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    • 1. 发明公开
    • Jamin-type interferometers and components therefor
    • 的类型和相关联的部件的干涉仪贾敏
    • EP1180699A3
    • 2002-11-06
    • EP01306075.1
    • 2001-07-13
    • Downs, Michael JohnDowns, Angela Christine
    • Downs, Michael John
    • G02B5/136G01B9/02G02B5/124G02B27/14
    • G02B27/145G01B9/02056G01B9/02081G01B2290/45G02B5/122G02B27/1073G02B27/144
    • A retroreflector (32) has three mutually-orthogonal reflective surfaces arranged around an optical axis (12). The reflective surfaces stop short of the optical axis to provide a central region of the retroreflector which transmits incident light (M,N) and a peripheral region of the retroreflector which retroreflects incident light (C,D). When the reflector is used in a Jamin-type interferometer (10) with another reflector (34), this enables the interferometer to be used for measuring displacement between the reflectors. In the interferometer, a projected beam (M) is disposed between a pair of return beams (D,N) and/or one of the return beams (N) is disposed between a pair of the projected beams (C,M). This enables a first contiguous area of a face of a beam splitter (22) to be provided with a phase-shifting coating (28) to produce a phase quadrature relationship between a pair of interferogram beams (G,I). This simplifies the masking required when applying the coating (28). In manufacture of the beam splitting member (22), a thin-film, beam-splitting, metal coating is applied to the member, and the member and coating are baked so as to modify the phase shift produced by the coating to enable the phase quadrature relationship. During baking a beam of light is projected at the coating with an angle of incidence of substantially π/4 radians so that the beam is split into a transmitted component and a reflected component. The intensities or phases of the transmitted and reflected components are monitored during baking, and the baking is terminated when the monitored intensities or phases have a predetermined relationship. This improves the reliability and/or accuracy of the resulting phase shift.
    • 2. 发明公开
    • Jamin-type interferometers and components therefor
    • 干燥仪和Jamin-Typs undzugehörigeKomponenten
    • EP1180699A2
    • 2002-02-20
    • EP01306075.1
    • 2001-07-13
    • Downs, Michael JohnDowns, Angela Christine
    • Downs, Michael John
    • G02B5/136G01B9/02
    • G02B27/145G01B9/02056G01B9/02081G01B2290/45G02B5/122G02B27/1073G02B27/144
    • A retroreflector (32) has three mutually-orthogonal reflective surfaces arranged around an optical axis (12). The reflective surfaces stop short of the optical axis to provide a central region of the retroreflector which transmits incident light (M,N) and a peripheral region of the retroreflector which retroreflects incident light (C,D). When the reflector is used in a Jamin-type interferometer (10) with another reflector (34), this enables the interferometer to be used for measuring displacement between the reflectors.
      In the interferometer, a projected beam (M) is disposed between a pair of return beams (D,N) and/or one of the return beams (N) is disposed between a pair of the projected beams (C,M). This enables a first contiguous area of a face of a beam splitter (22) to be provided with a phase-shifting coating (28) to produce a phase quadrature relationship between a pair of interferogram beams (G,I). This simplifies the masking required when applying the coating (28).
      In manufacture of the beam splitting member (22), a thin-film, beam-splitting, metal coating is applied to the member, and the member and coating are baked so as to modify the phase shift produced by the coating to enable the phase quadrature relationship. During baking a beam of light is projected at the coating with an angle of incidence of substantially π/4 radians so that the beam is split into a transmitted component and a reflected component. The intensities or phases of the transmitted and reflected components are monitored during baking, and the baking is terminated when the monitored intensities or phases have a predetermined relationship. This improves the reliability and/or accuracy of the resulting phase shift.
    • 后向反射器(32)具有围绕光轴(12)布置的三个相互正交的反射表面。 反射表面停止在光轴之外,以提供后向反射器的中心区域,其传送入射光(M,N)和回射反射器的外围区域,其回射入射光(C,D)。 当反射器在具有另一个反射器(34)的Jamin型干涉仪(10)中使用时,这使得干涉仪能够用于测量反射器之间的位移。 在干涉仪中,投影光束(M)设置在一对返回光束(D,N)之间,和/或其中一个返回光束(N)设置在一对投影光束(C,M)之间。 这使得分束器(22)的面的第一连续区域能够设置有相移涂层(28),以在一对干涉图形波束(G,I)之间产生相位正交关系。 这简化了施加涂层(28)时所需的掩模。 在分束构件(22)的制造中,将薄膜,分束金属涂层施加到构件上,并且对构件和涂层进行烘烤,以便改变由涂层产生的相移,以使相位 正交关系。 在烘烤期间,光束以基本上π/ 4弧度的入射角投射在涂层处,使得光束被分裂成透射分量和反射分量。 在烘烤期间监测透射和反射部件的强度或相位,并且当所监视的强度或相位具有预定关系时,终止烘烤。 这提高了所产生的相移的可靠性和/或精度。