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1. 发明授权

EP2977720B1 A method for measuring a high accuracy height map of a test surface 有权
公开(公告)号：EP2977720B1
公开(公告)日：2019-06-05
申请号：EP14178509.7
申请日：2014-07-25
申请人： Mitutoyo Corporation
发明人： Zuiderweg, Adriaan Tiemen , Quaedackers, Johannes Anna , Visscher, Harm
IPC分类号： G01B11/24

2. 发明公开

EP2677271A1 Broadband interferometer for determining a property of a thin film 有权
标题翻译： Breitband干涉仪zur Bestimmung einer Eigenschaft einerDünnschicht
公开(公告)号：EP2677271A1
公开(公告)日：2013-12-25
申请号：EP13167065.5
申请日：2013-05-08
申请人： Mitutoyo Corporation
发明人： Haitjema, Han , Quaedackers, Johannes Anna
IPC分类号： G01B9/02 , G01B11/06 , G01N21/47
CPC分类号： G01B9/02088 , G01B9/02087 , G01B9/0209 , G01B11/0675 , G01N21/45 , G01N2021/4126
摘要： The invention relates to determining a property of a sample from a correlogram obtainable by scanning of a surface of the sample through a focal plane of an objective using broad-band interferometry. The correlogram may be displaying interference radiation intensity as a function of the scanning distance from the surface. The correlogram may be correlated with a secondary correlogram to obtain a cross correlogram or with the same correlogram to obtain an autocorrelogram. A property of the sample may be determined from the auto or cross correlogram.
摘要翻译：本发明涉及从通过使用宽带干涉测量的物镜的焦平面扫描样品可获得的相关图来确定样品的性质。相关图可以将干涉辐射强度显示为与表面的扫描距离的函数。相关图可以与二次相关图相关，以获得交叉相关图或用相同的相关图获得自相关图。样品的属性可以从自动或交叉相关图确定。

3. 发明公开

EP2977720A1 A method for measuring a high accuracy height map of a test surface 有权
标题翻译： Verfahren zur Messung einer hochgenauenHöhenkarteeinerTestoberfläche
公开(公告)号：EP2977720A1
公开(公告)日：2016-01-27
申请号：EP14178509.7
申请日：2014-07-25
申请人： Mitutoyo Corporation
发明人： Zuiderweg, Adriaan Tiemen , Quaedackers, Johannes Anna , Visscher, Harm
IPC分类号： G01B21/20 , G01B11/24
CPC分类号： G06T11/206 , G01B11/2441 , G01B11/245 , G01B2210/52
摘要： The invention relates to a method for measuring a high accuracy height map of a test surface using a multi sensor optical profiler. The method comprises:
measuring a coarse height map of the test surface with a pre-map sensor provided to the optical profiler with a relatively long working distance and/or a large field of view;
storing the coarse height map in a memory;
subdividing the coarse height map into sections as appropriate for the field of view of a relatively high resolution optical profiler sensor provided to the optical profiler;
calculating the corresponding X, Y and Z positions for the high resolution optical profiler sensor with respect to the test surface;
calculating a trajectory in the X, Y, Z-direction for the high resolution optical profiler sensor with respect to the test surface using the calculated X, Y, Z-positions;
moving the optical profiler in the X, Y, Z-direction with respect to the test surface according to the trajectory; and,
measuring a high accuracy height map with the high resolution optical profiler sensor.
摘要翻译：本发明涉及一种使用多传感器光学轮廓仪测量测试表面的高精度高度图的方法。该方法包括：使用提供给具有相对长的工作距离和/或大视场的光学轮廓仪的预先映射传感器来测量测试表面的粗略高度图; 将粗略高度图存储在存储器中; 根据提供给光学轮廓仪的相对高分辨率的光学轮廓仪传感器的视野，将粗略高度图细分为多个部分; 计算高分辨率光学轮廓传感器相对于测试表面的相应X，Y和Z位置; 使用计算出的X，Y，Z位置，计算相对于测试表面的高分辨率光学轮廓传感器的X，Y，Z方向的轨迹; 根据轨迹将光学轮廓仪相对于测试表面沿X，Y，Z方向移动; 并用高分辨率光学轮廓传感器测量高精度高度图。

