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1. 发明授权

EP3290701B1 MINIATURE FLUID CONTROL DEVICE AND PIEZOELECTRIC ACTUATOR THEREOF 有权
公开(公告)号：EP3290701B1
公开(公告)日：2020-05-13
申请号：EP17179908.3
申请日：2017-07-06
申请人： Microjet Technology Co., Ltd
发明人： Han, Yung-Lung , Huang, Chi-Feng , Chen, Shih-Chang , Liao, Jia-Yu , Liao, Hung-Hsin , Huang, Che-Wei , Chen, Shou-Hung
IPC分类号： F04B43/04 , F04B45/047 , F04D33/00

2. 发明公开

EP3203078A1 MINIATURE PNEUMATIC DEVICE 有权
公开(公告)号：EP3203078A1
公开(公告)日：2017-08-09
申请号：EP17152118.0
申请日：2017-01-19
申请人： Microjet Technology Co., Ltd
发明人： Chen, Shih-Chang , Huang, Chi-Feng , Han, Yung-Lung , Liao, Jia-Yu , Chen, Shou-Hung , Huang, Che-Wei , Liao, Hung-Hsin , Chen, Chao-Chih , Chen, Jheng-Wei , Chang, Ying-Lun , Chang, Chia-Hao , Lee, Wei-Ming
IPC分类号： F04B43/04
CPC分类号： F16K99/0048 , F16K99/0015 , F16K2099/0094 , H02N2/043
摘要： A miniature pneumatic device (1) includes a miniature fluid control device (1A) and a miniature valve device (1B). The miniature fluid control device (1A) includes a gas inlet plate (11), a resonance plate (12), a piezoelectric actuator (13) and a gas collecting plate (16). A first chamber (121) is formed between the resonance plate (12) and the piezoelectric actuator (13). After a gas is fed into the gas inlet plate (11), the gas is transferred to the first chamber (121) through the resonance plate (12) and then transferred downwardly. Consequently, a pressure gradient is generated to continuously push the gas. The miniature valve device (1B) includes a valve plate (17) and a gas outlet plate (18). After the gas is transferred from the miniature fluid control device (1A) to the miniature valve device (1B), the valve opening (170) of the valve plate (17) is correspondingly opened or closed and the gas is transferred in one direction. Consequently, a pressure-collecting operation or a pressure-releasing operation is selectively performed.

3. 发明公开

EP3203076A1 MINIATURE FLUID CONTROL DEVICE 有权
公开(公告)号：EP3203076A1
公开(公告)日：2017-08-09
申请号：EP17152114.9
申请日：2017-01-19
申请人： Microjet Technology Co., Ltd
发明人： Chen, Shih-Chang , Huang, Chi-Feng , Han, Yung-Lung , Liao, Jia-Yu , Chen, Shou-Hung , Huang, Che-Wei , Liao, Hung-Hsin , Chen, Chao-Chih , Chen, Jheng-Wei , Chang, Ying-Lun , Chang, Chia-Hao , Lee, Wei-Ming
IPC分类号： F04B43/04
CPC分类号： F04B45/047 , F04B53/10 , F16K99/0015 , F16K99/0048 , F16K2099/0094 , H01L41/053 , H01L41/09 , H01L41/187
摘要： A miniature fluid control device (1A) includes a piezoelectric actuator (13) and a housing (1a). The piezoelectric actuator (13) comprises a suspension plate (130), an outer frame (131), at least one bracket (132) and a piezoelectric ceramic plate (133). The piezoelectric ceramic plate (133) is attached on a first surface (130b) of the suspension plate (130) and has a length not larger than that of the suspension plate (130). The housing (1a) includes a gas collecting plate (16) and a base (10). The gas collecting plate (16) is a frame body with a sidewall (168) and comprises a plurality of perforations (163, 164). The base (10) seals a bottom of the piezoelectric actuator (13) and has a central aperture (120) corresponding to the middle portion (130d) of the suspension plate (130). When the voltage is applied to the piezoelectric actuator (13), the suspension plate (130) is permitted to undergo the curvy vibration, the fluid is transferred from the central aperture (120) of the base (10) to the gas-collecting chamber (162), and exited from the perforations (163, 164).

