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    • 2. 发明公开
    • ANALYTE SENSOR AND FABRICATION METHODS
    • 分析传感器和制造方法
    • EP2914957A1
    • 2015-09-09
    • EP13851923.6
    • 2013-10-07
    • Edwards Lifesciences Corporation
    • PETISCE, James, R.GORHAM, Alexander, H.ZHOU, David
    • G01N27/26G01N27/403
    • G01N27/3271C12Q1/001C23F1/12C23F1/26C23F1/44G01N27/3272
    • Methods for fabricating analyte sensor components using IC- or MEMs-based fabrication techniques and sensors prepared therefrom. Fabrication of the analyte sensor component comprises providing an inorganic substrate having deposited thereon a release layer, a first flexible dielectric layer and a second flexible dielectric layer insulating there between electrodes, contact pads and traces connecting the electrodes and the contact pads of a plurality of sensors. Openings are provided in one of the dielectric layers over one or more of the electrodes to receive an analyte sensing membrane for the detection of an analyte of interest and for electrical connection with external electronics. The plurality of fabricated sensor components are lifted off the inorganic substrate. Methods of improving sensor performance by solution based and non-solution based etching are provided.
    • 使用基于IC或MEM的制造技术和由其制备的传感器来制造分析物传感器组件的方法。 分析物传感器组件的制造包括提供其上沉积有释放层,在其间绝缘的第一柔性电介质层和第二柔性电介质层的无机基底,接触垫和连接多个传感器的电极和接触垫的迹线 。 在一个或多个电极上的电介质层之一中提供开口,以接收分析物检测膜,用于检测感兴趣的分析物并用于与外部电子器件的电连接。 将多个制造的传感器部件从无机基板上提起。 提供了通过基于溶液和基于非溶液的蚀刻改善传感器性能的方法。