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    • 2. 发明公开
    • WET-ETCHABLE ANTIREFLECTIVE COATINGS
    • 可湿性抗反射涂料
    • EP2376584A1
    • 2011-10-19
    • EP09832279.5
    • 2009-10-19
    • Dow Corning Corporation
    • FU, Peng-FeiMOYER, EricYEAKLE, Craig
    • C09D183/04G03F7/11H01L21/30C09D183/06
    • C09D183/06C08G77/04C08G77/14G03F7/0752G03F7/091
    • Antireflective coatings produced from silsesquioxane resin comprises the units (Ph(CH2)rSiO(3-x)/2(OR′)x)m (HSiO(3-x)/2(OR′)x)n (MeSiO(3-x)/2(OR′)x)o (RSiO(3-x)/2(OR′)x)p (R1SiO(3-x)/2(OR′)x)q where Ph is a phenyl group, Me is a methyl group; R′ is hydrogen atom or a hydrocarbon group having from 1 to 4 carbon atoms; R is selected from a carboxylic acid group or a carboxylic acid forming group with the proviso that there is a sufficient amount of carboxylic acid groups to make the resin wet etchable after cure; and R1 is selected from substituted phenyl groups, ester groups, polyether groups; mercapto groups, sulfur-containing organic functional groups, hydroxyl producing group, aryl sulphonic ester groups, and reactive or curable organic functional groups; and r has a value of 0, 1, 2, 3, or 4; x has a value of 0, 1 or 2; wherein in the resin m has a value of 0 to 0.90; n has a value of 0.05 to 0.99; o has a value of 0 to 0.95; p has a value of 0.01 to 0.5; q has a value of 0 to 0.5; and m+n+o+p+q≈1.
    • 由倍半硅氧烷树脂制备的抗反射涂层包括单元(Ph(CH 2)r SiO(3-x)/ 2(OR x)x)m(HSiO(3-x)/ 2(OR x)x)n(MeSiO 其中Ph是苯基,其中R 1是苯基,并且其中R 1是苯基,其中R 1是(CH 2)x(CH 2) Me是甲基; R&素; 是氢原子或具有1至4个碳原子的烃基; R选自羧酸基团或羧酸形成基团,条件是存在足够量的羧酸基团以在固化后使树脂湿法蚀刻; 并且R1选自取代的苯基,酯基,聚醚基团; 巯基,含硫有机官能团,羟基产生基团,芳基磺酸酯基团和反应性或可固化的有机官能团; r的值为0,1,2,3或4; x的值为0,1或2; 其中树脂中m的值为0至0.90; n的值为0.05至0.99; o的值为0到0.95; p的值为0.01至0.5; q的值为0到0.5; 和m + n + o + p + q≈ 1。
    • 7. 发明公开
    • SILSESQUIOXANE RESINS
    • SILESQUIOXANE树脂
    • EP2373722A1
    • 2011-10-12
    • EP09832278.7
    • 2009-10-19
    • Dow Corning Corporation
    • FU, Peng-FeiMOYER, EricYEAKLE, Craig
    • C08G77/04C09D183/04
    • C08G77/14C08G77/04C08G77/12C09D183/06G03F7/0752G03F7/091
    • This invention pertains to silsesquioxane resins useful in antireflective coatings wherein the silsesquioxane resin comprises the units (Ph(CH2)rSiO(3-x)/2(OR′)x)m(HSiO(3-x)/2(OR′)x)n (MeSiO(3-x)/2(OR′)x)c, (RSiO(3-x)/2(OR′)x)p (R1SiO(3-x)/2(OR′)x)q where Ph is a phenyl group, Me is a methyl group; R′ is hydrogen atom or a hydrocarbon group having from 1 to 4 carbon atoms; R is selected from a carboxylic acid group, a carboxylic acid forming group, and mixtures thereof; and R1 is selected from substituted phenyl groups, ester groups, polyether groups; mercapto groups, sulfur-containing organic functional groups, hydroxyl producing group, aryl sulphonic ester groups, and reactive or curable organic functional groups; and r has a value of 0, 1, 2, 3, or 4; x has a value of 0, 1 or 2; wherein in the resin m has a value of 0 to 0.90; n has a value of 0.05 to 0.99; o has a value of 0 to 0.95; p has a value of 0.01 to 0.5; q has a value of 0 to 0.5; and m+n+o+p+q≈1.