4. 发明公开

EP2884338A1 Method of selecting a region of interest from interferometric measurements 审中-公开
标题翻译： Verfahren zumAuswähleneines Bereichs von Interesse aus interferometrischen Messungen
公开(公告)号：EP2884338A1
公开(公告)日：2015-06-17
申请号：EP13196937.0
申请日：2013-12-12
申请人： Mitutoyo Corporation
发明人： Haitjema, Han , Quaedackers, Johannes Anna
IPC分类号： G03F9/00 , G03F7/20 , G01B9/02
CPC分类号： G01B9/0209 , G01B9/02088 , G01B2210/56 , G03F7/70616
摘要： Method for determining a property of a surface of a sample from a correlogram obtainable by scanning of the surface of the sample through a focal plane of an objective while applying interferometry. The method comprising:
receiving data relating to a 3D image stack comprising of correlograms received on individual pixels of a 2D pixel array image sensor as a function of the scanning distance from the surface;
creating an average 2D image by averaging the correlograms for each pixel in the 3D image stack over the scanning distance;
selecting from the average 2D image the pixels of an area of interest;
calculating a derivative height independent property of the pixels of the area of interest; and,
determining a property of the area of interest of the sample from the derivative height independent property.
摘要翻译：用于通过在进行干涉测量时通过物镜的焦平面扫描样品表面而获得的相关图来确定样品表面性质的方法。该方法包括：接收关于3D图像堆叠的数据，该3D图像堆叠包括作为从该表面的扫描距离的函数的2D像素阵列图像传感器的各个像素上接收的相关图; 通过在扫描距离上平均3D图像堆叠中每个像素的相关图来创建平均2D图像; 从平均2D图像中选择感兴趣区域的像素; 计算感兴趣区域的像素的导数高度独立性质; 以及从衍生高度独立性质确定样本的感兴趣区域的属性。

5. 发明授权

EP2955478B1 Calculating a height map of a body of transparent material with an inclined or curved surface 有权
公开(公告)号：EP2955478B1
公开(公告)日：2019-08-21
申请号：EP14172385.8
申请日：2014-06-13
申请人： Mitutoyo Corporation
发明人： Quaedackers, Johannes Anna
IPC分类号： G01B11/06 , G01B11/24 , G01B9/02

6. 发明授权

EP2813801B1 Interferometer system and method to generate an interference signal of a surface of a sample 有权
公开(公告)号：EP2813801B1
公开(公告)日：2018-10-31
申请号：EP13171266.3
申请日：2013-06-10
申请人： Mitutoyo Corporation
发明人： Haitjema, Han , Quaedackers, Johannes Anna , Zuiderweg, Adriaan Tiemen
IPC分类号： G01B9/02 , G02B27/10 , G02B27/28 , G02F1/01
CPC分类号： G01J1/02 , G01B9/02012 , G01B9/02067 , G01B9/0209 , G02B27/10 , G02B27/283
摘要： The invention relates to an interferometer system to generate an interference signal of a surface of a sample with: a broadband illuminator to provide a broadband illumination beam; a beam splitter to split the broadband illumination beam in a reference beam for reflection on a reference reflector and a measurement beam for reflection on the surface of the sample; and, a detector to receive an interference radiation intensity created between the reference beam reflected from the reference reflector and the reflected measurement beam from the surface of the sample to generate an interference signal. The interferometer system having a continuous variable broadband reflector in the beam splitter and/or the reference reflector to adjust the broadband radiation intensity balance between the measurement beam and the reference beam.

