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    • 1. 发明公开
    • Pressure transducer
    • 压力传感器
    • EP0759546A3
    • 1998-04-22
    • EP96305706.2
    • 1996-08-01
    • Moore Products Co.
    • Moore, James O.Kohler, Raymond H.Klauder, Philip R.
    • G01L9/12G01L19/04
    • G01L9/125G01L9/0075G01L15/00G01L19/02
    • A monolithic pressure transducer has a plurality of capacitive sensors (C R ,C A ,C S ). The capacitors are formed from the same silicon substrate and are equally affected by temperature variations, including temperature gradients. The capacitive sensors respectively sense temperature, absolute pressure, and differential pressure. A mode state machine (100) sequences the measurement of the capacitors under the control of a microprocessor (24) which forms the ratios between measurements from the temperature-sensing capacitor and each of the other two capacitors. The capacitors have a common electrode (89) which has portions forming diaphragms (80,94) associated with the absolute and differential pressure-sensing capacitors.
    • 单片式压力传感器具有多个电容式传感器(CR,CA,CS)。 电容器由相同的硅衬底形成,同样受包括温度梯度在内的温度变化的影响。 电容式传感器分别感测温度,绝对压力和压差。 模式状态机(100)在微处理器(24)的控制下对电容器的测量进行排序,该微处理器形成来自温度感测电容器和其他两个电容器中的每一个的测量值之间的比率。 电容器具有公共电极(89),该公共电极具有形成与绝压和差压检测电容器相关联的隔膜(80,94)的部分。
    • 2. 发明公开
    • Pressure transducer
    • Druckwandler
    • EP0759546A2
    • 1997-02-26
    • EP96305706.2
    • 1996-08-01
    • Moore Products Co.
    • Moore, James O.Kohler, Raymond H.Klauder, Philip R.
    • G01L9/12G01L19/04
    • G01L9/125G01L9/0075G01L15/00G01L19/02
    • A monolithic pressure transducer has a plurality of capacitive sensors (C R ,C A ,C S ). The capacitors are formed from the same silicon substrate and are equally affected by temperature variations, including temperature gradients. The capacitive sensors respectively sense temperature, absolute pressure, and differential pressure. A mode state machine (100) sequences the measurement of the capacitors under the control of a microprocessor (24) which forms the ratios between measurements from the temperature-sensing capacitor and each of the other two capacitors. The capacitors have a common electrode (89) which has portions forming diaphragms (80,94) associated with the absolute and differential pressure-sensing capacitors.
    • 单片压力传感器具有多个电容传感器(CR,CA,CS)。 电容器由相同的硅衬底形成,并受温度变化(包括温度梯度)的等效影响。 电容传感器分别感应温度,绝对压力和压差。 模式状态机(100)在微处理器(24)的控制下对电容器的测量进行排序,微处理器形成来自温度感测电容器的测量值与其他两个电容器之间的比率。 电容器具有公共电极(89),其具有形成与绝对和差压感测电容器相关联的膜片(80,94)的部分。
    • 3. 发明公开
    • Transducer having redundant pressure sensors
    • 德鲁克森森
    • EP0813047A2
    • 1997-12-17
    • EP97300983.0
    • 1997-02-14
    • Moore Products Co.
    • Klauder, Philip R.O'Brien, Christopher J.Moore, James O.
    • G01L9/00G01L9/12G01L13/02G01L27/00G01F1/38G01L15/00
    • G01L19/0015G01L9/0019G01L9/0073G01L9/065G01L9/125G01L19/02G01L27/005
    • A pressure transducer (10) having a redundant fluid pressure sensor can be used to determine if the pressure transducer needs to be recalibrated. The pressure transducer comprises a fluid pressure sensor (210) for measuring differential pressure. The fluid pressure sensor includes a pair of substantially identical pressure sensors (212,214) for providing a variable electrical output as a function of a differential fluid pressure and a reference sensor (C R ) for providing an electrical output independent of the differential fluid pressure. A conditioning circuit is provided for generating a frequency-based signal whose frequency is a function of the electrical output for each fluid pressure sensor. The electrical output of the first and second pressure sensors can be compared to determine whether the pressure transducer needs to be calibrated. In one embodiment, the pressure sensors comprise variable capacitors (CS 1 , CS 2 ). The first and second capacitors each have one fixed plate (130,134) and one movable plate (124,126) responsive to differential fluid pressure across the movable plate. The reference capacitor has two fixed plates (132,135). The first variable, second variable, and reference capacitors are all located in proximity to one another and in communication with the differential fluid pressure. The pressure transducer also includes a switching network (174) connected to the capacitors for selectably connecting at least one of the capacitors to an electronic circuit.
    • 缺陷检测涉及使用流体压力传感器测量施加的压差,该压力传感器由提供作为所施加的差分流体压力的函数的电输出的两个压力传感器组成。 差压流体压力通过阀门施加到压力传感器。 产生两个信号,频率与两个可变传感器的电气输出成比例。 确定两个信号之间的差是否在预选范围内。 如果第二信号在预选范围之外,则确定流体压力传感器是否损坏。
    • 5. 发明公开
    • Fluid velocity measuring method and apparatus
    • Verfahren und Vorrichtung zur Messung der Geschwindigkeit eines Fluids。
    • EP0250660A1
    • 1988-01-07
    • EP86304280.0
    • 1986-06-05
    • Moore Products Co.
    • Moore, James O.
    • G01P5/00G01F1/66
    • G01F1/667
    • An acoustic flow meter in which a plurality of different frequencies are transmitted in both upstream and downstream directions, and corresponding differences in transmission phase-delays due to such frequency changes detected and used to compute the fluid velocity by the formula when L is the distance between transmitter and receiver, M D is the slope of the graph of phase delay vs. transmitted frequency for the upstream direction of transmission, and M u is the corresponding slope for the downstream di­rection. A signal processor using a least-squares algorithm is preferably employed to obtain best values for M D and M u from the several values of phase-delay difference produced by the several different transmitted frequencies.
    • 一种声流计,其中在上下游方向上传输多个不同的频率,并且由于这种频率变化而发生的传输相位延迟的相应差异被检测并用于通过公式MATH来计算流体速度,当L为 发射机和接收机之间的距离,MD是上行传输方向的相位延迟与发射频率的曲线斜率,Mu是下行方向的相应斜率。 优选采用使用最小平方算法的信号处理器来从几个不同的发送频率产生的相位延迟差的若干值中获得MD和Mu的最佳值。