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    • 1. 发明公开
    • Monolithically-integrated infrared sensor
    • Monolithisch integrierter Infrarots传感器
    • EP1333504A2
    • 2003-08-06
    • EP03075163.0
    • 2003-01-17
    • Delphi Technologies, Inc.
    • Chavan, Abhijeet V.Logsdon, James H.Chilcott, Dan W.Lee, Han-ShengLambert, David K.Vas, Timothy A.
    • H01L35/02H01L35/08
    • G01J5/14G01J5/12
    • An integrated sensor (10) comprising a thermopile transducer (12) and signal processing circuitry (4) that are combined on a single semiconductor substrate (20), such that the transducer output signal is sampled in close vicinity by the processing circuitry (14). The sensor (10) comprises a frame (18) formed of a semiconductor material that is not heavily doped, and with which a diaphragm (16) is supported. The diaphragm (16) has a first surface for receiving thermal (e.g., infrared) radiation, and comprises multiple layers that include a sensing layer containing at least a pair of interlaced thermopiles (22). Each thermopile (22) comprises a sequence of thermocouples (24), each thermocouple (24) comprising dissimilar electrically-resistive materials that define hot junctions (26) located on the diaphragm (16) and cold junctions (28) located on the frame (18). The signal processing circuitry (14) is located on the frame (18) and electrically interconnected with the thermopiles (22). The thermopiles (22) are interlaced so that the output of one of the thermopiles (22) increases with increasing temperature difference between the hot and cold junctions (26,28) thereof, while the output of the second thermopile (22) decreases with increasing temperature difference between its hot and cold junctions (26,28).
    • 包括组合在单个半导体衬底(20)上的热电堆换能器(12)和信号处理电路(4)的集成传感器(10),使得所述换能器输出信号在所述处理电路(14)附近被采样, 。 传感器(10)包括由不重掺杂的半导体材料形成的框架(18),并且支撑有隔膜(16)。 隔膜(16)具有用于接收热(例如,红外线)辐射的第一表面,并且包括包含至少一对隔行热电堆(22)的感测层的多个层。 每个热电堆(22)包括一系列热电偶(24),每个热电偶(24)包括不同的电阻材料,其限定位于隔膜(16)上的热接点(26)和位于框架上的冷接点(28) 18)。 信号处理电路(14)位于框架(18)上并与热电堆(22)电互连。 热电堆(22)交错,使得其中一个热电堆(22)的输出随着热连接点(26,28)之间温差的增加而增加,而第二热电堆(22)的输出随着增加 其热连接点之间的温差(26,28)。
    • 2. 发明公开
    • Sealed engine control module with integral ambient air pressure sensor
    • Versegeltes Motorsteuerungsmodul mit intregriertem Umgebungsluftdrucksensor
    • EP2365308A2
    • 2011-09-14
    • EP11152364.3
    • 2011-01-27
    • Delphi Technologies, Inc.
    • Borzabadi, Hamid R.Wilcox, Ronald D.Kuznia, Philip D.Vas, Timothy A.Little, Lewis HenryMiller, David G.
    • G01L9/00
    • G01L19/0654G01L19/147
    • An engine control module (10) having an environmentally-sealed housing (12, 12a) includes a housing-mounted air pressure sensor (18) for providing a reliable measure of atmospheric air pressure to a control circuit (14a) mounted within the housing (12, 12a). The sensor (18) is mounted on an inboard face of the housing (12a), and includes a sensor element (18a), a body portion (18b) and a riser portion (18c). The sensor element (18a) is mounted in the body portion (18b), and the riser portion (18c) protrudes through an opening (20) in the housing (12a) to couple the sensor element (18a) to atmospheric pressure outside the housing (12, 12a). The body portion (18b) is sealingly secured to the inboard face of the housing (12a), and a set of conductor pins (26) molded into the body portion (18b) extend inward to engage a circuit board (14) enclosed by the housing (12, 12a), and thereby directly couple the sensor element (18a) to the ECM's control circuit (14a). The top of the riser portion (18c) is capped by a splash-proof lid (24) to prevent water intrusion.
    • 具有环境密封的壳体(12,12a)的发动机控制模块(10)包括壳体安装的空气压力传感器(18),用于向安装在壳体内的控制电路(14a)提供可靠的大气压力测量值 12,12a)。 传感器(18)安装在壳体(12a)的内侧面上,并包括传感器元件(18a),主体部分(18b)和立管部分(18c)。 传感器元件(18a)安装在主体部分(18b)中,并且提升部分(18c)通过壳体(12a)中的开口(20)突出,以将传感器元件(18a)耦合到壳体外部的大气压力 (12,12a)。 主体部分(18b)密封地固定在壳体(12a)的内侧面上,并且一组模制到主体部分(18b)中的导体销(26)向内延伸以与电路板(14)包围 壳体(12,12a),从而将传感器元件(18a)直接耦合到ECM的控制电路(14a)。 提升部分(18c)的顶部由防溅盖(24)盖住以防止水侵入。
    • 7. 发明公开
    • Integrated pressure sensor and method of manufacture
    • Integrierter Drucksensor和Herstellungsverfahren
    • EP1677089A1
    • 2006-07-05
    • EP05077861.2
    • 2005-12-12
    • Delphi Technologies, Inc.
    • Borzabadi, Hamid R.Koglin, Dennis M.Long, Stephen P.Vas, Timothy A.
    • G01L19/04G01L9/00
    • G01L9/0051G01L9/045G01L19/069
    • A technique for manufacturing an integrated pressure sensor (150) includes a number of steps. Initially, a substrate (200) with conductive electrical traces located on first and second sides of the substrate (200) is provided. A plurality of compensation circuits (100) are positioned in an array on the first side of the substrate (200) in electrical contact with one or more of the conductive electrical traces on the first side of the substrate (200). A plurality of pressure sensors (10) are positioned on the second side of the substrate (200) in electrical contact with one or more of the conductive electrical traces on the second side of the substrate (200). Each one of the sensors (10) is associated with one of the compensation circuits (100) to form a plurality of pressure sensor-compensation circuit pairs. The substrate (200) includes conductive vias to electrically connect each of the sensor-compensation circuit pairs. Each of the compensation circuits (100) provides temperature compensation for an associated one of the sensors (10). The sensor-compensation circuit pairs are calibrated and singulated for final packaging.
    • 一种用于制造集成压力传感器(150)的技术包括多个步骤。 首先,提供具有位于衬底(200)的第一和第二侧上的导电电迹线的衬底(200)。 多个补偿电路(100)以与衬底(200)的第一侧上的一个或多个导电电迹线电接触的方式位于衬底(200)的第一侧上的阵列中。 多个压力传感器(10)位于基板(200)的第二侧上,与基板(200)的第二侧上的一个或多个导电电迹线电接触。 传感器(10)中的每一个与补偿电路(100)中的一个相关联,以形成多个压力传感器 - 补偿电路对。 衬底(200)包括用于电连接传感器 - 补偿电路对中的每一个的导电通路。 每个补偿电路(100)为相关联的一个传感器(10)提供温度补偿。 对传感器补偿电路对进行校准和分组,以进行最终的封装。