专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明公开

EP1001326A1 GAS SUPPLY EQUIPMENT WITH PRESSURE TYPE FLOW RATE CONTROL DEVICE 有权
标题翻译： GASVERSORGUNGSEINRICHTUNG MITDRUCKABHÄNGIGERDURCHFLUSSREGLUNGSVORRICHTUNG
公开(公告)号：EP1001326A1
公开(公告)日：2000-05-17
申请号：EP99922553.5
申请日：1999-05-27
申请人： Fujikin Inc. , TOKYO ELECTRON LIMITED , OHMI, Tadahiro
发明人： OHMI, Tadahiro , KAGATSUME, Satoshi , IKEDA, Nobukazu , NISHINO, Kouji , YOSHIKAWA, Kazuhiro , IDETA, Eiji , DOHI, Ryousuke , UNO, Tomio , YAMAJI, Michio
IPC分类号： G05D7/06
CPC分类号： G05D7/0635 , Y10T137/7759 , Y10T137/7761
摘要： An improved and reduced-size low-cost gas supply system equipped with a pressure-type flow control used as in semiconductor manufacturing facilities. Transient flow rate characteristics are improved to prevent the gas from overshooting when the gas supply is started, raising the flow rate control accuracy and reliability of facilities. That eliminates the quality ununiformity of products or semiconductors and raises the production efficiency.
To illustrate, the gas supply system equipped with a pressure-type flow control unit is so configured that with the pressure on the upstream side of the orifice held about twice or more higher than the downstream pressure, the gas flow rate is controlled to supply the gas to a gas-using process through an orifice-accompanying valve, the gas supply system comprising a control valve to receive gas from the gas supply source, an orifice-accompanying valve provided on the downstream side of the control valve, a pressure detector provided between the control valve and the orifice-accompanying valve, an orifice provided on the downstream side of the valve mechanism of the orifice-accompanying valve and a calculation control unit where on the basis of the pressure P1 detected by the pressure detector, the flow rate Qc is calculated with an equation Qc = KP1 (K: constant) and the difference between the flow-rate specifying signal Qs and the calculated flow rate Qc is then input as control signal Qy in the drive for the control valve, thereby regulating the opening of the control valve for adjusting the pressure P1 so that the flow rate of the gas to supply can be controlled.
摘要翻译：一种改进且尺寸较小的低成本气体供应系统，配备有与半导体制造设备一样使用的压力型流量控制。提高瞬态流量特性，防止气体开始时气体过冲，提高流量控制精度和设施可靠性。这消除了产品或半导体的质量不均匀性并提高了生产效率。为了说明，配置有压力型流量控制单元的气体供给系统被构造成使得在孔口的上游侧的压力保持为比下游压力高大约两倍或更多的气体，气体流量被控制以供应气体通过孔口相关阀进入气体使用过程，所述气体供应系统包括用于接收来自气体供应源的气体的控制阀，设置在控制阀的下游侧的孔附件阀，设置有压力检测器在控制阀和节流阀相关阀之间，设置在节流阀相关阀的阀机构的下游侧的孔口和计算控制单元，其中基于由压力检测器检测到的压力P1，流量用公式Qc = KP1（K：常数）计算Qc，然后输入流量指定信号Qs和计算流量Qc之间的差作为控制符号在控制阀的驱动中，由此调节用于调节压力P1的控制阀的打开，从而可以控制供给气体的流量。

2. 发明授权

EP1001326B1 GAS SUPPLY EQUIPMENT WITH PRESSURE TYPE FLOW RATE CONTROL DEVICE 有权
标题翻译：有压敏流动调节装置气体供给机构
公开(公告)号：EP1001326B1
公开(公告)日：2005-08-31
申请号：EP99922553.5
申请日：1999-05-27
申请人： FUJIKIN Inc. , TOKYO ELECTRON LIMITED , OHMI, Tadahiro
发明人： OHMI, Tadahiro , KAGATSUME, Satoshi , IKEDA, Nobukazu , NISHINO, Kouji , YOSHIKAWA, Kazuhiro , IDETA, Eiji , DOHI, Ryousuke , UNO, Tomio , YAMAJI, Michio
IPC分类号： G05D7/06
CPC分类号： G05D7/0635 , Y10T137/7759 , Y10T137/7761
摘要： A gas supply equipment comprising a gas control valve (2), an orifice accommodating valve (9) provided downstream of the control valve (2), a pressure detector (3) provided between the control valve (2) and the orifice accommodating valve (9), an orifice (5) provided downstream of the valve mechanism of the orifice accommodating (9) and an arithmetic and control unit which calculates a flow rate as Qc = KP1 (K; constant) from a detected pressure P1 by the pressure detector (3) and outputs to the drive unit of the control valve (2) the difference between a flow rate instruction signal Qs and a calculated flow rate Qc as a control signal Qy.

