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1. 发明授权

EP0219120B1 Two-wire communication system 失效
标题翻译：双线通信系统
公开(公告)号：EP0219120B1
公开(公告)日：1993-01-27
申请号：EP86114276.8
申请日：1986-10-15
申请人： HITACHI, LTD. , Hitachi Instrument Engineering Co., Ltd.
发明人： Ito, Yukio , Yamada, Kazuji , Shimizu, Yasushi , Kobori, Shigeyuki
IPC分类号： G08C19/02 , H04B3/54 , H04L5/16
CPC分类号： G08C19/02 , H04B3/548 , H04B2203/5408 , H04B2203/5458 , H04B2203/547 , H04L5/16

2. 发明公开

EP0219120A3 Two-wire communication system 失效
标题翻译：双线通信系统
公开(公告)号：EP0219120A3
公开(公告)日：1988-11-17
申请号：EP86114276
申请日：1986-10-15
申请人： HITACHI, LTD. , Hitachi Instrument Engineering Co., Ltd.
发明人： Ito, Yukio , Yamada, Kazuji , Shimizu, Yasushi , Kobori, Shigeyuki
IPC分类号： G08C19/02 , H04B03/54 , H04L05/16
CPC分类号： G08C19/02 , H04B3/548 , H04B2203/5408 , H04B2203/5458 , H04B2203/547 , H04L5/16
摘要： A two-wire communication system comprising a transmitting unit (l) having constant current characteristics for controlling an output current (I T ) thereof on the basis of a signal supplied from a sensor, a receiving unit (2) for receiving a control signal to control the sensor, a load resistor (4) and power supply (5) connected in series with the transmitting unit via a two-wire transmission path (6), and a communication unit (3) so connected in parallel to the load resistor as to convey the output current of the transmitting unit to the process side and control a current from the power supply transmitted onto the transmission path on the basis of information supplied from the process side. With this configuration, a communication system is provided which makes possible replacing process variable transmitters in a conventional analog control system or installing process variable transmitters in a new analog control system, which makes possible remotely setting and adjusting the transmitter function by the communcation unit in the above described system, which makes it possible for the control computer to control as far as terminals, and which facilitates digitization of the system.

3. 发明公开

EP0219120A2 Two-wire communication system 失效
标题翻译：两线传输系统。
公开(公告)号：EP0219120A2
公开(公告)日：1987-04-22
申请号：EP86114276.8
申请日：1986-10-15
申请人： HITACHI, LTD. , Hitachi Instrument Engineering Co., Ltd.
发明人： Ito, Yukio , Yamada, Kazuji , Shimizu, Yasushi , Kobori, Shigeyuki
IPC分类号： G08C19/02 , H04B3/54 , H04L5/16
CPC分类号： G08C19/02 , H04B3/548 , H04B2203/5408 , H04B2203/5458 , H04B2203/547 , H04L5/16
摘要： A two-wire communication system comprising a transmitting unit (l) having constant current characteristics for controlling an output current (I T ) thereof on the basis of a signal supplied from a sensor, a receiving unit (2) for receiving a control signal to control the sensor, a load resistor (4) and power supply (5) connected in series with the transmitting unit via a two-wire transmission path (6), and a communication unit (3) so connected in parallel to the load resistor as to convey the output current of the transmitting unit to the process side and control a current from the power supply transmitted onto the transmission path on the basis of information supplied from the process side. With this configuration, a communication system is provided which makes possible replacing process variable transmitters in a conventional analog control system or installing process variable transmitters in a new analog control system, which makes possible remotely setting and adjusting the transmitter function by the communcation unit in the above described system, which makes it possible for the control computer to control as far as terminals, and which facilitates digitization of the system.

