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    • 5. 发明公开
    • VERSATILE FLOW RATE CONTROLLER
    • 柔性纤维素
    • EP1026566A1
    • 2000-08-09
    • EP99935121.6
    • 1999-08-09
    • Fujikin IncorporatedTOKYO ELECTRON LIMITEDOHMI, Tadahiro
    • OHMI, TadahiroKAGATSUME, Satoshi, Tokyo Electron Yamanashi Ltd.HIROSE, Jun, Tokyo Electron Yamanashi Ltd.NISHINO, Kouji, Fujikin Incorporated
    • G05D7/06
    • G05D7/0658G05D7/0635Y10T137/7759Y10T137/7761
    • A fluid-switchable flow rate control system that permits free changing of the full scale flow rate and which can control a plurality of kinds of fluids with high precision.
      The fluid-switchable flow rate control system controls the flow rate of fluid with the pressure P 1 on the upstream side of the orifice member held about twice or more higher than the downstream pressure P 2 , the fluid-switchable flow rate control system comprising an orifice member 8 replaceable with another to provide a suitable orifice diameter according to the kind of fluid and the flow rate range, a control valve 2 provided on the upstream side thereof, a pressure detector 6 provided between the control valve 2 and the orifice member 8, and a flow rate calculation circuit 14 where, from the pressure P 1 detected by the pressure detector, the flow rate Qc is calculated by the equation Qc = KP 1 (K: constant), a flow rate-setting circuit 16 for outputting flow rate setting signal Qe, a flow rate conversion circuit 18 for multiplying the calculated flow rate signal Qc by the flow rate conversion rate k into switch-over calculated flow rate signal Qf ( Qf = kQc ) to change the full scale flow rate, and a calculation control circuit 20 to output the difference between the switch-over calculation flow rate signal Qf and the flow rate setting signal Qe as control signal Qy to the drive 4 of the control valve 2, thereby opening or closing the control valve to bring the control signal Qy to zero, thus controlling the flow rate on the downstream side of the orifice member.
    • 一种可流体切换的流量控制系统,其允许满量程流量的自由变化并且可以高精度地控制多种流体。 流体切换流量控制系统控制流体的流量,其中孔口部件的上游侧的压力P1保持在比下游压力P2大约两倍或更多的高度,流体可切换流量控制系统包括孔口部件 8可替换为另一个,以根据流体种类和流量范围提供合适的孔径,设置在其上游侧的控制阀2,设置在控制阀2和孔口构件8之间的压力检测器6,以及 流量计算电路14,其中根据由压力检测器检测到的压力P1通过公式Qc = KP1(K:常数)计算流量Qc;流量设定电路16,用于输出流量设定信号Qe ,用于将计算出的流量信号Qc乘以流量转换率k的流量转换电路18转换为切换计算流量信号Qf(Qf = kQc),以改变满量程fl 以及将切换计算流量信号Qf和流量设定信号Qe之间的差作为控制信号Qy输出到控制阀2的驱动器4的计算控制电路20,由此打开或关闭控制 使控制信号Qy为零,从而控制孔构件下游侧的流量。