4. 发明公开

EP3203070A1 MINIATURE FLUID CONTROL DEVICE 有权
公开(公告)号：EP3203070A1
公开(公告)日：2017-08-09
申请号：EP16207248.2
申请日：2016-12-29
申请人： Microjet Technology Co., Ltd
发明人： Chen, Shih-Chang , Huang, Chi-Feng , Han, Yung-Lung , Liao, Jia-Yu , Chen, Shou-Hung , Huang, Che-Wei , Liao, Hung-Hsin , Chen, Chao-Chih , Chen, Jheng-Wei , Chang, Ying-Lun , Chang, Chia-Hao , Lee, Wei-Ming
IPC分类号： F04B43/04
CPC分类号： F16K99/0048 , F16K99/0015 , F16K2099/0082 , F16K2099/0094
摘要： A miniature fluid control device (1A) includes a gas inlet plate (11), a resonance plate (12) and a piezoelectric actuator (13). The gas inlet plate (11) includes at least one inlet (110), at least one convergence channel (112) and a central cavity (111). A convergence chamber is defined by the central cavity (111). The resonance plate (12) has a central aperture (120). The piezoelectric actuator (13) includes a suspension plate (130), an outer frame (131) and a piezoelectric ceramic plate (133). A gap is formed between the resonance plate (12) and the piezoelectric actuator (13) to define a first chamber (121). When the piezoelectric actuator (13) is driven and after the gas is fed into the miniature fluid control device (1A) through the inlet (110) of the gas inlet plate (11), the gas is sequentially converged to the central cavity (111) through the convergence channel (112), transferred through the central aperture (120) of the resonance plate (12), introduced into the first chamber (121), transferred downwardly through the piezoelectric actuator (13), and exited from the miniature fluid control device (1A).

5. 发明授权

EP3290705B1 FLUID CONTROL DEVICE 有权
公开(公告)号：EP3290705B1
公开(公告)日：2020-09-09
申请号：EP17179950.5
申请日：2017-07-06
申请人： Microjet Technology Co., Ltd
发明人： Chen, Shih-Chang , Huang, Chi-Feng , Han, Yung-Lung , Chen, Shou-Hung , Liao, Hung-Hsin
IPC分类号： F04B43/04

6. 发明公开

EP3203080A1 MINIATURE PNEUMATIC DEVICE 有权
公开(公告)号：EP3203080A1
公开(公告)日：2017-08-09
申请号：EP17152141.2
申请日：2017-01-19
申请人： Microjet Technology Co., Ltd
发明人： Chen, Shih-Chang , Huang, Chi-Feng , Han, Yung-Lung , Liao, Jia-Yu , Chen, Shou-Hung , Huang, Che-Wei , Liao, Hung-Hsin , Chen, Chao-Chih , Chen, Jheng-Wei , Chang, Ying-Lun , Chang, Chia-Hao , Lee, Wei-Ming
IPC分类号： F04B43/04
CPC分类号： F04B45/047 , F04B53/10 , F16K99/0015 , F16K99/0048 , F16K2099/0094 , H01L41/0973
摘要： A miniature pneumatic device (1) includes a miniature fluid control device (1A) and a miniature valve device (1B). The miniature fluid control device (1A) includes a gas inlet plate (11), a resonance plate (12), a piezoelectric actuator (13) and a gas collecting plate (16). A first chamber (121) is formed between the resonance plate (12) and the piezoelectric actuator (13). After a gas is fed into the gas inlet plate (11), the gas is transferred to the first chamber (121) through the resonance plate (12) and then transferred downwardly. Consequently, a pressure gradient is generated to continuously push the gas. The miniature valve device (1B) includes a valve plate (17) and a gas outlet plate (18). After the gas is transferred from the miniature fluid control device (1A) to the miniature valve device (1B), the valve opening (170) of the valve plate (17) is correspondingly opened or closed and the gas is transferred in one direction. Consequently, a pressure-collecting operation or a pressure-releasing operation is selectively performed.