4. 发明授权

EP0280905B1 A method for manufacturing semiconductor absolute pressure sensor units 失效
标题翻译：制造半导体绝对压力传感器单元的方法
公开(公告)号：EP0280905B1
公开(公告)日：1992-06-03
申请号：EP88101609.1
申请日：1988-02-04
申请人： HITACHI, LTD.
发明人： Kobori, Shigeyuki , Yamada, Kazuji , Kobayashi, Ryoichi , Miyazaki, Atsushi , Suzuki, Seikou
IPC分类号： G01L9/06 , H01L29/84 , H01L27/20
CPC分类号： H01L27/20 , G01L9/0042 , H01L29/84 , Y10T29/49103

5. 发明公开

EP0080186A2 Semiconductor pressure transducer 无效
标题翻译： Halbleiter-Druckmessvorrichtung。
公开(公告)号：EP0080186A2
公开(公告)日：1983-06-01
申请号：EP82110712.5
申请日：1982-11-19
申请人： Hitachi, Ltd.
发明人： Shimada, Satoshi , Yamada, Kazuji , Suzuki, Seikou , Kobori, Shigeyuki , Nishihara, Motohisa
IPC分类号： G01L9/06 , G01L9/12 , G01L13/02
CPC分类号： G01L19/148 , G01L9/0054 , G01L9/0073 , G01L13/025 , G01L19/0038 , G01L19/0061 , G01L19/0645 , H01L29/84
摘要： A semiconductor pressure transducer including a measuring diaphragm (56, 214) of semiconductor material for sensing pressure supported by a support member (88, 210, 212) of the same material. An oxide layer (86) and a thin glass layer (84) are interposed between the measuring diaphragm and the support member.
摘要翻译：一种半导体压力传感器，包括用于感测由相同材料的支撑构件（88,210,212）支撑的压力的半导体材料的测量膜（56,214）。氧化物层（86）和薄玻璃层（84）插入在测量膜片和支撑构件之间。

6. 发明公开

EP0338688A1 Accelerometer 失效
标题翻译：加速度计
公开(公告)号：EP0338688A1
公开(公告)日：1989-10-25
申请号：EP89303120.3
申请日：1989-03-30
申请人： HITACHI, LTD.
发明人： Suzuki, Seikou , Tsuchitani, Shigeki , Shimada, Satoshi , Miki, Masayuki , Kobori, Shigeyuki , Matsumoto, Masahiro
IPC分类号： G01P15/13 , G01P15/125
CPC分类号： G01P15/131 , G01P15/125 , G01P2015/0828
摘要： An accelerometer having, a movable electrode which is movable according to acceleration, a fixed electrode disposed in opposition to the movable electrode, an output means for generating an output voltage which is proportional to the acceleration by measuring a gap between the movable electrode and the fixed electrode, a pulse width modulation means for generating pulses, wherein a pulse width of the pulses is modulated according to the output voltage, and a feedback means for feeding back an electrostatic force which is proportional to the pulse width of the pulses from the pulse modulation means between the movable electrode and the fixed electrode.
As the acceleration in the acceleration sensor is linearly detected, the acceleration sensor is easily adjusted.
摘要翻译：一种加速度计，其具有：根据加速度可移动的可移动电极，与可移动电极相对设置的固定电极;输出装置，用于通过测量可移动电极与固定电极之间的间隙来产生与加速度成比例的输出电压用于产生脉冲的脉冲宽度调制装置，其中脉冲的脉冲宽度根据输出电压被调制;以及反馈装置，用于反馈与来自脉冲调制的脉冲的脉冲宽度成比例的静电力在可动电极和固定电极之间的装置。由于线性检测加速度传感器的加速度，加速度传感器很容易调整。

7. 发明授权

EP0150827B1 Method of making silicon diaphragm pressure sensor 失效
标题翻译：制造硅膜压力传感器的方法
公开(公告)号：EP0150827B1
公开(公告)日：1989-07-19
申请号：EP85100776.5
申请日：1985-01-25
申请人： HITACHI, LTD.
发明人： Yamada, Kazuji , Kobayashi, Yutaka , Kawakami, Kanji , Shimada, Satoshi , Tanabe, Masanori , Kobori, Shigeyuki
IPC分类号： G01L9/06
CPC分类号： G01L9/0042 , G01P15/0802 , G01P2015/084 , Y10S148/012 , Y10S148/159 , Y10S148/168 , Y10T29/42 , Y10T29/49103

