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1. 发明公开

EP2463667A2 Flexible probe 审中-公开
标题翻译：灵活探头
公开(公告)号：EP2463667A2
公开(公告)日：2012-06-13
申请号：EP12154496.9
申请日：2005-06-21
申请人： Capres A/S
发明人： Nielsen, Folmer , Petersen, Peter R.E. , Hansen, Jesper Erdman
IPC分类号： G01R1/067 , G01R1/073 , G01R3/00 , G01R31/28 , G01C17/28
CPC分类号： G01R1/07392 , G01R1/06727 , G01R3/00 , G01R31/2887 , Y10T29/49204 , Y10T29/49222
摘要： A probe for testing electric properties on a specific location of a test sample, comprises a supporting body defining opposite first and second parts constituting a flexible cantilever part being flexible in one direction and a base part, respectively. The cantilever part defines an outer planar surface substantially perpendicular to the one direction, the base part being adapted for being fixated in a co-operating testing machine The probe further comprises at least one conductive probe arm in the cantilever part being positioned opposite the base part. The cantilever part defines opposite first and second regions, the second region being in contact with the base part, the first region defining first and second side surfaces, each of the first and second side surfaces defining a first angle with the outer planar surface, a first width defined between the first and the second side surfaces, the second region defining third and fourth side surfaces, each of the third and fourth side surfaces defining a second angle with the outer planar surface, a second width defined between the third and the fourth side surfaces, and the second width being equal to and/or smaller than the first width.
摘要翻译：用于测试在测试样品的特定位置上的电性能的探针包括支撑体，其分别形成相对的第一和第二部分，构成在一个方向上柔性的柔性悬臂部分和基部。所述悬臂部分限定基本上垂直于所述一个方向的外平面表面，所述基部适于固定在协同操作的测试机中。所述探针还包括所述悬臂部分中的与所述基部相对定位的至少一个导电探针臂。所述悬臂部分限定相对的第一和第二区域，所述第二区域与所述基部接触，所述第一区域限定第一和第二侧表面，所述第一和第二侧表面中的每一个与所述外平面表面形成第一角度，限定在所述第一和第二侧表面之间的第一宽度，所述第二区域限定第三和第四侧表面，所述第三和第四侧表面中的每一个与所述外平坦表面限定第二角度，第二宽度限定在所述第三和第四侧表面之间并且第二宽度等于和/或小于第一宽度。

2. 发明公开

EP2463668A2 A method and an apparatus for testing electrical properties 审中-公开
标题翻译： Verfahren und Vorrichtung zum Testen elektrischer Eigenschaften
公开(公告)号：EP2463668A2
公开(公告)日：2012-06-13
申请号：EP12154515.6
申请日：2005-06-21
申请人： Capres A/S
发明人： Nielsen, Peter Folmer , Petersen, Peter R.E. , Hansen, Jesper Erdman
IPC分类号： G01R1/067
CPC分类号： G01R1/07392 , G01R1/06727 , G01R3/00 , G01R31/2887
摘要： A method for testing electrical properties comprises providing a test sample defining a first surface, an area defined on the first surface, providing a first test probe comprising a first plurality of probe arms each including at least one electrode for contacting a respective location on the test sample and a second test probe comprising at least one probe arm including at least one electrode for contacting a location on the test sample. The method further comprises providing a test apparatus including a first and a second holder for receiving the first and the second test probes respectively, each of the holders comprising positioning devices for positioning and/or relocating each of the holders in three dimensions, the test apparatus being electrically connected to each of the electrodes of the first test probe and to the at least one electrode of the second test probe, the test apparatus further comprising a sample holder for receiving and holding the test sample in a specific orientation relative to the first and the second test probe. Still further the method comprises positioning the electrodes of the probe arms of the first test probe in contact with the area, positioning the at least one electrode of the at least one probe arm of the second test probe in contact with the area at a location remote from the first test probe, transmitting a test signal from at least one of the electrodes of the first test probe, or, in the alternative from the at least one electrode of the second test probe, and detecting the test signal transmission between the first and the second test probe.
摘要翻译：一种用于测试电气特性的方法包括提供限定第一表面的测试样品，在第一表面上限定的区域，提供包括第一多个探针臂的第一测试探针，每个探针臂包括用于接触测试中相应位置的至少一个电极样品和第二测试探针，其包括至少一个探针臂，所述探针臂包括用于接触测试样品上的位置的至少一个电极。该方法还包括提供一种测试装置，包括分别用于接收第一和第二测试探针的第一和第二保持器，每个保持器包括用于在三个维度上定位和/或重新定位每个保持器的定位装置，测试装置电连接到第一测试探针的每个电极和第二测试探针的至少一个电极，测试装置还包括用于相对于第一测试探针以特定取向接收和保持测试样本的样本保持器，第二个测试探针。此外，该方法包括将第一测试探针的探针臂的电极定位成与该区域接触，将第二测试探针的至少一个探针臂的至少一个电极定位在远程位置处的区域从所述第一测试探针传输来自所述第一测试探针的至少一个电极的测试信号，或者可选地，从所述第二测试探针的所述至少一个电极中检测所述第一和第二测试探针之间的测试信号传输，第二个测试探针。

