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1. 发明公开

EP2040282A3 Micro sample heating probe and method of producing the same, and analyzer using the micro sample heating probe 有权
标题翻译： Mikroprobenheizsonde和用于采用所述Mikroprobenheizsonde它们的制备和分析装置的方法
公开(公告)号：EP2040282A3
公开(公告)日：2010-09-29
申请号：EP08015733.2
申请日：2008-09-05
申请人： Hitachi Ltd.
发明人： Horikoshi, Kazuhiko , Akamatsu, Naotoshi , Otani, Toshiaki
IPC分类号： H01J49/16 , H01J49/04
CPC分类号： H01J49/16 , H01J49/0459
摘要： An object of the present invention is to extract a micro foreign body of a few µm, which may cause a product defect of a device or the like, and to subject the foreign body to a mass analysis at a favorable S/N ratio without any contamination. A micro sample heating probe includes a sample holder made up of two members different in diameter, a supporting part, and a terminal part. The sample holder includes a heating mechanism only in a limited part, and just a region extremely close to the micro sample being an analysis target is heated locally. Therefore, even when a contaminated substance is attached to the probe, such substance is not heated, thereby preventing a noise from occurring, and enabling an analysis at a quite favorable S/N ratio.

2. 发明公开

EP2040282A2 Micro sample heating probe and method of producing the same, and analyzer using the micro sample heating probe 有权
标题翻译： Mikroprobenheizsonde und Verfahren zu deren Herstellung und Analysegertt，das die Mikroprobenheizsonde einsetzt
公开(公告)号：EP2040282A2
公开(公告)日：2009-03-25
申请号：EP08015733.2
申请日：2008-09-05
申请人： Hitachi Ltd.
发明人： Horikoshi, Kazuhiko , Akamatsu, Naotoshi , Otani, Toshiaki
IPC分类号： H01J49/16
CPC分类号： H01J49/16 , H01J49/0459
摘要： An object of the present invention is to extract a micro foreign body of a few µm, which may cause a product defect of a device or the like, and to subject the foreign body to a mass analysis at a favorable S/N ratio without any contamination. A micro sample heating probe includes a sample holder made up of two members different in diameter, a supporting part, and a terminal part. The sample holder includes a heating mechanism only in a limited part, and just a region extremely close to the micro sample being an analysis target is heated locally. Therefore, even when a contaminated substance is attached to the probe, such substance is not heated, thereby preventing a noise from occurring, and enabling an analysis at a quite favorable S/N ratio.
摘要翻译：本发明的目的是提取几μm的微小异物，这可能导致装置的产品缺陷等，并且以良好的S / N比率使异物进行质量分析，而没有任何污染。微型样品加热探针包括由直径不同的两个构件构成的样品保持器，支撑部件和端子部件。样品保持器仅在有限的部分包括加热机构，并且仅局部地加热非常接近作为分析对象的微量样品的区域。因此，即使将被污染物质附着在探针上，也不会加热该物质，从而防止发生噪音，能够以相当良好的S / N比进行分析。

3. 发明授权

EP2040282B1 Micro sample heating probe and method of producing the same, and analyzer using the micro sample heating probe 有权
标题翻译： Mikroprobenheizsonde和用于采用所述Mikroprobenheizsonde它们的制备和分析装置的方法
公开(公告)号：EP2040282B1
公开(公告)日：2015-01-21
申请号：EP08015733.2
申请日：2008-09-05
申请人： Hitachi Ltd.
发明人： Horikoshi, Kazuhiko , Akamatsu, Naotoshi , Otani, Toshiaki
IPC分类号： H01J49/16 , H01J49/04
CPC分类号： H01J49/16 , H01J49/0459

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