8. 发明公开

EP0280905A2 A method for manufacturing semiconductor absolute pressure sensor units 失效
标题翻译： HerstellungsverfahrenfürAbsolutdruckwandlereinheiten mit Halbleitern。
公开(公告)号：EP0280905A2
公开(公告)日：1988-09-07
申请号：EP88101609.1
申请日：1988-02-04
申请人： HITACHI, LTD.
发明人： Kobori, Shigeyuki , Yamada, Kazuji , Kobayashi, Ryoichi , Miyazaki, Atsushi , Suzuki, Seikou
IPC分类号： G01L9/06 , H01L29/84 , H01L27/20
CPC分类号： H01L27/20 , G01L9/0042 , H01L29/84 , Y10T29/49103
摘要： A method for manufacturing semiconductor absolute pressure sensor units includes anodically bonding a silicon sensor wafer (10) and a silicon cap wafer (12) with a borosilicate glass layer (32) disposed threbetween so as to surround respective sensor chips on the silicon sensor wafer (10) by introducing a matrix shaped conductive layer (28) in contact with and in alignment with the borosilicate glass layer (32), the matrix shaped conductive layer (28) is used as a negative electrode during anodic bonding operation so that a high bonding strength is obtained and sodium ions contained in the borosilicate glass layer (32) are kept away from bond regions after completing the anodically bonding operation.
摘要翻译：一种制造半导体绝对压力传感器单元的方法包括：将硅传感器晶片（10）和硅帽晶片（12）与布置在硅传感器晶片上的各个传感器芯片之间的硼硅酸盐玻璃层（32）如图10所示，通过引入与硼硅酸盐玻璃层（32）接触并与硼硅酸盐玻璃层（32）对准的矩阵状导电层（28），在阳极接合操作期间，使用矩阵状导电层（28）作为负极，获得强度，并且在完成阳极结合操作之后，硼硅酸盐玻璃层（32）中所含的钠离子保持远离结合区域。

9. 发明公开

EP0150827A2 Method of making silicon diaphragm pressure sensor 失效
标题翻译：硅隔膜压力传感器的制造方法。
公开(公告)号：EP0150827A2
公开(公告)日：1985-08-07
申请号：EP85100776.5
申请日：1985-01-25
申请人： HITACHI, LTD.
发明人： Yamada, Kazuji , Kobayashi, Yutaka , Kawakami, Kanji , Shimada, Satoshi , Tanabe, Masanori , Kobori, Shigeyuki
IPC分类号： G01L9/06
CPC分类号： G01L9/0042 , G01P15/0802 , G01P2015/084 , Y10S148/012 , Y10S148/159 , Y10S148/168 , Y10T29/42 , Y10T29/49103
摘要： A method of making a silicon diaphragm pressure sensor Includes forming an oxide film (10) on one surface of a monocrystalline silicon substrate (9). A polycrystalline silicon layer (11) is formed on the oxide film. The oxide film may be partly removed before the formation of the polycrystalline silicon layer. The polycrystalline silicon layer is heated and melt to recrystallize the same, thereby converting the polycrystalline silicon layer into a monocrystalline silicon layer. On the monocrystalline silicon layer may be epitaxially grown an additional monocrystalline silicon layer. By using the oxide film as an etching stopper, a predetermined portion of the substrate is etched over a range from the other surface of the substrate to the oxide film, thereby providing a diaphragm (12) of the pressure sensor.

10. 发明授权

EP0338688B1 Accelerometer 失效
标题翻译： ACCELEROMETER
公开(公告)号：EP0338688B1
公开(公告)日：1993-08-04
申请号：EP89303120.3
申请日：1989-03-30
申请人： HITACHI, LTD.
发明人： Suzuki, Seikou , Tsuchitani, Shigeki , Shimada, Satoshi , Miki, Masayuki , Kobori, Shigeyuki , Matsumoto, Masahiro
IPC分类号： G01P15/13 , G01P15/125
CPC分类号： G01P15/131 , G01P15/125 , G01P2015/0828

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