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1. 发明公开

EP3118683A1 PELLICLE FRAME, PELLICLE AND MANUFACTURING METHOD THEREOF, EXPOSURE ORIGINAL PLATE AND MANUFACTURING METHOD THEREOF, EXPOSURE DEVICE, AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD 审中-公开
标题翻译：防护膜框架制作，曝光装置及半导体元件制造方法薄膜及其方法曝光原版及过程
公开(公告)号：EP3118683A1
公开(公告)日：2017-01-18
申请号：EP15786200.4
申请日：2015-04-27
申请人： Mitsui Chemicals, Inc.
发明人： KOHMURA, Kazuo , ONO, Yosuke , TANEICHI, Daiki , SATO, Yasuyuki , HIROTA, Toshiaki
IPC分类号： G03F1/64 , G03F1/62 , G03F7/20
CPC分类号： G03F1/64 , G03F1/22 , G03F1/62 , G03F7/2004 , H01L21/67359
摘要： A pellicle frame containing a frame body, the frame body having a groove formed in one end surface of the frame body, the one end surface being an end surface in a thickness direction of the frame body that is located at a side configured to support a pellicle membrane, and a through-hole that penetrates through a portion between an outer circumferential surface of the frame body and a wall surface of the groove formed in the one end surface.
摘要翻译：含一个框体的防护薄膜框架，框架体具有凹槽在框体的一端表面上形成，所述一个端部表面在所述框架体的厚度方向上的端面并位于配置成支持一个侧防护膜，和一个贯通孔的部分，在所述框体，并在一个端部表面形成的槽的壁表面的外周面之间没有贯通。

2. 发明公开

EP2909110A4 RETICLE POD WITH COVER TO BASEPLATE ALIGNMENT SYSTEM 有权
标题翻译： MASKENHALTER MIT系统ZUR AUSRICHTUNG DER ABDECKUNG MIT DER GRUNDPLATTE
公开(公告)号：EP2909110A4
公开(公告)日：2016-08-24
申请号：EP13847167
申请日：2013-10-17
申请人： ENTEGRIS INC
发明人： LYSTAD JOHN , KOLBOW STEVEN P
IPC分类号： H01L21/673 , G03F1/66 , G03F7/20
CPC分类号： B65D85/48 , B65D25/10 , B65D25/14 , B65D43/02 , G03F1/66 , H01L21/67353 , H01L21/67359 , H01L21/67373 , H01L21/67383 , H01L21/67386 , Y10T29/49895
摘要： An alignment system for aligning the cover and base of an inner pod of a reticle carrier. The cover and base can each be provided with hard planar surface seal zones on the bottom surface and the top surface, respectively. The cover of the inner pod may be provided with a through hole or a blind hole into which an alignment pin is disposed. The base is provided with a guide recess to receive the distal end of the alignment pin. The alignment pin operates to limit contact surface area between the cover and the base during that is in sliding contact, thus inhibiting particulate generation. Low particulate-generating materials, such as stainless steel or polyamide-imide, can also be utilized to further reduce particulate generation. Furthermore, the cover and base can each be unitary without need for fastening components thereto, thereby eliminating clamped surfaces that can entrap and subsequently shed particulates.
摘要翻译：对准系统，用于对准掩模载体的内部盒的盖和底座。盖子和底座可以分别在底面和顶面上设置硬平坦的表面密封区域。内部容器的盖可以设置有通孔或盲孔，对准销布置在该通孔或盲孔中。基座设置有用于接收对准销的远端的引导凹部。在滑动接触期间，对准销操作以限制盖和基座之间的接触表面积，从而抑制颗粒的产生。还可以使用低颗粒产生材料，例如不锈钢或聚酰胺 - 酰亚胺，以进一步减少颗粒产生。此外，盖和基座可以是单一的，而不需要紧固部件，从而消除夹带和随后脱落的颗粒的夹紧表面。

3. 发明授权

EP1866094B1 ENVIRONMENTAL CONTROL IN A RETICLE SMIF POD 有权
标题翻译：环境控制研究光罩SMIF POD
公开(公告)号：EP1866094B1
公开(公告)日：2012-12-26
申请号：EP06749321.3
申请日：2006-04-04
申请人： ENTEGRIS, INC.
发明人： HALBMAIER, David, L. , SIMPSON, Anthony , GOODWIN, William, M. , KISHKOVICH, Oleg, P. , KIELBASO, Tom , MANGANIELO, Frank
IPC分类号： H01L21/673
CPC分类号： H01L21/67017 , H01L21/67353 , H01L21/67359 , H01L21/67386 , H01L21/67389 , H01L21/67393

