专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明授权

EP0503712B1 Support device with a tiltable object table, and optical lithographic device provided with such a support device 失效
标题翻译：带倾斜阶段保护装置，和具有这种装置的光学光刻设备。
公开(公告)号：EP0503712B1
公开(公告)日：1995-08-30
申请号：EP92200610.1
申请日：1992-03-03
申请人： Philips Electronics N.V. , ASM Lithography B.V.
发明人： Bouwer, Adrianus Gerardus , Baggen, Marcel Coenraad Marie , Janssen, Henricus Wilhelmus Aloysius , Bartray, Petrus Rutgerus , van Eijk, Jan
IPC分类号： H01L21/00 , G03F7/20
CPC分类号： G03F7/70825 , B23Q1/36 , B23Q1/5462 , G03F7/70716 , H01L21/682

2. 发明公开

EP0503712A1 Support device with a tiltable object table, and optical lithographic device provided with such a support device 失效
标题翻译： Schützeinrichtungmit kippbarem Objekttisch，und optische Lithographieeinrichtung mit einer derartigen Einrichtung。
公开(公告)号：EP0503712A1
公开(公告)日：1992-09-16
申请号：EP92200610.1
申请日：1992-03-03
申请人： Philips Electronics N.V. , ASM Lithography B.V.
发明人： Bouwer, Adrianus Gerardus , Baggen, Marcel Coenraad Marie , Janssen, Henricus Wilhelmus Aloysius , Bartray, Petrus Rutgerus , van Eijk, Jan
IPC分类号： H01L21/00 , G03F7/20
CPC分类号： G03F7/70825 , B23Q1/36 , B23Q1/5462 , G03F7/70716 , H01L21/682
摘要： A support device comprising a first and a second bearing unit for guiding the support device along a base surface and a straight guide extending parallel to the base surface, respectively. The support device has an object table which is coupled to a rigidification member and which is displaceable relative to the two bearing units in a z-direction transverse to the base surface and is tiltable about at least one axis of rotation directed parallel to the base surface by means of three force actuators. The rigidification member is coupled to the second bearing unit by means of a coupling member which is elastically deformable in the z-direction, and coupled to the first bearing unit via the force actuators, whereby a statically determined coupling of the rigidification member and the object table to the two bearing units is obtained.
The support device is particularly suitable for displacements of an object in the sub-micron range, such as, for example, in an optical lithographic device. In particular, an accurate focusing of the object may be obtained by the use of the support device in an optical lithographic device.
摘要翻译：一种支撑装置，包括用于沿基面引导支撑装置的第一和第二轴承单元和分别平行于基座表面延伸的直线导轨。该支撑装置具有一个被连接到刚性化构件上的物镜台，它能够相对于两个轴承单元沿横向于基座表面的z方向移动，并且可围绕平行于底面的至少一个旋转轴线倾斜通过三个力致动器。刚性构件通过可在z方向上可弹性变形的联接构件联接到第二轴承单元，并且经由力致动器联接到第一轴承单元，由此刚性确定的刚性构件和物体的联接得到两个轴承单元的表。支撑装置特别适用于亚微米范围内的物体的位移，例如在光学平版印刷装置中。特别地，可以通过在光学平版印刷设备中使用支持装置来获得对象的精确聚焦。

3. 发明公开

EP0973067A3 Positioning device and lithographic projection apparatus comprising such a device 审中-公开
标题翻译：的定位装置和一种光刻投影装置，包括这样的装置
公开(公告)号：EP0973067A3
公开(公告)日：2001-10-24
申请号：EP99305616.7
申请日：1999-07-15
申请人： ASM Lithography B.V.
发明人： Loopstra, Erik Roelof , Bouwer, Adrianus Gerardus , Janssen, Henricus Wilhelmus Aloysius , van der Schoot, Harmen Klaas
IPC分类号： G03F7/20 , G03F9/00
CPC分类号： G03F7/70716
摘要： A positioning device (3) comprising a first part (57) and a second part (65) which is displaceable relative to the first part by means of a system of Lorentz-force motors (79,81,83,85,87), whereby: relative to the first part, the second part is supported in a Z-direction by means of at least one gas cylinder (97), said gas cylinder comprising: a housing (99) having a pressure chamber (103), which housing is coupled to the first part; and a piston (101) which is coupled to the second part and which can be displaced in the pressure chamber in the Z-direction, said piston being journaled relative to said housing substantially at right angles to the Z-direction.

4. 发明公开

EP0973067A2 Positioning device and lithographic projection apparatus comprising such a device 审中-公开
标题翻译：定位器和石版画Profektionsapparat mit einer solchen Vorrichtung
公开(公告)号：EP0973067A2
公开(公告)日：2000-01-19
申请号：EP99305616.7
申请日：1999-07-15
申请人： ASM Lithography B.V.
发明人： Loopstra, Erik Roelof , Bouwer, Adrianus Gerardus , Janssen, Henricus Wilhelmus Aloysius , van der Schoot, Harmen Klaas
IPC分类号： G03F7/20 , G03F9/00
CPC分类号： G03F7/70716
摘要： A positioning device comprising a first part and a second part which is displaceable relative to the first part by means of a system of Lorentz-force motors, whereby:

relative to the first part, the second part is supported in a Z-direction by means of at least one gas cylinder, said gas cylinder comprising:
a housing having a pressure chamber, which housing is coupled to the first part; and a piston which is coupled to the second part and which can be displaced in the pressure chamber in the Z-direction, said piston being journaled relative to said housing substantially at right angles to the Z-direction.
摘要翻译：一种定位装置，包括第一部分和第二部分，所述第一部分和第二部分可通过洛伦兹力马达系统相对于所述第一部分移动，由此：相对于所述第一部分，所述第二部分通过装置以Z方向至少一个气瓶，所述气瓶包括：壳体，其具有压力室，所述壳体联接到所述第一部分; 以及联接到所述第二部分并且可以在所述压力室中沿Z方向移位的活塞，所述活塞相对于所述壳体基本上与Z方向成直角地轴颈。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式