3. 发明公开

EP1643218A1 DIFFERENTIAL PRESSURE TYPE FLOWMETER AND DIFFERENTIAL PRESSURE TYPE FLOWMETER CONTROLLER 审中-公开
标题翻译： STRÖMUNGSMESSERDES DIFFERENZDRUCKTYPS UNDSTRÖMUNGSMESSERSTEUERUNGDES DIFFERENZDRUCKTYPS
公开(公告)号：EP1643218A1
公开(公告)日：2006-04-05
申请号：EP04746098.5
申请日：2004-06-18
申请人： FUJIKIN INCORPORATED , OHMI, Tadahiro
发明人： OHMI, Tadahiro , SUGIYAMA, Kazuhiko , UNO, Tomio , IKEDA, Nobukazu , NISHINO, Kouji , NAKAMURA, Osamu , DOHI, Ryousuke , MATSUMOTO, Atsushi
IPC分类号： G01F1/42 , G01F1/50 , G01F7/00
CPC分类号： G01F1/50 , G01F1/42 , G05D7/0635
摘要： A cost reduction can be achieved by making a differential pressure type flowmeter simple in structure, and highly accurate flow rate measurements can be attained over the wide flow rate range of 100%-1 % with errors E of less than 1 (%SP) both in real time and in a state of inline.
To achieve the ends, a differential pressure type flowmeter comprises an orifice, a detector to detect a fluid pressure P 1 on the upstream side of an orifice, a detector to detect a fluid pressure P 2 on the downstream side of an orifice, a detector to detect a fluid temperature T on the upstream side of an orifice, and a control computation circuit to compute a fluid's flow rate Q passing through an orifice by using the pressure P 1 , pressure P 2 and temperature T detected with the aforementioned detectors, and the aforementioned fluid's flow rate Q is computed with the equation Q=C1 · P1/√T· ((P 2 /P 1 ) m - (P 2 /P 1 ) n ) ½ (where C 1 is a proportional constant, and m and n are constants).
摘要翻译：通过使差压式流量计结构简单，可以实现成本降低，并且可以在100％-1％的宽流量范围内实现高精度的流量测量，误差E小于1（％SP）在实时和处于内联状态。为了达到目的，差压式流量计包括孔口，用于检测孔口上游侧的流体压力P 1的检测器，检测孔口下游侧的流体压力P 2的检测器，检测器以检测孔口上游侧的流体温度T;以及控制运算电路，通过使用利用上述检测器检测出的压力P 1，压力P 2和温度T来计算通过孔口的流体流量Q，以及上述流体的流量Q用等式Q = C1·P1 /šT·（（P 2 / P 1）m - （P 2 / P 1）n）1/2来计算，其中C 1是比例常数，m 和n是常数）。

4. 发明公开

EP1707857A1 METHOD FOR WATER HAMMER-LESS OPENING OF FLUID PASSAGE, CHEMICAL SUPPLY METHOD USING THE SAME, AND WATER HAMMER-LESS OPENING DEVICE 审中-公开
标题翻译：程序对水PUNCH免费开放供流体通过本所使用的化学电源的方法和装置与水PUNCH免费开通
公开(公告)号：EP1707857A1
公开(公告)日：2006-10-04
申请号：EP05703503.2
申请日：2005-01-13
申请人： FUJIKIN INCORPORATED , OHMI, Tadahiro
发明人： OHMI, Tadahiro , NISHINO, Kouji , NAGASE, Masaaki , DOHI, Ryousuke , IKEDA, Nobukazu , NISHIMURA, Ryutaro
IPC分类号： F16K47/00
CPC分类号： F16K47/02 , Y10T137/0324 , Y10T137/0396 , Y10T137/7761 , Y10T137/7762 , Y10T137/7842 , Y10T137/86389 , Y10T137/86397 , Y10T137/86461
摘要： It is so made that a fluid passage can be abruptly opened with a very simple device and operations and also in a short period of time without causing a water hammer.
The water hammerless opening device comprises an actuator operating type valve installed on the fluid passage, an electro-pneumatic conversion device to supply the 2-step actuator operating pressure Pa to the afore-mentioned actuator operating type valve, a vibration sensor removably fixed to the pipe passage on the upstream side of the actuator operating type valve, and a tuning box to which the vibration detecting signal Pr detected by the vibration sensor is inputted, through which the control signal Sc to control the step operating pressure Ps' of the afore-mentioned 2-step actuator operating pressure Pa is outputted to the electro-pneumatic conversion device, and with which the 2-step actuator operating pressure Pa of the step operating pressure Ps', which makes the vibration detecting signal Pr nearly zero, is outputted from the electro-pneumatic conversion by adjusting the control signal Sc.
摘要翻译：就这样制成没有流体通道可以突然在很短的时间周期非常简单的装置和操作，从而被打开，而不会引起水击。安装在流体通路的致动器操作型阀的无水击打开装置包括，向电 - 气变换装置供给的2步进致动器动作压力Pa到前述致动器动作式阀，振动传感器可移除地固定到所述在致动器操作式阀的上游侧管路，和调谐框进行由振动传感器检测到的振动检测信号Pr被输入时，通过该控制信号Sc来控制afore-的步骤操作压力Ps' 提到的两步致动器动作压力Pa的输出到电 - 气变换装置，以及与该两步骤致动器动作压力的步骤操作压力Ps'，这使得振动检测信号Pr大致为零的Pa时，在从输出通过调整控制信号Sc的电 - 气动转换。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式