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1. 发明公开

EP3022523A1 OPTICAL APPARATUS AND METHODS 审中-公开
标题翻译：光学设备和方法
公开(公告)号：EP3022523A1
公开(公告)日：2016-05-25
申请号：EP14753110.7
申请日：2014-07-17
申请人： Cambridge Consultants Limited
发明人： JONES, Robert , NEWMAN, Alfred , BROCK, Martin , GRIFFITHS, Dean, Stuart
IPC分类号： G01B9/02
CPC分类号： G01B9/02094 , G01B9/02098
摘要： Optical apparatus for measuring characteristics of a measurement target comprising an illumination portion, detection portion and processing portion. The illumination portion produces at least one pair of spatially separated areas of illumination for illuminating a measurement target to produce an associated light field. The light field produced by illumination of the measurement target comprises a component corresponding to interference between the areas of illumination, illuminates a first site on the measurement target and illuminates a second site on the measurement target. The detection portion receives light from the measurement target, directs the received light onto a detector, outputs signals from the detector dependent on the intensity of the detected light. The processing portion analyses the signals output by the detecting means to measure the characteristics of the measurement target.
摘要翻译：用于测量包括照明部分，检测部分和处理部分的测量目标的特性的光学设备。照明部分产生至少一对空间分离的照明区域以照亮测量目标以产生相关联的光场。通过照射测量目标而产生的光场包括与照射区域之间的干涉相对应的分量，照射测量目标上的第一部位并照射测量目标上的第二部位。检测部分接收来自测量目标的光，将接收到的光引导到检测器上，根据检测到的光的强度从检测器输出信号。处理部分分析由检测装置输出的信号以测量测量目标的特性。

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