7. 发明授权

EP2677271B1 Broadband interferometer for determining a property of a thin film 有权
标题翻译：用于确定薄膜特性的宽带干涉仪
公开(公告)号：EP2677271B1
公开(公告)日：2017-04-26
申请号：EP13167065.5
申请日：2013-05-08
申请人： Mitutoyo Corporation
发明人： Haitjema, Han , Quaedackers, Johannes Anna
IPC分类号： G01B9/02 , G01B11/06 , G01N21/47
CPC分类号： G01B9/02088 , G01B9/02087 , G01B9/0209 , G01B11/0675 , G01N21/45 , G01N2021/4126

8. 发明公开

EP2955478A1 Calculating a height map of a body of transparent material with an inclined or curved surface 有权
标题翻译：透明材料的主体的高度图的计算具有倾斜的或弯曲的表面
公开(公告)号：EP2955478A1
公开(公告)日：2015-12-16
申请号：EP14172385.8
申请日：2014-06-13
申请人： Mitutoyo Corporation
发明人： Quaedackers, Johannes Anna
IPC分类号： G01B9/02 , G01B21/20 , G01B11/24
CPC分类号： G01B11/0608 , G01B9/02085 , G01B11/2441
摘要： The invention relates to a method for calculating a height map of a sample comprising a body of a transparent material having a refractive index (n) with an inclined or curved surface, the body being provided on an underlying surface extending laterally from underneath the body. The method comprising:
positioning a first area of a body of a transparent material with an inclined or curved surface and a second area of the underlying surface extending laterally from underneath the body under an optical profiler;
measuring a height map of the first area (ZIS) and the second area (ZUS) with the optical profiler; and,
calculating a height map of the inclined or curved surface (HIS) by using the refractive index, the measured height map of the first area (ZIS) and the second area (ZUS).
摘要翻译：本发明涉及一种用于计算包含具有与倾斜的或弯曲的表面的折射率（n）的透明材料制成的本体的样品的高度地图的方法，被设置在主体上，在下面的表面从所述主体下面延伸尾盘反弹。该方法包括：定位在透明材料制成的主体的与倾斜的或弯曲的表面和所述下层表面的光学轮廓下方延伸从本体下方尾盘反弹的第二区域的第一区域; 测量所述第一区域（CIS）和第二区域（ZUS）与光学轮廓的高度图; 并且，通过使用折射率，所述第一区域（CIS）和第二区域（ZUS）的测量高度地图计算的倾斜或弯曲表面（HIS）的高度图。

9. 发明公开

EP2813801A1 Interferometer system and method to generate an interference signal of a surface of a sample 有权
标题翻译：干涉仪系统和Verfahren zur Erzeugung eines Interferenzsignals einerOberflächeeiner Probe
公开(公告)号：EP2813801A1
公开(公告)日：2014-12-17
申请号：EP13171266.3
申请日：2013-06-10
申请人： Mitutoyo Corporation
发明人： Haitjema, Han , Quaedackers, Johannes Anna , Zuiderweg, Adriaan Tiemen
IPC分类号： G01B9/02 , G02B27/10 , G02B27/28 , G02F1/01
CPC分类号： G01J1/02 , G01B9/02012 , G01B9/02067 , G01B9/0209 , G02B27/10 , G02B27/283
摘要： The invention relates to an interferometer system to generate an interference signal of a surface of a sample with:
a broadband illuminator to provide a broadband illumination beam;
a beam splitter to split the broadband illumination beam in a reference beam for reflection on a reference reflector and a measurement beam for reflection on the surface of the sample; and,
a detector to receive an interference radiation intensity created between the reference beam reflected from the reference reflector and the reflected measurement beam from the surface of the sample to generate an interference signal. The interferometer system having a continuous variable broadband reflector in the beam splitter and/or the reference reflector to adjust the broadband radiation intensity balance between the measurement beam and the reference beam.
摘要翻译：本发明涉及一种用于产生样品表面的干涉信号的干涉仪系统，其具有：宽带照明器，以提供宽带照明光束; 分束器，用于将参考光束中的宽带照明光束分离以用于参考反射器上的反射和用于在样品表面上反射的测量光束; 以及检测器，用于接收从参考反射器反射的参考光束与来自样品表面的反射测量光束之间产生的干涉辐射强度，以产生干涉信号。干涉仪系统在分束器和/或参考反射器中具有连续的可变宽带反射器，以调节测量光束和参考光束之间的宽带辐射强度平衡。

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