专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

2. 发明公开

EP3178109A1 SUBSTRATTRÄGER 有权转让
公开(公告)号：EP3178109A1
公开(公告)日：2017-06-14
申请号：EP16753705.9
申请日：2016-08-02
申请人： Meyer Burger (Germany) AG
发明人： RASCHKE, Sebastian , ANSORGE, Erik , KEHR, Mirko , BÖHM, Christian
IPC分类号： H01L21/687
CPC分类号： H01L21/67333 , H01L21/68735 , H01L21/68771
摘要： The present invention relates to a substrate support with a substrate support plate which has a front substrate support surface on which at least one substrate-receiving area is provided for receiving a respective substrate. The object of the present invention is to propose a substrate support which, as far as possible without impairing the properties of the substrate or the working of the substrate, ensures a secure application of the substrate and, while permitting rapid handling, allows the substrate to be easily removed from the substrate support without being destroyed. According to the invention, the object is achieved by the fact that the substrate-receiving area has an inner area and an outer area extending around the inner area, wherein the outer area has plateaus which are spaced apart from each other and elevated above a surface of the inner area and serve to carry edge areas of the substrate, wherein ventilation channels are provided between the plateaus.
摘要翻译：具有基板支撑板的基板支撑件技术领域本发明涉及一种具有基板支撑板的基板支撑件，该基板支撑板具有前基板支撑表面，在该前基板支撑表面上设置有至少一个基板接收区域用于接收相应的基板发明内容本发明的目的是提出一种衬底支撑件，其尽可能不损害衬底的性能或衬底的工作，确保衬底的安全施加，并且在允许快速处理的同时允许衬底易于从基板支架上移除而不被破坏。根据本发明，该目的通过以下事实来实现，即衬底容纳区域具有围绕内部区域延伸的内部区域和外部区域，其中外部区域具有彼此间隔开并且在表面上方升高的平台并用于承载基板的边缘区域，其中通风通道设置在平台之间。

IPRDB

热门服务

关于我们

友情链接

联系方式