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    • 7. 发明公开
    • Heating element
    • 加热元件
    • EP1845753A3
    • 2011-11-09
    • EP07007533.8
    • 2007-04-12
    • Shin-Etsu Chemical Co., Ltd.
    • Kimura, NoboruKubota, YoshihiroYamamura, Waichi, Shin Etsu Chemical Co., Ltd.Kano, Shoji
    • H05B3/14H01L21/00
    • H01L21/67103H05B3/143
    • There is disclosed a heating element 10 comprising: at least
      a heat-resistant base member 1;
      a conductive layer 3 having a heater pattern 3a formed on the heat-resistant base member;
      a protection layer 4 with an insulating property formed on the conductive layer; and
      a corrosion-resistant layer 4p that is an oxide having an oxygen amount of stoichiometric ratio or less formed on the protection layer. There can be provided a heating element in which a corrosion-resistant layer whose resistivity or hardness is controlled is formed on a protection layer and through which the corrosive gas is difficult to be transmitted even under an environment of a high temperature and a corrosive gas and by which degradation due to corrosion of a conductive layer, particularly, a power-supply-terminal portion can be avoided and additionally which can fulfill a high function as an electrostatic chuck even when having a chuck pattern and which has a long operation life and is capable of being produced at a low cost.
    • 公开了一种加热元件10,其包括:至少一个耐热基底构件1; 导电层3,其具有形成在耐热基底构件上的加热器图案3a; 在导电层上形成绝缘性的保护层4, 以及在保护层上形成的氧化物量为化学计量比以下的氧化物即耐腐蚀层4p。 可以提供一种加热元件,其中控制电阻率或硬度的耐腐蚀层形成在保护层上,并且即使在高温和腐蚀性气体的环境下,腐蚀性气体也很难通过该加热元件传送并且 由此可以避免由于导电层特别是电源端子部分的腐蚀导致的劣化,并且此外即使当具有卡盘图案时也可以实现作为静电卡盘的高功能并且具有长的操作寿命并且是 能够以低成本生产。
    • 10. 发明公开
    • Heating element
    • Heizelement
    • EP1845753A2
    • 2007-10-17
    • EP07007533.8
    • 2007-04-12
    • Shin-Etsu Chemical Co., Ltd.
    • Kimura, NoboruKubota, YoshihiroYamamura, Waichi, Shin Etsu Chemical Co., Ltd.Kano, Shoji
    • H05B3/14H01L21/00
    • H01L21/67103H05B3/143
    • There is disclosed a heating element 10 comprising: at least
      a heat-resistant base member 1;
      a conductive layer 3 having a heater pattern 3a formed on the heat-resistant base member;
      a protection layer 4 with an insulating property formed on the conductive layer; and
      a corrosion-resistant layer 4p that is an oxide having an oxygen amount of stoichiometric ratio or less formed on the protection layer. There can be provided a heating element in which a corrosion-resistant layer whose resistivity or hardness is controlled is formed on a protection layer and through which the corrosive gas is difficult to be transmitted even under an environment of a high temperature and a corrosive gas and by which degradation due to corrosion of a conductive layer, particularly, a power-supply-terminal portion can be avoided and additionally which can fulfill a high function as an electrostatic chuck even when having a chuck pattern and which has a long operation life and is capable of being produced at a low cost.
    • 公开了一种加热元件10,其包括:至少一个耐热基底构件1; 导电层3,其具有形成在耐热基底构件上的加热器图案3a; 在导电层上形成具有绝缘性的保护层4; 以及作为在保护层上形成的具有化学计量比的氧的量的氧化物的耐腐蚀层4p。 可以提供一种加热元件,其中在保护层上形成电阻率或硬度被控制的耐腐蚀层,即使在高温环境和腐蚀性气体环境下也难以将腐蚀性气体透过, 由此,能够避免由于导电层,特别是电源端子部分的腐蚀而导致的劣化,另外即使具有卡盘图案也能够作为静电卡盘的高功能,并且具有长的使用寿命,并且是 能够以低成本生产。