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    • 1. 发明公开
    • ULTRASONIC MOTOR WITH ANNULAR PIEZOELECTRIC VIBRATOR FOR OPTICAL APPARATUS
    • 带环形压电振子的超声波电机在光学仪器中的应用
    • EP3174191A1
    • 2017-05-31
    • EP16002384.2
    • 2016-11-11
    • Canon Kabushiki Kaisha
    • Uebayashi, AkiraFuruta, TatsuoUeda, MikiTanaka, HidenoriKoyama, ShinyaMiura, KaoruKimura, AtsushiFujita, Satoshi
    • H02N2/16H01L41/187G02B7/10
    • H02N2/04G02B7/08G02B7/102H01L41/1871H02N2/062H02N2/163
    • Provided is an ultrasonic motor including an annular vibrator and an annular moving member that is brought into pressure-contact with the vibrator. The vibrator includes an annular vibrating plate and an annular piezoelectric element. The piezoelectric element includes an annular lead-free piezoelectric ceramic piece, a common electrode arranged on one surface of the piezoelectric ceramic piece, and a plurality of electrodes arranged on the other surface of the piezoelectric ceramic piece. The plurality of electrodes include two drive phase electrodes, one or more non-drive phase electrodes, and one or more detection phase electrodes. A second surface of the vibrating plate includes a plurality of groove regions extending radially, and the depths of the groove regions change in a circumferential direction along a curve obtained by superimposing one or more sine waves on one another. The ultrasonic motor exhibits a sufficient drive speed while suppressing generation of an unnecessary vibration wave.
    • 本发明提供一种超声波马达,该超声波马达具备环状的振子以及与该振子压接的环状的移动部件。 振动器包括环形振动板和环形压电元件。 压电元件包括​​环形无铅压电陶瓷片,布置在压电陶瓷片的一个表面上的公共电极以及布置在压电陶瓷片的另一个表面上的多个电极。 多个电极包括两个驱动相电极,一个或多个非驱动相电极以及一个或多个检测相电极。 振动板的第二表面包括多个径向延伸的凹槽区域,并且凹槽区域的深度沿着通过将一个或多个正弦波彼此叠加而获得的曲线在圆周方向上改变。 超声波马达在抑制不必要的振动波的产生的同时表现出足够的驱动速度。