4. 发明公开

EP2085325A4 SHEET STORING CARRIER SYSTEM AND RETICLE CASE MAKING USE OF THE SAME 审中-公开
标题翻译：刀片储存及输送系统使用该RETIKELGEHÄUSE
公开(公告)号：EP2085325A4
公开(公告)日：2011-10-26
申请号：EP06833288
申请日：2006-11-24
申请人： MIRAIAL CO LTD
发明人： IWAKI TADAO , UMEDA TOSHIYA
IPC分类号： B65D85/86 , B65D77/04 , B65D81/20 , G03F1/40 , G03F1/66 , H01L21/027 , H01L21/67 , H01L21/673
CPC分类号： H01L21/67353 , H01L21/67005 , H01L21/67359 , H01L21/67376 , H01L21/67393

5. 发明公开

EP1534616A4 UNIVERSAL RETICLE TRANSFER SYSTEM 审中-公开
标题翻译： UNIVERSAL掩模传送系统
公开(公告)号：EP1534616A4
公开(公告)日：2010-04-28
申请号：EP03739118
申请日：2003-06-12
申请人： FORTREND ENGINEERING CORP
发明人： WU KUNG CHRIS , SIFUENTES ROBERT FRANK , HARDY KENNETH ALAN , CALIBOSO EDGARDO A , MALOBRODSKY ANATOLY , HUANG CHIEN-RONG
IPC分类号： B65G49/07 , H01L21/00 , H01L21/673 , H01L21/677 , H01L21/683 , H01L21/687
CPC分类号： H01L21/6734 , H01L21/67359 , H01L21/67373 , H01L21/67379 , H01L21/67383 , H01L21/67386 , H01L21/67775 , H01L21/67778 , H01L21/6831 , H01L21/68707

6. 发明公开

EP1866094A2 ENVIRONMENTAL CONTROL IN A RETICLE SMIF POD 有权
标题翻译：环境控制研究光罩SMIF POD
公开(公告)号：EP1866094A2
公开(公告)日：2007-12-19
申请号：EP06749321.3
申请日：2006-04-04
申请人： ENTEGRIS, INC.
发明人： HALBMAIER, David, L. , SIMPSON, Anthony , GOODWIN, William, M. , KISHKOVICH, Oleg, P. , KIELBASO, Tom , MANGANIELO, Frank
IPC分类号： B03C3/00
CPC分类号： H01L21/67017 , H01L21/67353 , H01L21/67359 , H01L21/67386 , H01L21/67389 , H01L21/67393
摘要： The present invention provides a standardized mechanical interface (SMIF) reticle pod (100) that is configured to provide a controlled environment for supporting a reticle (130) wherein the controlled environemt is maintained substantially free of crystal growth causing contaminants. Accordingly, there is provided a layered filter (232) with filter elements capable of filtering particulates and adsorbing gaseous contaminants. The filter (232) has an inwardly facing face generally planar shaped with a surface area that is substantially half or more of the area of the reticle face (129). The inwardly facing is placed in close proximity to the reticle patterned surface (128) and has an area that is a significant fraction of the reticle patterned surface area (128). The SMIF pod is also provided with a purge system configured to inject a very dry gas within the controlled environment to flush the controlled environment of contaminants as well as to regenerate the filter (232).

7. 发明公开

EP1858766A2 MASK CONTAINER 审中-公开
标题翻译： MASK集装箱
公开(公告)号：EP1858766A2
公开(公告)日：2007-11-28
申请号：EP06736681.5
申请日：2006-02-27
申请人： Entegris, Inc.
发明人： TIEBEN, Anthony, Mathius , ANDERSEN, Christian , WISEMAN, Brian
IPC分类号： B65D6/28
CPC分类号： G03F7/70741 , G03F1/66 , H01L21/67353 , H01L21/67359 , H01L21/67373
摘要： Drug delivery systems suitable for administration into the interior of an eye of a person or animal are described. The present systems include a drug delivery element that provides directional delivery of one or more drugs to a desired target site in the eye and remain invisible to the individual in which the element is placed. The present drug delivery systems may include an adhesive portion that adheres the drug delivery element to the retina of the eye, and/or a polymeric envelope substantially surrounding the drug delivery element to form an intravitreal implant. The envelope may enhance the stability and handling of the implant when the implant is being placed in the eye. Methods of producing and using the drug delivery systems are also described.

