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1. 发明公开

EP1063670A3 Bonded article with improved work function uniformity and method for making the same 有权
标题翻译：粘结制品具有改进的放电电位的均匀性及其制造方法
公开(公告)号：EP1063670A3
公开(公告)日：2006-05-10
申请号：EP00305016.8
申请日：2000-06-13
申请人： LUCENT TECHNOLOGIES INC.
发明人： Katsap, Victor , Waskiewicz, Waren K.
IPC分类号： H01J1/15 , H01J9/04 , H01J37/06
CPC分类号： H01J1/15 , H01J9/04 , H01J37/06 , H01J2237/3175
摘要： A bonded article including a single crystal cathode with an improved work function, for use in projection electron beam lithography, such as the SCALPEL™ system. Because of its single crystalline structure, the single crystal cathode has only slightly misoriented grains. As a result, the single crystal cathode has fewer structural non-uniformities than conventional micro-polycrystalline foils, and therefore a more uniform emission characteristic. The single crystal cathode may be made of at least one of tantalum, tungsten, rhenium, and molybdenum. A local bonding technique for bonding a single crystal cathode with a conventional member. The local bonding technique does not recrystallize a center of the single crystal cathode, and therefore produces a bonded article which is usable in a projection electron lithography system, such as the SCALPEL™ system. The local bonding technique may be laser welding and the single crystal cathode may be made of at least one of tantalum, tungsten, rhenium, and molybdenum. The member may be a conventional filament and the filament may be made of one of tungsten, a tungsten-rhenium alloy, and a tungsten-tantalum alloy.

2. 发明公开

EP1063670A2 Bonded article with improved work function uniformity and method for making the same 有权
标题翻译：粘结制品具有改进的放电电位的均匀性及其制造方法
公开(公告)号：EP1063670A2
公开(公告)日：2000-12-27
申请号：EP00305016.8
申请日：2000-06-13
申请人： LUCENT TECHNOLOGIES INC.
发明人： Katsap, Victor , Waskiewicz, Waren K.
IPC分类号： H01J1/15 , H01J9/04 , H01J37/06
CPC分类号： H01J1/15 , H01J9/04 , H01J37/06 , H01J2237/3175
摘要： A bonded article including a single crystal cathode with an improved work function, for use in projection electron beam lithography, such as the SCALPEL™ system. Because of its single crystalline structure, the single crystal cathode has only slightly misoriented grains. As a result, the single crystal cathode has fewer structural non-uniformities than conventional micro-polycrystalline foils, and therefore a more uniform emission characteristic. The single crystal cathode may be made of at least one of tantalum, tungsten, rhenium, and molybdenum. A local bonding technique for bonding a single crystal cathode with a conventional member. The local bonding technique does not recrystallize a center of the single crystal cathode, and therefore produces a bonded article which is usable in a projection electron lithography system, such as the SCALPEL™ system. The local bonding technique may be laser welding and the single crystal cathode may be made of at least one of tantalum, tungsten, rhenium, and molybdenum. The member may be a conventional filament and the filament may be made of one of tungsten, a tungsten-rhenium alloy, and a tungsten-tantalum alloy.
摘要翻译：一种粘结制品，包括含有改进的功函数的单晶阴极，在投影电子束光刻，：如SCALPEL“¢系统中使用，由于其单结晶结构的，单晶阴极仅略微取向错误的晶粒。其结果是，单晶阴极具有结构的非均匀性比常规的微多晶箔更少，因此更均匀的发射特性。单晶阴极可以由钽，钨，铼和钼中的至少一种制成。用于与常规部件贴合的单晶阴极局部接合技术。该局部粘合技术不再结晶单晶阴极的中心处，并因此产生一个粘结制品所有这些是在投影电子光刻系统中使用，：如SCALPEL“¢系统，该局部粘合技术可以是激光焊接和单晶体阴极可以由钽，钨，铼和钼中的至少一种制成。所述构件可以是传统的灯丝与灯丝可以由钨，钨 - 铼合金中的一种，和钨 - 钽合金构成。

3. 发明授权

EP1063670B1 Bonded article with improved work function uniformity and method for making the same 有权
标题翻译：粘结制品具有改进的放电电位的均匀性及其制造方法
公开(公告)号：EP1063670B1
公开(公告)日：2009-11-25
申请号：EP00305016.8
申请日：2000-06-13
申请人： LUCENT TECHNOLOGIES INC.
发明人： Katsap, Victor , Waskiewicz, Waren K.
IPC分类号： H01J1/15 , H01J9/04 , H01J37/06
CPC分类号： H01J1/15 , H01J9/04 , H01J37/06 , H01J2237/3175

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