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1. 发明公开

EP1641957A2 COMPOSITE REFRACTORY METAL CARBIDE COATING ON A SUBSTRATE AND METHOD FOR MAKING THEREOF 审中-公开
标题翻译：基材上的复合耐火金属碳化物涂层及其制造方法
公开(公告)号：EP1641957A2
公开(公告)日：2006-04-05
申请号：EP04756263.2
申请日：2004-06-25
申请人： GENERAL ELECTRIC COMPANY
发明人： SANE, Ajit , LENNARTZ, Jeffrey , LEIST, Jon , KOTABISH, Daniel , MARINER, John , MACEY, Andrew , LONGWORTH, Douglas , HEJL, Timothy , DEVAN, Thomas
IPC分类号： C23C16/14 , C23C16/56 , H01L21/00
CPC分类号： C23C16/36 , C23C16/4581 , Y10T428/24917 , Y10T428/30
摘要： A composite coating for use on semi-conductor processing components, comprising a refractory metal carbide coating with its surface modified by at least one of: a) a carbon donor source for a stabilized stoichiometry, and b) a layer of nitride, carbonitride or oxynitride of elements selected from a group B, Al, Si, refractory metals, transition metals, rare earth metals which may or may not contain electrically conducting pattern, and wherein the metal carbide is selected from the group consisting of silicon carbide, tantalum carbide, titanium carbide, tungsten carbide, silicon oxycarbide, zirconium carbide, hafnium carbide, lanthanum carbide, vanadium carbide, niobium carbide, magnesium carbide, chromium carbide, molybdenum carbide, beryllium carbide and mixtures thereof. The composite coating is characterized as having an improved corrosion resistance property and little emissivity sensitivity to wavelengths used in optical pyrometry under the normal semi-conductor processing environments.
摘要翻译：一种用于半导体加工部件的复合涂层，包括耐火金属碳化物涂层，其表面通过以下至少一种改性：a）用于稳定化学计量的碳供体源，和b）氮化物，碳氮化物或氮氧化物层的选自B族，Al，Si，难熔金属，过渡金属，可能包含或不包含导电图案的稀土金属的元素，并且其中所述金属碳化物选自碳化硅，碳化钽，钛硬质合金，碳化钨，碳氧化硅，碳化锆，碳化铪，碳化镧，碳化钒，碳化铌，碳化镁，碳化铬，碳化钼，碳化铍及其混合物。该复合涂层的特征在于在正常的半导体加工环境下具有改进的耐腐蚀性和对用于光学高温测定法的波长的低发射率敏感性。

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