, Claudia , CORIGLIANO, Alberto , SIMONI, Barbara
IPC分类号： G01P15/097 , G01P15/18
CPC分类号： G01P15/097 , G01P15/0888 , G01P15/18 , G01P2015/082
摘要： A microelectromechanical detection structure (1; 1') for a MEMS resonant biaxial accelerometer (16) is provided with: an inertial mass (2; 2'), anchored to a substrate (30) by means of elastic elements (8) in such a way as to be suspended above the substrate (30), the elastic elements (8) enabling inertial movements of detection of the inertial mass (2; 2') along a first axis of detection (x) and a second axis of detection (y) that belong to a plane (xy) of main extension of said inertial mass (2; 2'), in response to respective linear external accelerations (a
x , a
y ); and at least one first resonant element (10a) and one second resonant element (10b), which have a respective longitudinal extension, respectively along the first axis of detection (x) and the second axis of detection (y), and are mechanically coupled to the inertial mass (2; 2') through a respective one of the elastic elements (8) in such a way as to undergo a respective axial stress (N
1 , N
2 ) when the inertial mass moves respectively along the first axis of detection (x) and the second axis of detection (y).
摘要翻译：一种用于MEMS谐振双轴加速度计（16）的微机电检测结构（1; 1'）设有：惯性质量块（2; 2'），借助于弹性元件（8）固定在基板（30）（30）上方悬挂的方式，弹性元件（8）能够使惯性质量块（2; 2'）沿着第一检测轴线（x）和第二检测轴线 y）;响应于相应的线性外部加速度（ax，ay），所述惯性质量（2; y'）属于所述惯性质量（2; 2'）的主延伸的平面（xy）; 和至少一个第一谐振元件（10a）和一个第二谐振元件（10b），其分别沿着第一检测轴（x）和第二检测轴（y）具有各自的纵向延伸，（2; 2'）通过相应的一个弹性元件（8），以便当惯性质量分别沿着第一轴线（X 1，X 2）移动时经历相应的轴向应力（N 1，N 2）检测（x）和第二检测轴（y）。

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