3. 发明公开

EP1610131A1 Flexible probe 审中-公开
标题翻译：灵活探头
公开(公告)号：EP1610131A1
公开(公告)日：2005-12-28
申请号：EP04388039.2
申请日：2004-06-21
申请人： Capres A/S
发明人： Petersen, Peter Rasmus Ebsen , Hansen, Jesper Erdman , Nielsen, Peter Folmer
IPC分类号： G01R1/067
CPC分类号： G01R27/2676
摘要： A probe for testing electric properties on a specific location of a test sample, comprises a supporting body defining opposite first and second parts constituting a flexible cantilever part being flexible in one direction and a base part, respectively. The cantilever part defines an outer planar surface substantially perpendicular to the one direction, the base part being adapted for being fixated in a co-operating testing machine. The probe further comprises at least one conductive probe arm in the cantilever part being positioned opposite the base part. The cantilever part defines opposite first and second regions, the second region being in contact with the base part, the first region defining first and second side surfaces, each of the first and second side surfaces defining a first angle with the outer planar surface, a first width defined between the first and the second side surfaces, the second region defining third and fourth side surfaces, each of the third and fourth side surfaces defining a second angle with the outer planar surface, a second width defined between the third and the fourth side surfaces, and the second width being equal to and/or smaller than the first width.
摘要翻译：用于测试在测试样品的特定位置上的电性能的探针包括支撑体，其分别形成相对的第一和第二部分，构成在一个方向上柔性的柔性悬臂部分和基部。所述悬臂部分限定了基本垂直于所述一个方向的外平面表面，所述基部适于固定在协同试验机中。所述探头还包括所述悬臂部分中的至少一个导电探针臂，所述至少一个导电探针臂与所述基座部分相对定位。所述悬臂部分限定相对的第一和第二区域，所述第二区域与所述基部接触，所述第一区域限定第一和第二侧表面，所述第一和第二侧表面中的每一个与所述外平面表面形成第一角度，限定在所述第一和第二侧表面之间的第一宽度，所述第二区域限定第三和第四侧表面，所述第三和第四侧表面中的每一个与所述外平坦表面限定第二角度，第二宽度限定在所述第三和第四侧表面之间并且第二宽度等于和/或小于第一宽度。

4. 发明公开

EP2463667A3 Flexible probe 审中-公开
标题翻译：柔性探头
公开(公告)号：EP2463667A3
公开(公告)日：2015-07-29
申请号：EP12154496.9
申请日：2005-06-21
申请人： Capres A/S
发明人： Nielsen, Folmer , Petersen, Peter R.E. , Hansen, Jesper Erdman
IPC分类号： G01R1/067 , G01R1/073 , G01R3/00 , G01R31/28 , G01C17/28
CPC分类号： G01R1/07392 , G01R1/06727 , G01R3/00 , G01R31/2887 , Y10T29/49204 , Y10T29/49222
摘要： A probe for testing electric properties on a specific location of a test sample, comprises a supporting body defining opposite first and second parts constituting a flexible cantilever part being flexible in one direction and a base part, respectively. The cantilever part defines an outer planar surface substantially perpendicular to the one direction, the base part being adapted for being fixated in a co-operating testing machine The probe further comprises at least one conductive probe arm in the cantilever part being positioned opposite the base part. The cantilever part defines opposite first and second regions, the second region being in contact with the base part, the first region defining first and second side surfaces, each of the first and second side surfaces defining a first angle with the outer planar surface, a first width defined between the first and the second side surfaces, the second region defining third and fourth side surfaces, each of the third and fourth side surfaces defining a second angle with the outer planar surface, a second width defined between the third and the fourth side surfaces, and the second width being equal to and/or smaller than the first width.

5. 发明公开

EP1640730A1 A method for providing alignment of a probe 审中-公开
标题翻译： Verfahren zur Ausrichtung einer Sonde。
公开(公告)号：EP1640730A1
公开(公告)日：2006-03-29
申请号：EP04388065.7
申请日：2004-09-28
申请人： Capres A/S
发明人： Nielsen, Peter Folmer , Hansen, Jesper Erdman , Petersen, Peter Rasmus Ebsen
IPC分类号： G01R3/00
CPC分类号： G01R3/00 , G01R1/06711
摘要： A method for providing alignment of a probe relative to a supporting substrate, comprises the steps of providing the supporting substrate defining a planar surface and an edge, the substrate further defining a first crystal plane, providing a first mask at the surface of the supporting substrate, the first mask defining a first exposed area on the surface at the edge, and providing a specific etch reagent, a recess formed by the etch reagent etching the first exposed area, the recess defining a first sidewall an opposing second sidewall, an end wall remote from the edge, and a bottom wall. The method further comprises providing a probe substrate defining a planar surface and a second crystal plane identical to the first crystal plane and positioning the probe substrate so that the first and the second crystal planes are positioned identically when forming the probe from the probe substrate using the specific etch reagent, the probe defines congruent surfaces to the first sidewall and the second sidewall.
摘要翻译：一种用于提供探针相对于支撑衬底的对准的方法，包括以下步骤：提供限定平坦表面和边缘的支撑衬底，所述衬底还限定第一晶体平面，在支撑衬底的表面处提供第一掩模，所述第一掩模在所述边缘处在所述表面上限定第一暴露区域，并且提供特定的蚀刻试剂，由所述蚀刻试剂蚀刻所述第一暴露区域形成的凹部，所述凹部限定第一侧壁和相对的第二侧壁，远离边缘，还有一个底壁。该方法还包括提供限定平面表面的探针衬底和与第一晶面相同的第二晶面并定位探针衬底，使得当使用该探针衬底从探针衬底形成探针时，第一和第二晶面位置相同探针限定了与第一侧壁和第二侧壁相同的一致表面。

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