7. 发明公开

EP3290705A1 FLUID CONTROL DEVICE 有权
标题翻译：流体控制装置
公开(公告)号：EP3290705A1
公开(公告)日：2018-03-07
申请号：EP17179950.5
申请日：2017-07-06
申请人： Microjet Technology Co., Ltd
发明人： Chen, Shih-Chang , Huang, Chi-Feng , Han, Yung-Lung , Chen, Shou-Hung , Liao, Hung-Hsin
IPC分类号： F04B43/04
摘要： A fluid control device (2) includes a piezoelectric actuator (23) and a deformable substrate (20). The piezoelectric actuator (23) includes a piezoelectric element (233) and a vibration plate (230). The piezoelectric element (233) is attached on a first surface (230b) of the vibration plate (230) and is subjected to deformation in response to an applied voltage. The vibration plate (230) is subjected to a curvy vibration in response to the deformation of the piezoelectric element (233). A bulge (230c) is formed on a second surface (230a) of the vibration plate (230). The deformable substrate (20) includes a flexible plate (22) and a communication plate (21) stacked on each other. A synchronously-deformed structure is defined by the flexible plate (22) and the communication plate (21). The deformable substrate (20) is bent in the direction toward the vibration plate (230). There is a specified depth (δ) maintained between the flexible plate (22) and the bulge (230c) of the vibration plate (230). The flexible plate (22) includes a movable part (22a) corresponding to the bulge (230c) of the vibration plate (230).
摘要翻译：流体控制装置（2）包括压电致动器（23）和可变形基板（20）。压电致动器（23）包括压电元件（233）和振动板（230）。压电元件（233）附着在振动板（230）的第一表面（230b）上并且响应于施加的电压而经受变形。响应于压电元件（233）的变形，振动板（230）受到弯曲振动。凸起（230c）形成在振动板（230）的第二表面（230a）上。可变形基板（20）包括彼此堆叠的柔性板（22）和连通板（21）。同步变形的结构由柔性板（22）和连通板（21）限定。可变形基板（20）在朝向振动板（230）的方向上弯曲。在挠性板（22）与振动板（230）的凸部（230c）之间保持规定的深度（δ）。柔性板（22）包括对应于振动板（230）的凸起（230c）的可动部分（22a）。

8. 发明公开

EP3290699A1 MINIATURE FLUID CONTROL DEVICE 有权
标题翻译：微型流体控制装置
公开(公告)号：EP3290699A1
公开(公告)日：2018-03-07
申请号：EP17179904.2
申请日：2017-07-06
申请人： Microjet Technology Co., Ltd
发明人： Han, Yung-Lung , Huang, Chi-Feng , Chen, Shih-Chang , Liao, Jia-Yu , Liao, Hung-Hsin , Huang, Che-Wei , Chen, Shou-Hung
IPC分类号： F04B43/04 , F04B53/16
摘要： A miniature fluid control device (1) includes a piezoelectric actuator (13), a gas collecting plate (16) and a base (10). The piezoelectric actuator (13) includes a suspension plate (130), an outer frame (131), at least one bracket (132) and a piezoelectric ceramic plate (133). The suspension plate (130) is a square plate. The outer frame (131) is arranged around the suspension plate (130). A surface of the outer frame (131) and a surface of the suspension plate (130) are coplanar with each other. The gas collecting plate (16) is a frame body with an accommodation space (16a). The base (10) includes a gas inlet plate (11) and a resonance plate (12). The base (10) is disposed within the accommodation space (16a) to seal the piezoelectric actuator (13). An adhesive layer (136) is arranged between the second surface (131a) of the outer frame (131) of the piezoelectric actuator (13) and the resonance plate (12). Consequently, a depth of a compressible chamber (121) between the piezoelectric actuator (13) and the resonance plate (12) is maintained.
摘要翻译：微型流体控制装置（1）包括压电致动器（13），气体收集板（16）和基座（10）。压电致动器（13）包括悬架板（130），外框架（131），至少一个支架（132）和压电陶瓷板（133）。悬挂板（130）是方形板。外框（131）围绕悬挂板（130）布置。外框架131的表面和悬挂板130的表面彼此共面。集气板（16）是具有收容空间（16a）的框体。基座（10）包括进气板（11）和共振板（12）。基座（10）设置在容纳空间（16a）内以密封压电致动器（13）。在压电致动器（13）的外框架（131）的第二表面（131a）和谐振板（12）之间布置粘合层（136）。因此，维持压电致动器（13）和共振板（12）之间的可压缩室（121）的深度。