8. 发明授权

EP1303729B1 ITEM STORAGE AND RETRIEVAL SYSTEM 有权
标题翻译：安排用于存储和对象的放电
公开(公告)号：EP1303729B1
公开(公告)日：2007-11-21
申请号：EP01952466.9
申请日：2001-07-06
申请人： BROOKS AUTOMATION, INC.
发明人： DENKER, Jeffrey, M. , WEISS, Mitchell , HICKEY, John, T. , TEAGUE, Peter, J., B. , JORDAN, David , GORDAN, Jonathan
IPC分类号： G03F7/20 , F24F3/16
CPC分类号： G03F7/70741 , G03F7/7075 , G03F7/70866 , H01L21/67359 , H01L21/67769 , Y10S414/135
摘要： A storage and retrieval system (100) is provided for safely and efficiently storing reticles in a clean environment. An enclosed storage unit (110) is provided for storing the reticles, and other items such as wafers and the like, in an environment which minimizes the amount of contaminants and is suitable for use in a semiconductor fabrication clean room. A retrieval unit (120) is provided separate from the enclosed storage unit (110) for accessing and staging the reticles before they enter and leave the storage unit (110) for minimizing exposure of the storage unit (110). The storage unit (110) includes a movable storage matrix (200) having a plurality of bays (202) for storing the reticles. The movable storage matrix (200) is selectively moved or rotated by a drive mechanism (210) that is located external to the storage unit (110) so that the storage unit (110) is substantially free of contaminant generating components.

9. 发明公开

EP1662324A3 Reticle-carrying container 审中-公开
标题翻译：容器与光掩模的载体
公开(公告)号：EP1662324A3
公开(公告)日：2007-06-27
申请号：EP05024325.2
申请日：2005-11-08
申请人： Miraial Co., Ltd.
发明人： Matsutori, Chiaki , Yanagihara, Koichi
IPC分类号： G03F7/20
CPC分类号： H01L21/67353 , G03F1/66 , G03F7/70741 , H01L21/67005 , H01L21/67359 , H01L21/67383 , H01L21/67386
摘要： The present invention supports a reticle (12) in a safe and secure manner. A reticle-carrying container (11) includes a pod (13) for storing the reticle (12), a door (14) and a seal (15) for blocking and sealing hermetically the pod (13). A pair of reticle retainers (25,45) is provided on the insides of the pod (13) and door (14). Each of the reticle retainers (25,45) includes an inclined plane (28) that contacts an upper corner (12A) or a lower corner (12B) of peripheral edge of the reticle (12) and supports the reticle (12) elastically. The inside of the inclined plane (28) is provided with concave portions (31,52) that enables a shock-absorbing function of allowing the deformation of the inclined plane (28), and supporting the reticle elastically, at the time of contact with the upper corner (12A) or the lower corner (12B) of peripheral edge of the reticle (12).

10. 发明公开

EP1662324A2 Reticle-carrying container 审中-公开
标题翻译： Fo em。。。。。。。。。。。。。。
公开(公告)号：EP1662324A2
公开(公告)日：2006-05-31
申请号：EP05024325.2
申请日：2005-11-08
申请人： Miraial Co., Ltd.
发明人： Matsutori, Chiaki , Yanagihara, Koichi
IPC分类号： G03F7/20
CPC分类号： H01L21/67353 , G03F1/66 , G03F7/70741 , H01L21/67005 , H01L21/67359 , H01L21/67383 , H01L21/67386
摘要： The present invention supports a reticle (12) in a safe and secure manner. A reticle-carrying container (11) includes a pod (13) for storing the reticle (12), a door (14) and a seal (15) for blocking and sealing hermetically the pod (13). A pair of reticle retainers (25,45) is provided on the insides of the pod (13) and door (14). Each of the reticle retainers (25,45) includes an inclined plane (28) that contacts an upper corner (12A) or a lower corner (12B) of peripheral edge of the reticle (12) and supports the reticle (12) elastically. The inside of the inclined plane (28) is provided with concave portions (31,52) that enables a shock-absorbing function of allowing the deformation of the inclined plane (28), and supporting the reticle elastically, at the time of contact with the upper corner (12A) or the lower corner (12B) of peripheral edge of the reticle (12).
摘要翻译：本发明以安全且可靠的方式支撑掩模版（12）。标本载体容器（11）包括用于存储标线（12）的容器（13），用于封闭并密封容器（13）的门（14）和密封件（15）。在舱（13）和门（14）的内侧上设有一对光罩保持器（25,45）。每个标线保持器（25,45）包括接触标线片（12）的周边边缘的上角（12A）或下角（12B）的倾斜平面（28），并弹性地支撑光罩（12）。倾斜平面（28）的内侧设置有凹部（31,52），能够进行使倾斜面（28）变形的吸震功能，并在接触时弹性支撑标线片标线（12）的周缘的上角（12A）或下角（12B）。

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