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2. 发明授权

EP1501963B1 CVI FURNACE WITH GAS PREHEATER 有权转让
标题翻译：与气体预热烤箱CVI
公开(公告)号：EP1501963B1
公开(公告)日：2012-08-08
申请号：EP03747459.0
申请日：2003-05-05
申请人： Messier-Bugatti-Dowty
发明人： SION, Eric , BAUDRY, Yvan
IPC分类号： C23C16/04
CPC分类号： C23C16/26 , C23C16/045
摘要： A gas preheater for a CVI furnace designed for the densification of annular porous substrates (32)arranged in a plurality of vertical annular stacks of substrates, comprising: a sleeve (52) made of heat conductive material resting upon the bottom wall (14) of a susceptor (12,14) and delimiting a gas preheating chamber, with a gas inlet (56) opening in the gas preheating chamber; a heat exchange assembly (50) located in the gas preheating chamber; a gas distribution plate (60) resting upon the sleeve, covering the gas preheating chamber and provided with a plurality of passages (60a,60b) for preheated gas; a load supporting plate for supporting stacks of annular substrates and provided with a plurality of passages in communication with respective passages of the gas distribution plate and registration with internal volumes of respective stacks of annular substrates; and nozzles (62) inserted in passages communicating the gas preheating zone with the internal volumes of respective stacks of annular substrates for adjusting the flows of preheated gas respectively admitted in said internal volumes.

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