9. 发明公开

EP3203077A1 PIEZOELECTRIC ACTUATOR 有权
公开(公告)号：EP3203077A1
公开(公告)日：2017-08-09
申请号：EP17152115.6
申请日：2017-01-19
申请人： Microjet Technology Co., Ltd
发明人： Chen, Shih-Chang , Huang, Chi-Feng , Han, Yung-Lung , Liao, Jia-Yu , Chen, Shou-Hung , Huang, Che-Wei , Liao, Hung-Hsin , Chen, Chao-Chih , Chen, Jheng-Wei , Chang, Ying-Lun , Chang, Chia-Hao , Lee, Wei-Ming
IPC分类号： F04B43/04
CPC分类号： H01L41/0973 , F04B45/047 , F16K99/0015 , F16K99/0048 , F16K2099/0094
摘要： A piezoelectric actuator (13) includes a suspension plate (130), a piezoelectric ceramic plate (133), an outer frame (131) and a bracket (132). The suspension plate (130) is permitted to undergo a curvy vibration from a middle portion (130d) to a periphery portion (130e). The piezoelectric ceramic plate (133) is attached on the suspension plate (130). When a voltage is applied to the piezoelectric ceramic plate (133), the suspension plate (130) is driven to undergo the curvy vibration. The outer frame (131) is arranged around the suspension plate (130). The bracket (132) is connected between the suspension plate (130) and the outer frame (131) for elastically supporting the suspension plate (130), and includes an intermediate part (p21) formed in a vacant space between the suspension plate (130) and the outer frame (131) and in parallel with the outer frame (131) and the suspension plate (130), a first connecting part (p20) arranged between the intermediate part (p21) and the suspension plate (130), and a second connecting part (p22) arranged between the intermediate part (p21) and the outer frame (131).

10. 发明公开

EP3203072A1 MINIATURE PNEUMATIC DEVICE 有权
标题翻译：微型气动装置
公开(公告)号：EP3203072A1
公开(公告)日：2017-08-09
申请号：EP16207273.0
申请日：2016-12-29
申请人： Microjet Technology Co., Ltd
发明人： Chen, Shih-Chang , Huang, Chi-Feng , Han, Yung-Lung , Liao, Jia-Yu , Chen, Shou-Hung , Huang, Che-Wei , Liao, Hung-Hsin , Chen, Chao-Chih , Chen, Jheng-Wei , Chang, Ying-Lun , Chang, Chia-Hao , Lee, Wei-Ming
IPC分类号： F04B43/04
CPC分类号： F04B45/047 , F04B53/10 , F04B2203/0402 , F04B2203/0404 , F04B2205/05 , F16K99/0015 , F16K99/0048 , F16K2099/0094
摘要： A miniature pneumatic device (1) includes a miniature fluid control device (1A) and a miniature valve device (1B). The miniature fluid control device (1A) includes a gas inlet plate (11), a resonance plate (12), a piezoelectric actuator (13) and a gas collecting plate (16). A first chamber (121) is formed between the resonance plate (12) and the piezoelectric actuator (13). After a gas is fed into the gas inlet plate (11), the gas is transferred to the first chamber (121) through the resonance plate (12) and then transferred downwardly. Consequently, a pressure gradient is generated to continuously push the gas. The miniature valve device (1B) includes a valve plate (17) and a gas outlet plate (18). After the gas is transferred from the miniature fluid control device (1A) to the miniature valve device (1B), the valve opening (170) of the valve plate (17) is correspondingly opened or closed and the gas is transferred in one direction. Consequently, a pressure-collecting operation or a pressure-releasing operation is selectively performed.
摘要翻译：微型气动装置（1）包括微型流体控制装置（1A）和微型阀装置（1B）。微型流体控制装置1A包括气体入口板11，共振板12，压电致动器13和集气板16。在谐振板（12）和压电致动器（13）之间形成第一腔室（121）。气体进入气体入口板（11）后，气体通过共振板（12）传送到第一室（121），然后向下传送。因此，产生压力梯度以连续推动气体。微型阀装置（1B）包括阀板（17）和出气板（18）。在气体从微型流体控制装置（1A）转移到微型阀装置（1B）之后，阀板（17）的阀开口（170）相应地打开或关闭，并且气体沿一个方向传送。结果，选择性地执行压力收集操作或压力释放操作。

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