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    • 1. 发明公开
    • BOTTOM LAYER FILM-FORMATION COMPOSITION OF SELF-ORGANIZING FILM CONTAINING POLYCYCLIC ORGANIC VINYL COMPOUND
    • 成分形成具有的多环有机化合物VINYL自组织土层FILMS
    • EP2937391A4
    • 2016-08-31
    • EP13864158
    • 2013-12-13
    • NISSAN CHEMICAL IND LTD
    • SOMEYA YASUNOBUWAKAYAMA HIROYUKIENDO TAKAFUMISAKAMOTO RIKIMARU
    • C09D201/00B05D1/38B05D3/10B05D7/24C09D5/00C09D125/00C09D139/04C09D145/00G03F7/11G03F7/26H01L21/027
    • C08J5/18B05D1/005B05D1/322B05D3/0254C08J2325/02C08J2325/08C08J2325/14C08J2333/12C08J2339/04C09D139/04C09D145/00C09D153/00C09D201/00G03F7/0002Y10T428/24802
    • There is provided an underlayer film for a self-assembled film and that does not intermix (layer-mix) with the self-assembled film as the upper layer and that enables the formation of a vertical pattern of the self-assembled film. An underlayer film-forming composition for a self-assembled film comprising a polymer including 0.2% by mole or more of a unit structure of a polycyclic aromatic vinyl compound relative to all unit structures of the polymer. The polymer includes 20% by mole or more of a unit structure of an aromatic vinyl compound relative to all the unit structures of the polymer and includes 1% by mole or more of a unit structure of the polycyclic aromatic vinyl compound relative to all the unit structures of the aromatic vinyl compound. The aromatic vinyl compound includes an optionally substituted vinylnaphthalene, acenaphthylene, or vinylcarbazole, and the polycyclic aromatic vinyl compound is vinylnaphthalene, acenaphthylene, or vinylcarbazole. The aromatic vinyl compound includes an optionally substituted styrene and an optionally substituted vinylnaphthalene, acenaphthylene, or vinylcarbazole, and the polycyclic aromatic vinyl compound is vinylnaphthalene, acenaphthylene, or vinylcarbazole.
    • 有被设置在下层膜为自组装薄膜,也不会混杂(层混合物)与所述自组装薄膜作为上层并且做允许自组装成膜的垂直图案的形成。 的下层膜形成用组合物,对于自组装膜,其包含聚合物包含(摩尔)或更多的多环芳族乙烯基化合物相对于一个单元结构的所述聚合物的全部结构单元为0.2%。 所述聚合物包括由摩尔或更多的芳族乙烯基化合物相对于结构单元的20%至所述聚合物的所有单元的结构,并且包括1摩尔%或更多的多环芳族乙烯基化合物相对于的单元结构的所有单元 芳香族乙烯基化合物的结构。 的芳香族乙烯基化合物包括乙烯基萘substituiertem到任选地,苊烯,或乙烯基咔唑,以及多环芳族乙烯基化合物是乙烯基萘,苊烯,或乙烯基咔唑。 芳香族乙烯基化合物包括OPTIONALLY substituiertem苯乙烯和在OPTIONALLY substituiertem乙烯基萘,苊烯,或乙烯基咔唑,以及多环芳族乙烯基化合物是乙烯基萘,苊烯,或乙烯基咔唑。