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1. 发明公开

EP1096351A1 PARALLEL BYPASS TYPE FLUID FEEDING DEVICE, AND METHOD AND DEVICE FOR CONTROLLING FLUID VARIABLE TYPE PRESSURE SYSTEM FLOW RATE USED FOR THE DEVICE 审中-公开
标题翻译：旁路类型和调节压力系统与可变液体压力流量的方法和设备布置成平行液装置这FLÜSSIGLEITSSPEISEVORRICHTUNGUSED
公开(公告)号：EP1096351A1
公开(公告)日：2001-05-02
申请号：EP00913087.3
申请日：2000-04-03
申请人： Fujikin Incorporated , TOKYO ELECTRON LIMITED , Ohmi, Tadahiro
发明人： OHMI, Tadahiro , KAGATSUME, Satoshi, Tokyo Electron Yamanashi Ltd. , SUGIYAMA, Kazuhiko, Tokyo Electron Yamanashi Ltd. , MINAMI, Yukio, Fujikin Incorporated , NISHINO, Kouji, Fujikin Incorporated , DOHI, Ryousuke, Fujikin Incorporated , YONEHANA, Katsunori, Fujikin Incorporated , IKEDA, Nobukazu, Fujikin Incorporated , YAMAJI, Michio, Fujikin Incorporated , HIROSE, Jun, Tokyo Electron Yamanashi Ltd. , FUKAZAWA, Kazuo, Tokyo Electron Yamanashi Ltd. , KOIZUMI, Hiroshi, Tokyo Electron Yamanashi Ltd. , NAGAOKA, Hideki, Tokyo Electron Yamanashi Ltd. , MORIMOTO, Akihiro, Fujikin Incorporated , UNO, Tomio, Fujikin Incorporated , IDETA, Eiji, Fujikin Incorporated , MATSUMOTO, Atsushi, Fujikin Incorporated , UENOYAMA, Toyomi, Fujikin Incorporated , HIROSE, Takashi, Fujikin Incorporated
IPC分类号： G05D7/06
CPC分类号： G05D7/0658 , G05D7/0664 , Y10S438/935 , Y10T137/0396 , Y10T137/7759 , Y10T137/7761 , Y10T137/86389 , Y10T137/87877 , Y10T137/87917
摘要： A fluid supply apparatus with a plurality of flow lines branching out from one regulator for adjustment of pressure, the flow lines being arranged in parallel, wherein a measure is taken that the operation, that is, opening or closing of one flow passage will have no transient effect on the steady flow of the other flow passages. For this purpose, each flow passage is provided with a time delay-type mass flow controller MFC so that when one closed fluid passage is opened, the mass flow controller on that flow passage reaches a set flow rate Qs in a specific delay time Δt from the starting point.
Also provided are a method and an apparatus for the above in which a plurality of gas types can be controlled in flow rate with high precision by one pressure-type flow control system. To that end, a formula for calculating the flow rate of a gas is theoretically derived that flows with a pressure ratio not higher than the critical pressure ratio. From that formula, the flow factor is defined, so that the formula may be applied to a number of gas types using flow factors.
The method includes calculating the flow rate Qc of a gas passing through an orifice according to formula Qc = KP 1 (K = constant) with a pressure P 1 on an upstream side of the orifice set at twice or more higher than pressure P 2 on a downstream side, wherein the flow factor FF for each kind of gas is calculated as follows: FF = (k/γs){2/(κ + 1)} 1/(κ-1) [κ/{(κ + 1)R}] 1/2 and wherein, if the calculated flow rate of gas type A is Q A , and, when gas type B is allowed to flow through the same orifice under the same pressure on the upstream side and at the same temperature on the upstream side, the flow rate Q B is calculated as follows: Q B = (FF B /FF A )Q A where

ys = concentration of gas in standard state;
κ = ratio of specific heat of gas;
R = constant of gas;
K = proportional constant not depending on the type of gas;
FF A = flow factor of gas type A; and
FF B = flow factor of gas type B.

2. 发明公开

EP1521154A1 METHOD FOR SUPPLYING GAS WHILE DIVIDING TO CHAMBER FROM GAS SUPPLY FACILITY EQUIPPED WITH FLOW CONTROLLER 审中-公开
标题翻译：方法将气体送入而在细分KAMMERAUSGASVERSORGUNGSEINRICHTUNG一个流量控制装备
公开(公告)号：EP1521154A1
公开(公告)日：2005-04-06
申请号：EP03701808.2
申请日：2003-01-20
申请人： Fujikin Incorporated , TOKYO ELECTRON LIMITED
发明人： SUGIYAMA, Kazuhiko, Tokyo Electron Ltd. , IKEDA, Nobukazu, Fujikin Incorporated , NISHINO, Kouji, Fujikin Incorporated , DOHI, Ryousuke, Fujikin Incorporated , UENOYAMA, Toyomi, Fujikin Incorporated
IPC分类号： G05D7/06
CPC分类号： G05D7/0664 , Y10T137/7759 , Y10T137/7761
摘要： A method for supplying a specified quantity Q of processing gas while dividing at a desired flow rate ratio Q 1 /Q 2 accurately and quickly from a gas supply facility equipped with a flow controller into a chamber. When a specified quantity Q of gas is supplied while being divided at a desired flow rate ratio Q 1 /Q 2 from a gas supply facility equipped with a flow controller into a reduced pressure chamber C through a plurality of branch supply lines and shower plates fixed to the ends thereof, pressure type division quantity controllers FV 1 and FV 2 are provided in the plurality of branch supply lines GL 1 and GL 2 . Opening control of both division quantity controllers FV 1 and FV 2 is started by an initial flow rate set signal from a division quantity control board FRC for fully opening the control valve CV of the pressure type division quantity controller having a higher flow rate and pressures P 3 ' and P 3 " on the downstream side of the control valve CV are regulated thus supplying a total quantity Q = Q 1 + Q 2 of gas while dividing into the chamber C through orifice holes (3a, 4a) made in shower plates (3, 4) at desired division quantities Q 1 and Q 2 represented by formulas Q 1 = C 1 P 3 ' and Q 2 = C 2 P 3 " (where, C 1 and C 2 are constants dependent on the cross-sectional area of the orifice hole or the gas temperature on the upstream side thereof).
摘要翻译：一种用于供应处理气体，同时以期望的流量比Q 1 / Q分割的指定量Q方法准确地配备有流量控制器至腔室的气体供给设备设置和快速。当气体的指定量Q被提供，而在从通过的分支供电线和簇射极板一个多元化配备有流量控制器进入减压室C的气体供给设备的期望流速比Q1 / Q2固定在被划分其两端，压力式分量控制器FV 1和FV 2在分支供给线GL1和GL2的设置多个。这两个分割量控制器FV 1和FV 2的速率打开控制是通过在初始流设定信号开始从除法量控制板FRC用于完全打开具有更高的流速和压力P3“和加压型除法量控制器的控制阀CV P3“在控制阀CV的下游侧被调节THUS供给总量Q = +（3,4）在期望Q1气体Q2而分割成通过在喷淋板制成孔的孔（3A，4A）的室C 除法量Q1和Q2由式Q1 = C1P3“和Q2 = C2P3“来表示（其中，C1和C2是依赖于节流孔或在上游侧的气体温度物的横截面面积的常量）。

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