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    • 4. 发明公开
    • Apparatus for Producing Laminated Body
    • Vorrichtung und Verfahren zur Herstellung eines laminiertenKörpers
    • EP2503024A1
    • 2012-09-26
    • EP12160451.6
    • 2012-03-20
    • Kojima Press Industry Co., Ltd.
    • Hayakawa, MunetakaIto, KaoruTakahashi, Yasuhiko
    • C23C16/54C23C16/04
    • C23C16/545B05D1/60B05D7/04B05D7/50B05D2252/02C23C14/562C23C16/042
    • An apparatus is provided that can stably produce a laminated body including a vapor-deposited polymer film having a predetermined composition and thickness on a film substrate. The apparatus includes: a film substrate supply means 46 that supplies a film substrate 15 on an outer peripheral surface of a rotary drum 35 in a vacuum chamber 24; a plurality of blowoff members 64 positioned around the rotary drum 35, each of the plurality of blowoff members including a vapor outlet 66 opening inside the vacuum chamber 24 to the outer peripheral surface of the rotary drum 35 and an inner space constituting a deposition chamber; and at least one monomer vapor supply means 84 arranged to supply plural kinds of monomer vapor into the deposition chamber and blowoff the plural kinds of monomer vapor from the vapor outlet of each of the plurality of blowoff members.
    • 提供一种能够稳定地制造包括在膜基材上具有预定组成和厚度的气相沉积聚合物膜的层压体的装置。 该装置包括:薄膜基板供给装置46,其在真空室24中的旋转滚筒35的外周面上供给薄膜基板15; 多个排气构件64位于旋转鼓35周围,多个排气构件中的每一个包括在真空室24内部向旋转滚筒35的外周表面开口的蒸汽出口66和构成沉积室的内部空间; 以及至少一个单体蒸气供给装置84,其被配置为将多种单体蒸气供应到沉积室中,并从多个吹排构件中的每一个的蒸汽出口吹出多种单体蒸气。
    • 6. 发明公开
    • Substrate supporting device and sputtering apparatus including the same
    • Substratstützvorrichtungund Sputtervorrichtung damit
    • EP2060657A1
    • 2009-05-20
    • EP08253163.3
    • 2008-09-29
    • Kojima Press Industry Co., Ltd.
    • Ito, KaoruMatsui, Hirotoshi
    • C23C14/34C23C14/50
    • C23C14/505
    • A substrate supporting device (36) for forming a coating film having a maximally even and necessary thickness with a sufficiently strong adhesiveness and a good film quality on a substrate (23), and a sputtering apparatus including such a substrate supporting device (36). The substrate supporting device (36) for supporting a substrate (23) on which a coating film is formed by sputtering is disposed in a vacuum chamber so as to be opposed to a sputtering target (22). The substrate supporting device (36) is rotatable around a first rotation axis (38) by a first driving mechanism (42, 44, 46) and is rotatable around a second rotation axis (50) by a second driving mechanism (68,70,72).
    • 一种基板支撑装置(36),用于在基板(23)上形成具有最大均匀且必要厚度的涂膜,具有足够强的粘合性和良好的薄膜质量,以及包括这种基板支撑装置(36)的溅射装置。 用于支撑通过溅射形成涂膜的基板(23)的基板支撑装置(36)设置在与溅射靶(22)相对的真空室中。 基板支撑装置(36)可通过第一驱动机构(42,44,46)围绕第一旋转轴线(38)旋转,并且可通过第二驱动机构(68,70)绕第二旋转轴线(50)旋转, 72)。
    • 10. 发明公开
    • Stacked film capacitor and method of producing the same
    • Gestapelter Schichtkondensator和Verfahren zu dessen Herstellung
    • EP2418662A2
    • 2012-02-15
    • EP11176452.8
    • 2011-08-03
    • Kojima Press Industry Co., Ltd.
    • Ito, KaoruNoguchi, Masumi
    • H01G4/224H01G4/30
    • H01G4/30H01G4/224
    • A stacked film capacitor (10) including a resin protective film (28a,28b) having excellent durability is provided which can stably secure desired properties. The stacked film capacitor includes a capacitor element (12) including a plurality of dielectric layers (14,18a) and a plurality of vapor-deposited metal film layers (16a). Each dielectric layer and each vapor-deposited metal film layer (16a) are stacked with each other so as to be arranged alternately. The stacked film capacitor further includes a pair of external electrodes (26a,26b) provided on opposing side surfaces of the capacitor element (12), and at least one resin protective film (28a,28b) formed on at least one side surfaces other than the side surfaces on which the external electrodes are formed, in which the at least one resin protective film (28a,28b) is provided by deposition polymerization.
    • 提供了包括具有优异的耐久性的树脂保护膜(28a,28b)的叠层薄膜电容器(10),其可以稳定地确保期望的性能。 堆叠薄膜电容器包括包括多个电介质层(14,18a)和多个气相沉积金属薄膜层(16a)的电容器元件(12)。 每个电介质层和每个气相沉积的金属膜层(16a)彼此堆叠以交替布置。 层叠薄膜电容器还包括设置在电容器元件(12)的相对侧面上的一对外部电极(26a,26b),以及至少一个树脂保护膜(28a,28b),其形成在除了 其上形成有外部电极的侧表面,其中通过沉积聚合提供至少一个树脂保护膜(28a,28b)。