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    • 1. 发明公开
    • TERAHERTZ ELECTROMAGNETIC WAVE RADIATION ELEMENT AND ITS MANUFACTURING METHOD
    • 辐射电磁元用于生产太赫兹波和方法
    • EP1804347A1
    • 2007-07-04
    • EP05774908.7
    • 2005-08-23
    • Kyushu Institute of TechnologyNational University Corporation Hokkaido University
    • OTSUJI, Taiichi c/o KYUSHU INSTITUTE OF TECHNOLOGYSANO, Eiichi
    • H01S1/02
    • H01S1/02G02F1/3534G02F2203/13H01L31/0224H01L31/02327H01L31/09H01S2302/02
    • The present invention improves the efficiency of conversion from a non-radiation two-dimensional electron plasmon wave into a radiation electromagnetic wave, and realizes a wide-band characteristic. A terahertz electromagnetic wave radiation element of the present invention comprises a semiinsulating semiconductor bulk layer, a two-dimensional electron layer formed directly above the semiconductor bulk layer by a semiconductor heterojunction structure, source and drain electrodes electrically connected to two opposed sides of the two-dimensional electron layer, a double gate electrode grating which is provided in the vicinity of and parallel to the upper surface of the two-dimensional electron layer and for which two different dc bias potentials can be alternately set, and a transparent metal mirror provided in contact with the lower surface of the semiconductor bulk layer, formed into a film shape, functioning as a reflecting mirror in the terahertz band, and being transparent in the light wave band. Two light waves are caused to enter from the lower surface of the transparent metal mirror, and two different dc bias potentials are alternately applied to the double gate electrode grating so as to periodically modulate the electron density of the two-dimensional electron layer in accordance with the configuration of the double gate electrode grating.
    • 本发明改善的转化从非辐射的二维电子等离子体波成辐射电磁波的效率,并实现宽带特性。 本发明的太赫兹波的电磁波辐射元件包括半绝缘半导体本体层,由半导体异质结结构,源的半导体本体层的上方直接形成和二维电子层漏电极电连接到所述双的两个相对侧 维电子层,这是在附近,并且平行地设置于二维电子层和用于两个不同的直流偏置电位上表面上的双栅极电极光栅所有可以交替地设置,并且在接触的方式设置的透明金属镜 与半导体本体层的下表面,形成为膜形状,如在太赫兹频带反射镜的作用,并且是在光波段透明的。 两个光波被使得从所述透明的金属反射镜的下表面进入,和两个不同的直流偏置电势被交替地施加到双栅电极光栅以与周期性调制雅舞蹈的二维电子层的电子密度 双栅电极光栅的配置。