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    • 2. 发明公开
    • METHOD FOR MANUFACTURING ACTIVE MATRIX ARRAY DEVICE, AND ACTIVE MATRIX ARRAY DEVICE MANUFACTURED THEREBY
    • 有源矩阵阵列装置的制造方法以及由其制造的有源矩阵阵列装置
    • EP3288012A1
    • 2018-02-28
    • EP16783306.0
    • 2016-04-20
    • Pi-Crystal Incorporation
    • YAMAGUCHI, SeiichiroTAKEYA, JunichiITOH, MasatakaSHOMOTO, NorikazuUEMATSU, Mina
    • G09F9/30G02F1/1368H01L21/336H01L29/786H01L51/05
    • G02F1/136286G02F1/1368G02F2001/13613G09F9/30H01L27/1259H01L27/3274H01L29/786H01L51/05
    • Active matrix array devices are constituted by devices that have a function such as those of a display/light emitting device, a sensor, a memory, or an actuator, and are arranged in a matrix array shape, and the expansion of usage in various fields and applications is expected. However, there is little similarity and compatibility in the forming process and materials between a device such as a display/light emitting device, a sensor, a memory, or an actuator, and a circuit portion that controls such a device in the matrix element, and therefore the device and the circuit portion are mutually restricting factors. This results in an increase in the manufacturing cost and limitation of the function.
      A conventional active matrix array device is manufactured by performing various process steps on the same substrate. Control circuit portions each including a transistor are formed in some of the process steps. In contrast, the problem described above is solved by forming the control circuit portions of an active matrix array device on a substrate different from that of other portions, and the control circuit portions are respectively mounted on matrix elements in a middle step of the manufacturing process of the matrix array body or after a final step thereof.
    • 有源矩阵阵列器件由具有诸如显示器/发光器件,传感器,存储器或致动器的功能的器件构成,并且以矩阵阵列形状布置,并且扩展了各种领域的使用 并预计应用程序。 然而,在诸如显示器/发光器件,传感器,存储器或致动器之类的器件与控制矩阵元件中的这种器件的电路部分之间的形成过程和材料中几乎没有相似性和兼容性, 因此该装置和电路部分是相互制约的因素。 这导致制造成本的增加和功能的限制。 传统的有源矩阵阵列器件是通过在同一衬底上执行各种工艺步骤而制造的。 在一些处理步骤中形成均包括晶体管的控制电路部分。 相反,通过在与其它部分不同的衬底上形成有源矩阵阵列器件的控制电路部分来解决上述问题,并且在制造过程的中间步骤中将控制电路部分分别安装在矩阵元件上 矩阵阵列主体或其最终步骤之后。