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1. 发明授权

EP1508799B1 Improved sample inspection system 失效
标题翻译：改进测试系统样本
公开(公告)号：EP1508799B1
公开(公告)日：2009-02-04
申请号：EP04024371.9
申请日：1998-09-18
申请人： KLA-Tencor Corporation
发明人： Vaez-Iravani, Mehdi , Stokowski, Stanley , Zhao, Gupheng
IPC分类号： G01N21/95
CPC分类号： G01J3/44 , G01J3/0216 , G01J3/0229 , G01N21/21 , G01N21/47 , G01N21/474 , G01N21/8806 , G01N21/94 , G01N21/9501 , G01N2021/8825 , G01N2021/8845 , G01N2021/8848 , G01N2201/065

2. 发明公开

EP1265063A1 Improved sample inspection system 失效
标题翻译：改进测试系统样本
公开(公告)号：EP1265063A1
公开(公告)日：2002-12-11
申请号：EP02012062.2
申请日：1998-09-18
申请人： KLA-Tencor Corporation
发明人： Vaez-Iravani, Mehdi , Stokowski, Stanley , Zhao, Guoheng
IPC分类号： G01N21/00 , G01N21/86 , G01B11/24 , G01N21/88 , G01N21/95 , G01B7/34
CPC分类号： G01J3/44 , G01J3/0216 , G01J3/0229 , G01N21/21 , G01N21/47 , G01N21/474 , G01N21/8806 , G01N21/94 , G01N21/9501 , G01N2021/8825 , G01N2021/8845 , G01N2021/8848 , G01N2201/065
摘要： A curved mirrored surface (78) is used to collect radiation scattered by a sample surface (76a) and originating from a normal illumination beam (70) and an oblique illumination beam (90). The collected radiation is focused to a detector (80). Scattered radiation originating from the normal and oblique illumination beams may be distinguished by employing radiation at two different wavelengths, by intentionally introducing an offset between the spots illuminated by the two beams or by switching the normal and oblique illumination beams (70, 90) on and off alternately. Beam position error caused by change in sample height may be corrected by detecting specular reflection of an oblique illumination beam and changing the direction of illumination in response thereto. Butterfly-shaped spatial filters may be used in conjunction with curved mirror radiation collectors 78 to restrict detection to certain azimuthal angles.

3. 发明公开

EP1508799A3 Improved sample inspection system 失效
标题翻译：改进测试系统样本
公开(公告)号：EP1508799A3
公开(公告)日：2005-05-18
申请号：EP04024371.9
申请日：1998-09-18
申请人： KLA-Tencor Corporation
发明人： Vaez-Iravani, Mehdi , Stokowski, Stanley , Zhao, Gupheng
IPC分类号： G01N21/95
CPC分类号： G01J3/44 , G01J3/0216 , G01J3/0229 , G01N21/21 , G01N21/47 , G01N21/474 , G01N21/8806 , G01N21/94 , G01N21/9501 , G01N2021/8825 , G01N2021/8845 , G01N2021/8848 , G01N2201/065
摘要： A curved mirrored surface (78) is used to collect radiation scattered by a sample surface (76a) and originating from a normal illumination beam (70) and an oblique illumination beam (90). The collected radiation is focused to a detector (80). Scattered radiation originating from the normal and oblique illumination beams may be distinguished by employing radiation at two different wavelengths, by intentionally introducing an offset between the spots illuminated by the two beams or by switching the normal and oblique illumination beams (70, 90) on and off alternately. Beam position error caused by change in sample height may be corrected by detecting specular reflection of an oblique illumination beam and changing the direction of illumination in response thereto. Butterfly-shaped spatial filters may be used in conjunction with curved mirror radiation collectors 78 to restrict detection to certain azimuthal angles.

4. 发明公开

EP1508799A2 Improved sample inspection system 失效
标题翻译：改进了样品检测系统
公开(公告)号：EP1508799A2
公开(公告)日：2005-02-23
申请号：EP04024371.9
申请日：1998-09-18
申请人： KLA-Tencor Corporation
发明人： Vaez-Iravani, Mehdi , Stokowski, Stanley , Zhao, Guoheng
IPC分类号： G01N21/95
CPC分类号： G01J3/44 , G01J3/0216 , G01J3/0229 , G01N21/21 , G01N21/47 , G01N21/474 , G01N21/8806 , G01N21/94 , G01N21/9501 , G01N2021/8825 , G01N2021/8845 , G01N2021/8848 , G01N2201/065
摘要： A curved mirrored surface (78) is used to collect radiation scattered by a sample surface (76a) and originating from a normal illumination beam (70) and an oblique illumination beam (90). The collected radiation is focused to a detector (80). Scattered radiation originating from the normal and oblique illumination beams may be distinguished by employing radiation at two different wavelengths, by intentionally introducing an offset between the spots illuminated by the two beams or by switching the normal and oblique illumination beams (70, 90) on and off alternately. Beam position error caused by change in sample height may be corrected by detecting specular reflection of an oblique illumination beam and changing the direction of illumination in response thereto. Butterfly-shaped spatial filters may be used in conjunction with curved mirror radiation collectors 78 to restrict detection to certain azimuthal angles.
摘要翻译：使用弯曲镜像表面（78）来收集由样本表面（76a）散射并且源自正常照明光束（70）和斜向照明光束（90）的辐射。所收集的辐射被聚焦到检测器（80）。通过采用两个不同波长的辐射，通过有意地在由两个光束照射的光点之间引入偏移或者通过将正常照明光束和倾斜照明光束（70,90）切换到其上，并且通过使用两个不同波长的辐射来区分源自正常照明光束和倾斜照明光束的散射辐射交替关闭。可以通过检测倾斜照明光束的镜面反射并响应于此改变照明方向来校正由样本高度变化引起的光束位置误差。蝴蝶形空间滤波器可以与曲面镜辐射收集器78结合使用，以将检测限制在某些方位角。

5. 发明授权

EP1265063B1 Improved sample inspection system 失效
标题翻译：改进了样品检测系统
公开(公告)号：EP1265063B1
公开(公告)日：2005-01-26
申请号：EP02012062.2
申请日：1998-09-18
申请人： KLA-Tencor Corporation
发明人： Vaez-Iravani, Mehdi , Stokowski, Stanley , Zhao, Guoheng
IPC分类号： G01N21/00 , G01N21/86 , G01B11/24 , G01N21/88 , G01N21/95 , G01B7/34
CPC分类号： G01J3/44 , G01J3/0216 , G01J3/0229 , G01N21/21 , G01N21/47 , G01N21/474 , G01N21/8806 , G01N21/94 , G01N21/9501 , G01N2021/8825 , G01N2021/8845 , G01N2021/8848 , G01N2201/065

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