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    • 4. 发明公开
    • Apparatus for inspecting semiconductor substrates
    • 设备用于半导体基板的测试
    • EP0735361A3
    • 1998-06-10
    • EP96104612
    • 1996-03-22
    • LINTEC CORP
    • KUROKAWA SHUJIKOBAYASHI KENJI
    • G01N21/88
    • G01N21/8806
    • A lighting apparatus 1 has a convex lens 11 arranged so that its optical axis is at an angle  with respect to the normal of an observation portion 3a (e.g., a semiconductor substrate or the like), with a camera 5 arranged in the path of the reflected light rays. When a light-emitting portion 13 is arranged along the optical axis of the lens 11, a bright field illumination takes place. If a knob 29 is turned, the light-emitting portion 13 moves along a ball screw 25, thereby changing the illumination from a bright field illumination to a dark field illumination. When a knob 37 is turned, the light exiting the lens 11 will diverge if the light-emitting portion 13 is moved close to the lens 11, converge if the light-emitting portion 13 is moved far away from the lens 11, and be parallel if the light-emitting portion 13 is positioned at the focal point of the lens 11. By changing the position of the light-emitting portion 13 in this way, it is possible to change the illuminating angle and the illuminating angle distribution, and by adjusting the position of the light-emitting portion 13 in accordance with the optical characteristics of the object 3, it is possible to obtain a high contrast image. It is also possible for these adjustments to be carried out automatically by using an actuator, microcomputer or the like.
    • 6. 发明公开
    • STICKING APPARATUS
    • STICKVORRICHTUNG
    • EP1693302A4
    • 2009-08-12
    • EP04792961
    • 2004-10-26
    • LINTEC CORP
    • DANGAMI AKIRAKOBAYASHI KENJI
    • B65C9/36B65C9/28B65C9/40
    • B65C9/28B65C9/36B65C9/40B65C2009/401Y10T156/17
    • A sticking apparatus (10), comprising a label sticking means (12) holding a label (L), a drive device (13) supporting the label sticking means (12) and moving the label sticking means (12) in the directions apart from and close to a stuck body (C), and a clearance maintaining means (14) maintaining a clearance (D) between the label (L) held on the label sticking means (12) and the label sticking surface (C1) at the stuck body (C) to a set clearance. The clearance maintaining means (14) is installed on the label sticking means (12) so as to be moved together with the label sticking means (12). The clearance maintaining means (14) comprises a contact body (46) displaced when coming into contact with the label sticking surface (C1) and a single sensor (47) detecting the displacement of the contact body (46), and detects the position of the contact body (46) when the clearance (D) is set to the set clearance to stop the movement of the label sticking means (12).
    • 一种粘贴装置(10),包括一个保持标签(L)的标签粘贴装置(12),一个支撑标签粘贴装置(12)的驱动装置(13),并且使标签粘贴装置(12) 并靠近被卡住的物体(C);以及间隔保持装置(14),保持被保持在标签粘贴装置(12)上的标签(L)与被卡住的标签粘贴表面(C1)之间的间隙(D) 身体(C)到设定的间隙。 间隙保持装置(14)安装在标签粘贴装置(12)上,以便与标签粘贴装置(12)一起移动。 间隙保持装置(14)包括当与标签粘贴表面(C1)接触时移动的接触体(46)和检测接触体(46)的位移的单个传感器(47),并且检测 当间隙(D)设定为设定间隙时,接触体(46)停止标签粘贴装置(12)的移动。