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    • 3. 发明公开
    • Improved thermal inkjet printhead structure and method for making the same
    • Thermische Tintenstrahldruckkopfstruktur und Herstellungsverfahren。
    • EP0521634A2
    • 1993-01-07
    • EP92305554.5
    • 1992-06-17
    • Hewlett-Packard Company
    • Fasen, Duane A.Beckmann, Jerome E.Stanback, John H.Hess, Ulrich E.Metz, Larry S.Moore, Charles E.Hulings, James R.
    • B41J2/16B41J2/34
    • B41J2/14129B41J2/1603B41J2/1628B41J2/1629B41J2/1631B41J2/1642B41J2/1646B41J2202/03B41J2202/13Y10T29/49401
    • An improved thermal inkjet printhead having MOSFET drive transistors (126) incorporated therein. The gate (110) of each MOSFET transistor (126) is formed by applying a layer (72) of silicon dioxide onto a silicon substrate (70), applying a layer (76) of silicon nitride onto the silicon dioxide, and applying a layer (90) of polycrystalline silicon onto the silicon nitride. Portions of the substrate (70) surrounding the gate (110) are oxidized, forming field oxide regions (84, 86). Source and drain regions (118, 120) are then conventionally formed, followed by the application of a protective dielectric layer (124) onto the field oxide (84, 86), source (118), drain (120), and gate (110). A resistive layer (180) is deposited on the dielectric layer (124) and directly connected to the source (118), drain (120), and gate (110). A conductive layer (181) is deposited on a portion of the resistive layer (180), ultimately forming both uncovered and covered regions (202, 204, 206) thereof. The uncovered region (202) functions as a heating resistor (209), and the covered regions (204, 206) function as electrical contacts to the transistor (126) and resistor (209).
    • 一种改进的热喷墨打印头,其具有并入其中的MOSFET驱动晶体管(126)。 每个MOSFET晶体管(126)的栅极(110)通过将二氧化硅层(72)施加到硅衬底(70)上,将氮化硅层(76)施加到二氧化硅上,并施加层 (90)的多晶硅到氮化硅上。 围绕栅极(110)的衬底(70)的部分被氧化,形成场氧化物区域(84,86)。 然后通常形成源区和漏区(118,120),随后在场氧化物(84,86),源极(118),漏极(120)和栅极(110)上施加保护电介质层(124) )。 电阻层(180)沉积在电介质层(124)上并直接连接到源极(118),漏极(120)和栅极(110)。 导电层(181)沉积在电阻层(180)的一部分上,最终形成其未覆盖区域和覆盖区域(202,204,206)。 未覆盖区域(202)用作加热电阻器(209),并且覆盖区域(204,206)用作与晶体管(126)和电阻器(209)的电接触。
    • 5. 发明公开
    • Thermal ink jet printhead having driver circuitry thereon and method for making the same
    • 热喷墨打印头用的驱动电路和用于制作相同的方法。
    • EP0493897A2
    • 1992-07-08
    • EP91311353.6
    • 1991-12-05
    • Hewlett-Packard Company
    • Hess, Ulrich E.Fasen, Duane A.
    • B41J2/16
    • B41J2/14129B41J2/1603B41J2/1631B41J2/1642B41J2/1646B41J2202/13
    • An improved thermal inkjet printhead and manufacturing method in which driver circuitry (e.g. MOSFET transistors), heating resistors, and a specialized arrangement of conductive elements are used. A substrate (70) is provided having a plurality of drive transistors (74) thereon. A layer (80) of resistive material (e.g. a tantalum-aluminum mixture or doped polycrystalline silicon) is deposited on the substrate (70) and directly connected to the source, gate, and drain of at least one transistor. A layer (100) of conductive metal (e.g. aluminum) is deposited on a portion of the resistive layer (80), forming both covered and uncovered (102) regions thereof. The uncovered region (102) functions as a heating resistor (109), and the covered regions function as direct electrical contacts to the transistor, thereby minimizing the number of conductive elements in the printhead. The resistor (109) is positioned beneath an ink-retaining cavity (150), and is designed to heat ink therein for expulsion through an orifice plate.
    • 在其中驱动器电路的改进的热喷墨打印头和制造方法(例如MOSFET晶体管),加热电阻器,和导电元件的一个专门布置被使用。 A底设置在其上具有驱动晶体管的多元性。 电阻材料(例如,钽 - 铝混合物或掺杂的多晶硅)的层沉积在衬底上并直接连接到源极,栅极,和至少一个晶体管的漏极。 导电金属(E. G.铝)的层沉积在电阻层的一部分,形成其两个覆盖和未覆盖的区域。 未覆盖区域用作加热电阻器,并且被覆盖的区域用作直接电接触到晶体管,从而最大限度地减少在打印头中的导电元件的数量。 所述电阻器在墨水保留腔定位的下方,并且被设计为通过向孔板在其中的用于驱逐加热墨水。