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1. 发明公开

EP1150318A1 MICROMACHINE SWITCH AND ITS PRODUCTION METHOD 有权
标题翻译： MIKROMECHANISCHER SCHALTER UND DESSEN HERSTELLUNGSVERFAHREN
公开(公告)号：EP1150318A1
公开(公告)日：2001-10-31
申请号：EP99959858.4
申请日：1999-12-16
申请人： NEC Corporation
发明人： SUZUKI, Kenichiro , ARA, Youichi , CHEN, Shuguang
IPC分类号： H01H59/00 , B81B3/00 , B81C1/00
CPC分类号： B81B3/0072 , B81B2203/0118 , H01H1/20 , H01H59/0009 , Y10T29/4916
摘要： To realize a micro switch which can be mass-produced, is low-cost, and is high-performance.
The micro switch includes: a supporting member 7 provided on a substrate 1 in such a manner as to be adjacent to the gap between two signal lines and to have a predetermined height with respect to the substrate 1; a flexible beam member (cantilever arm 8) provided in such a manner as to project from the supporting member almost horizontally to the above substrate surface and to extend so far that its part faces the above gap; a contact electrode 5 provided on the substrate 1 side of the beam member at least in such a position so as to face the gap, and a lower electrode 4 provided on the substrate 1 in such a manner as to face part of the beam member. A part of the beam member, ranging from the portion at which it is connected to the above supporting member 7 to the portion facing the above lower electrode 4, is allowed to be conductive to function as an upper electrode 9. And the thermal expansion coefficients of the beam member are allowed to be almost symmetric in the thickness direction perpendicular to the above substrate 1 surface, at least in a region ranging from the portion at which it is connected to the above supporting member 7 to the vicinity of the portion facing the above lower electrode 4.
摘要翻译：实现可批量生产的微型开关，成本低，性能高。微型开关包括：支撑构件7，其设置在与两个信号线之间的间隙相邻并且相对于基板1具有预定高度的方式设置在基板1上; 柔性梁构件（悬臂8），其以从支撑构件几乎水平地突出到上述基板表面的方式设置并延伸到其部分面向上述间隙; 设置在梁构件的基板1侧的接触电极5至少在与该间隙相对的这样的位置上;以及下部电极4，其以与梁构件的一部分相对的方式设置在基板1上。梁构件的从连接到上述支撑构件7的部分到面向上述下部电极4的部分的一部分被允许导电以用作上部电极9.并且热膨胀系数至少在从连接到上述支撑构件7的部分到面向上述基板1表面的部分附近的区域中，至少在与该基板1表面垂直的厚度方向上几乎对称。在下电极4上方

2. 发明公开

EP1143562A1 PHASED ARRAY ANTENNA AND ITS MANUFACTURING METHOD 审中-公开
标题翻译： VERFAHREN ZU IHRER HERSTELLUNG的潜力
公开(公告)号：EP1143562A1
公开(公告)日：2001-10-10
申请号：EP99973554.1
申请日：1999-11-22
申请人： NEC Corporation
发明人： MARUMOTO, Tsunehisa , IWATA, Ryuichi , ARA, Youichi , KUSAMITU, Hideki , SUZUKI, Kenichiro
IPC分类号： H01Q21/06 , H01Q23/00 , H01Q3/26
CPC分类号： H01Q3/2605 , H01Q21/0087 , H01Q21/065
摘要： A relatively small phased array antenna is formed at a low cost even if the number of radiating elements increases in order to improve the gain. The phased array antenna has a multilayered structure in which a number of radiating elements (15), a phase shift unit (16) for changing the phase of an RF signal transmitted/received at each radiating element, and a distribution/synthesis unit (14) are formed on different layers. Signal lines (X1 - Xm) and scanning lines (Y1 - Yn) are wired on a phase control layer (35) to connect phase shift units to each other in a matrix. The signal lines and the scanning lines are matrix-driven by selection units (12X, 12Y) so that desired phase shift amounts are set to phase shift units located at the intersections of the signal and scanning lines. In addition, switches (17S) of a phase shifter (17) are formed at once on the phase control layer.
摘要翻译：即使辐射元件的数量增加以增加增益，也以低成本形成相对较小的相控阵天线。相控阵天线具有多层结构，其中多个辐射元件（15），用于改变在每个辐射元件处发射/接收的RF信号的相位的相移单元（16）和分布/合成单元（14））形成在不同的层上。信号线（X1-Xm）和扫描线（Y1-Yn）被布线在相位控制层（35）上，以将矩阵中的相移单元相互连接。信号线和扫描线由选择单元（12X，12Y）进行矩阵驱动，使得期望的相移量被设置为位于信号和扫描线的交点处的相移单元。此外，移相器（17）的开关（17S）一次形成在相位控制层上。

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