    • 本发明涉及可用于抗反射涂层的倍半硅氧烷树脂,其中倍半硅氧烷树脂包含单元(Ph(CH 2)r SiO(3-x)/ 2(OR x)x)m(HSiO(3-x)/ 2(OR x) (OR x)x(n-1)x(n-1)x(n-1)x(n-1) )q其中Ph是苯基,Me是甲基; R&素; 是氢原子或具有1至4个碳原子的烃基; R选自羧酸基团,羧酸形成基团及其混合物; 并且R1选自取代的苯基,酯基,聚醚基团; 巯基,含硫有机官能团,羟基产生基团,芳基磺酸酯基团和反应性或可固化的有机官能团; r的值为0,1,2,3或4; x的值为0,1或2; 其中树脂中m的值为0至0.90; n的值为0.05至0.99; o的值为0到0.95; p的值为0.01至0.5; q的值为0到0.5; 和m + n + o + p + q≈ 1。
    • 8. 发明公开
    • SILSESQUIOXANE RESINS
    • SILESQUIOXANE树脂
    • EP2250215A2
    • 2010-11-17
    • EP09716676.3
    • 2009-02-03
    • Dow Corning Corporation
    • FU, Peng-FeiMOYER, Eric, Scott
    • C08G77/38
    • C09D183/04C08G77/04C08G77/045C08G77/12C08G77/14C08G77/70G02B1/111G03F7/0752G03F7/091
    • This invention pertains to silsesquioxane resins useful in antireflective coatings wherein the silsesquioxane resin is comprised of the units (Ph(CH
      2 )
      r SiO
      (3-x)/2 (OR')
      x )
      m (HSiO
      (3-x)/2 (OR')
      x )
      n (MeSiO
      (3-x)/2 (OR')
      x )
      o (RSiO
      (3-x)/2 (OR')
      x )
      p (R
      1 SiO
      (3-x)/2 (OR')
      x )
      q where Ph is a phenyl group, Me is a methyl group; R' is hydrogen atom or a hydrocarbon group having from 1 to 4 carbon atoms; R is selected from a hydroxyl producing group; and R
      1 is selected from substituted phenyl groups, ester groups, polyether groups; mercapto groups, and reactive or curable organic functional groups; and r has a value of 0, 1, 2, 3, or 4; x has a value of 0, 1 or 2; wherein in the resin m has a value of 0 to 0.95; n has a value of 0.05 to 0.95; o has a value of 0.05 to 0.95; p has a value of 0.05 to 0.5; q has a value of 0 to 0.5; and m + n + o + p + q ≈ 1.
    • (Ph(CH 2)r SiO(3-x)/ 2(OR')x)m(HSiO(3-x)/ 2( OR')x)n(MeSiO(3-x)/ 2(OR')x)o(RSiO(3-x)/ 2(OR')x)p(R 1 SiO(3-x)/ 2 ')x)q其中Ph是苯基,Me是甲基; R'是氢原子或具有1至4个碳原子的烃基; R选自羟基产生基团; 并且R 1选自取代的苯基,酯基,聚醚基; 巯基,和反应性或可固化的有机官能团; r的值为0,1,2,3或4; x的值为0,1或2; 其中树脂中的m值为0至0.95; n的值为0.05至0.95; o具有0.05至0.95的值; p的值为0.05至0.5; q的值为0到0.5; 和m + n + o + p +q≈1。