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1. 发明公开

EP1731965A3 Imprint stamp comprising cyclic olefin copolymer 有权
标题翻译：柱塞与环烯烃共聚物
公开(公告)号：EP1731965A3
公开(公告)日：2007-10-10
申请号：EP06115141.1
申请日：2006-06-08
申请人： Obducat AB
发明人： Heidari, Babak , Beck, Marc , Keil, Matthias
IPC分类号： G03F7/00 , B81C5/00
CPC分类号： B82Y10/00 , B81C1/0046 , B81C99/009 , B82Y40/00 , G03F7/0002
摘要： A method is provided for transferring a pattern from a template (1) to an object (12) in an imprint process, using a two-step process. The first step includes contacting a pattern of the template surface with a polymer material comprising one or more Cyclic Olefin Copolymers (COCs), to produce a flexible polymer replica having a structured surface with an inverse of the pattern of the template surface. In a second step, after releasing the flexible polymer replica from the template, the inverse pattern of the flexible polymer replica is pressed into a resist layer on a substrate, to imprint a replica of the pattern of the template surface in therein.

2. 发明公开

EP1600811A1 Modified metal molds for use in imprinting processes 审中-公开
标题翻译： Modifizierte MetallformenfürImprint-Verfahren
公开(公告)号：EP1600811A1
公开(公告)日：2005-11-30
申请号：EP04445064.1
申请日：2004-05-28
申请人： Obducat AB
发明人： Keil, Matthias , Frennesson, Göran , Beck, Marc , Heidari, Babak
IPC分类号： G03F7/00
CPC分类号： G03F7/0002 , B82Y10/00 , B82Y30/00 , B82Y40/00
摘要： The invention relates to a novel metal mold having anti-adhesive properties comprising a base metal mold and an anti-adhesive layer comprising a fluorinated alkyl phosphoric acid derivative, or a fluorinated alkyl poly-phosphoric acid derivative, such as a phosphoric acid, phosphate or phosphate salt, a phosphonic acid, a phosphonate or phosphonate salt, or their respective oligomers. The base mold metal may be nickel, vanadium, aluminium, tantalum, niobium, zirconium, titanium, or their alloys.
摘要翻译：本发明涉及一种具有抗粘性的新型金属模具，包括贱金属模具和包含氟化烷基磷酸衍生物的抗粘合剂层，或磷酸，磷酸盐等氟化烷基多磷酸衍生物磷酸盐，膦酸，膦酸盐或膦酸盐，或它们各自的低聚物。基底金属可以是镍，钒，铝，钽，铌，锆，钛或它们的合金。

3. 发明授权

EP2199854B1 Hybrid polymer mold for nano-imprinting and method for making the same 有权
标题翻译：混合聚合物纳米复合材料和verfahren zu seiner herstellung
公开(公告)号：EP2199854B1
公开(公告)日：2015-12-16
申请号：EP08172338.9
申请日：2008-12-19
申请人： Obducat AB
发明人： Keil, Matthias , Nilsson, Jakob , Ring, Johan , Heidari, Babak
IPC分类号： G03F7/00 , B29C33/38 , B82Y10/00 , B82Y40/00
CPC分类号： B29C33/3857 , B82Y10/00 , B82Y40/00 , G03F7/0002 , Y10T428/31504 , Y10T428/3154

4. 发明授权

EP1731965B1 Imprint stamp comprising cyclic olefin copolymer 有权
标题翻译：柱塞与环烯烃共聚物
公开(公告)号：EP1731965B1
公开(公告)日：2012-08-08
申请号：EP06115141.1
申请日：2006-06-08
申请人： Obducat AB
发明人： Heidari, Babak , Beck, Marc , Keil, Matthias
IPC分类号： G03F7/00 , B81C1/00 , B81C99/00 , B82Y10/00
CPC分类号： B82Y10/00 , B81C1/0046 , B81C99/009 , B82Y40/00 , G03F7/0002

5. 发明公开

EP2199854A1 Process and method for modifying polymer film surface interaction 有权
标题翻译：纳米压印工艺和其制造杂化聚合物模具
公开(公告)号：EP2199854A1
公开(公告)日：2010-06-23
申请号：EP08172338.9
申请日：2008-12-19
申请人： Obducat AB
发明人： Keil, Matthias , Nilsson, Jakob , Ring, Johan , Heidari, Babak
IPC分类号： G03F7/00 , B29C33/38
CPC分类号： B29C33/3857 , B82Y10/00 , B82Y40/00 , G03F7/0002 , Y10T428/31504 , Y10T428/3154
摘要： The invention provides a modification of a polymer film surface interaction properties. In this process a polymer carrier object is covered by a chemical composition, comprising photo-polymerizable compounds, photo-initiators or catalysts with the ability to initiate polymerization and semi-fluorinated molecules.
The so-produced polymer mold contains semi-fluorinated moieties, which are predominantly located on the surface and on the surface near region of the patterned surface. The polymer mold is suitable as a template with modified properties in a nano-imprint lithography process.

6. 发明公开

EP1731965A2 Imprint stamp comprising cyclic olefin copolymer 有权
标题翻译： Druckstempel mit zyklischem Olefincopolymer
公开(公告)号：EP1731965A2
公开(公告)日：2006-12-13
申请号：EP06115141.1
申请日：2006-06-08
申请人： Obducat AB
发明人： Heidari, Babak , Beck, Marc , Keil, Matthias
IPC分类号： G03F7/00
CPC分类号： B82Y10/00 , B81C1/0046 , B81C99/009 , B82Y40/00 , G03F7/0002
摘要： A method is provided for transferring a pattern from a template (1) to an object (12) in an imprint process, using a two-step process. The first step includes contacting a pattern of the template surface with a polymer material comprising one or more Cyclic Olefin Copolymers (COCs), to produce a flexible polymer replica having a structured surface with an inverse of the pattern of the template surface. In a second step, after releasing the flexible polymer replica from the template, the inverse pattern of the flexible polymer replica is pressed into a resist layer on a substrate, to imprint a replica of the pattern of the template surface in therein.
摘要翻译：提供了一种用于使用两步过程将模式从模板（1）转移到压印过程中的对象（12）的方法。第一步包括将模板表面的图案与包含一种或多种环烯烃共聚物（COC）的聚合物材料接触，以产生具有与模板表面图案相反的结构化表面的柔性聚合物复制品。在第二步骤中，在从模板中释放柔性聚合物复制品之后，将柔性聚合物复制品的逆向图案压入基板上的抗蚀剂层中，以在其中印刷模板表面的图案的复制品。

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