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1. 发明公开

EP3186827A1 SUBSTRATE CONTAINER 审中-公开
标题翻译：基板容器
公开(公告)号：EP3186827A1
公开(公告)日：2017-07-05
申请号：EP15835150.2
申请日：2015-08-28
申请人： Entegris, Inc.
发明人： GREGERSON, Barry , ANDERSEN, Christian , RASCHKE, Russ, V. , ZABKA, Michael
IPC分类号： H01L21/673
CPC分类号： H01L21/67386 , H01L21/67366 , H01L21/67369 , H01L21/67383
摘要： A front opening wafer container with a forward and rearward sets of stacked V-shaped wafer edge receiving portions, the rearward set part of a wafer shelf component and comprising a thin film of PBT preformed and overmolded with a polycarbonate. The sets of stacked V-shaped wafer edge receiving portions providing between-shelf seating positions above on-shelf seating positions. The PBT providing a low friction sliding engagement surface for the wafer edges thereby providing uniform and consistent dropping of wafers from the between shelf position to the on-shelf position when the door of the wafer container is removed.
摘要翻译：一种前开式晶圆容器，具有向前和向后的一组堆叠的V形晶圆边缘接收部分，晶圆搁板部件的向后放置部分并且包括用聚碳酸酯预成型和包覆成型的PBT薄膜。这些堆叠的V形晶片边缘接收部分提供架上座位位置之上的架内座位位置。 PBT为晶片边缘提供低摩擦滑动接合表面，从而当晶片容器的门被移除时，提供晶片从架子位置到货架位置的均匀一致的下降。

2. 发明公开

EP1928764A2 RETICLE POD 有权转让
标题翻译：光罩
公开(公告)号：EP1928764A2
公开(公告)日：2008-06-11
申请号：EP06815463.2
申请日：2006-09-27
申请人： ENTEGRIS, INC.
发明人： KOLBOW, Steven, P. , MCMULLEN, Kevin , TIEBEN, Anthony, M. , KUSZ, Matthew , ANDERSEN, Christian , WANG, Huaping , CISEWSKI, Michael , JOHNSON, Michael, L. , HALBMAIER, David, L. , LYSTAD, John
IPC分类号： B65D85/48
CPC分类号： B65D85/48 , G03F1/66 , H01L21/67353 , H01L21/67359 , H01L21/67383 , H01L21/67386
摘要： A container that provides support structure and environmental control means including, for example, minimal contact with a wafer or reticle contained therein that cooperates with wafer or reticle to provide a diffusion barrier mitigates against particles settling on a face of the wafer or reticle. The container includes a base having a flat, polished surface with protrusions upon which the wafer or reticle rests. The protrusions are of a geometry, such as a sphere, that imparts minimum contact with the wafer or reticle and suspends the wafer or reticle over the base, providing a gap therebetween. The gap isolates the wafer or reticle from the flat, polished surface of the base, but is dimensioned to inhibit migration of particles into the gap, thereby preventing contamination of sensitive surfaces of the wafer or reticle. Diffusion filters provide pressure equalization without filter media. Moveable reticle pins on the top cover provide reticle restraint. Dual containment pod embodiment provides further isolation and protection.

3. 发明公开

EP1858766A2 MASK CONTAINER 审中-公开
标题翻译： MASK集装箱
公开(公告)号：EP1858766A2
公开(公告)日：2007-11-28
申请号：EP06736681.5
申请日：2006-02-27
申请人： Entegris, Inc.
发明人： TIEBEN, Anthony, Mathius , ANDERSEN, Christian , WISEMAN, Brian
IPC分类号： B65D6/28
CPC分类号： G03F7/70741 , G03F1/66 , H01L21/67353 , H01L21/67359 , H01L21/67373
摘要： Drug delivery systems suitable for administration into the interior of an eye of a person or animal are described. The present systems include a drug delivery element that provides directional delivery of one or more drugs to a desired target site in the eye and remain invisible to the individual in which the element is placed. The present drug delivery systems may include an adhesive portion that adheres the drug delivery element to the retina of the eye, and/or a polymeric envelope substantially surrounding the drug delivery element to form an intravitreal implant. The envelope may enhance the stability and handling of the implant when the implant is being placed in the eye. Methods of producing and using the drug delivery systems are also described.

4. 发明授权

EP1928764B1 RETICLE POD 有权转让
标题翻译： RETIKELHALTER
公开(公告)号：EP1928764B1
公开(公告)日：2011-11-02
申请号：EP06815463.2
申请日：2006-09-27
申请人： ENTEGRIS, INC.
发明人： KOLBOW, Steven, P. , MCMULLEN, Kevin , TIEBEN, Anthony, M. , KUSZ, Matthew , ANDERSEN, Christian , WANG, Huaping , CISEWSKI, Michael , JOHNSON, Michael, L. , HALBMAIER, David, L. , LYSTAD, John
IPC分类号： H01L21/67
CPC分类号： B65D85/48 , G03F1/66 , H01L21/67353 , H01L21/67359 , H01L21/67383 , H01L21/67386
摘要： A container that provides support structure and environmental control means including, for example, minimal contact with a wafer or reticle contained therein that cooperates with wafer or reticle to provide a diffusion barrier mitigates against particles settling on a face of the wafer or reticle. The container includes a base having a flat, polished surface with protrusions upon which the wafer or reticle rests. The protrusions are of a geometry, such as a sphere, that imparts minimum contact with the wafer or reticle and suspends the wafer or reticle over the base, providing a gap therebetween. The gap isolates the wafer or reticle from the flat, polished surface of the base, but is dimensioned to inhibit migration of particles into the gap, thereby preventing contamination of sensitive surfaces of the wafer or reticle. Diffusion filters provide pressure equalization without filter media. Moveable reticle pins on the top cover provide reticle restraint. Dual containment pod embodiment provides further isolation and protection.
摘要翻译：提供支撑结构和环境控制装置的容器包括例如与其中包含的晶片或掩模版的最小接触，其与晶片或掩模版配合以提供扩散屏障，以抵抗沉淀在晶片或掩模版的表面上的颗粒。该容器包括具有平坦抛光表面的底座，该表面具有突出物，晶片或标线片搁置在该突起上。这些突起具有诸如球体的几何形状，其赋予与晶片或掩模版的最小接触，并且将晶片或掩模版悬挂在基底上，从而在其间提供间隙。间隙将晶片或掩模版与基底的平坦抛光表面隔离，但是其尺寸被设计成抑制颗粒迁移到间隙中，从而防止晶片或掩模版的敏感表面的污染。扩散过滤器提供无过滤介质的压力均衡。顶盖上的可移动分划板针可提供掩模版约束。双重安全壳实施例提供了进一步的隔离和保护。

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