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1. 发明公开

EP1835345A3 Photosensitive silane coupling agent, method of modifying surface, method of forming pattern, and method of fabricating device 有权
标题翻译：感光硅烷偶联剂，用于图案形成和用于生产的设备的表面改性方法的工艺
公开(公告)号：EP1835345A3
公开(公告)日：2011-05-18
申请号：EP07102685.0
申请日：2007-02-20
申请人： CANON KABUSHIKI KAISHA
发明人： Ito, Toshiki , Mizutani, Natsuhiko , Yamaguchi, Takako , Inao, Yasuhisa
IPC分类号： G03F7/075
CPC分类号： G03F7/0755 , C07F7/12 , C07F7/1836 , G03F7/022 , G03F7/0751 , G03F7/165
摘要： Provided are a photosensitive silane coupling agent for forming a low-defect microparticle pattern, dot array pattern, or hole array pattern through fewer steps, and a method of forming a pattern using such photosensitive silane coupling agent. Used is a photosensitive silane coupling agent comprising a 1,2-naphthoquinone-2-diazido-5-sulfonyl group or a 1,2-naphthoquinone-2-diazido-4-sulfonyl group.

2. 发明授权

EP0784366B1 Optical semiconductor apparatus, fabrication method thereof, modulation method therefor, light source apparatus and optical communication system or method using the same 失效
标题翻译：一种光学半导体器件，生产过程中，调制处理，光源和光通信系统或方法，用于制备它们的
公开(公告)号：EP0784366B1
公开(公告)日：2000-04-26
申请号：EP97100259.7
申请日：1997-01-09
申请人： CANON KABUSHIKI KAISHA
发明人： Mizutani, Natsuhiko , Miyazawa, Seiichi
IPC分类号： H01S5/06 , H01S5/32 , H04B10/14
CPC分类号： B82Y20/00 , H01S5/06236 , H01S5/0625 , H01S5/3404 , H01S2301/14

3. 发明公开

EP0735635A3 Optical semiconductor apparatus, driving method therefor, light source apparatus and optical communication system using the same 失效
标题翻译：的光半导体装置的驱动方法和光通信系统
公开(公告)号：EP0735635A3
公开(公告)日：1997-11-19
申请号：EP96105090.3
申请日：1996-03-29
申请人： CANON KABUSHIKI KAISHA
发明人： Mizutani, Natsuhiko , Sakata, Hajime , Furukawa, Yukio
IPC分类号： H01S3/103 , H01S3/085 , H01S3/19 , H04B10/14
CPC分类号： B82Y20/00 , H01S5/06203 , H01S5/06236 , H01S5/0625 , H01S5/1057 , H01S5/106 , H01S5/1064 , H01S5/12 , H01S5/1215 , H01S5/1225 , H01S5/124 , H01S5/204 , H01S5/227 , H01S5/2275 , H01S5/3201 , H01S5/3404 , H01S5/3413 , H01S5/34306 , H01S5/3434 , H01S5/5009 , H01S5/5018 , H01S2301/14
摘要： An optical semiconductor apparatus includes at least two semiconductor laser portions (11, 12; 21, 22; 31, 32; 41, 42; 51, 52; 61, 62; 71, 72; 81, 82; 2011, 2013) each having a light waveguide with an active layer (35, 45, 105, 503, 513, 605, 703, 714, 803, 1015, 1215, 2105, 2303, 2703, 2714, 2724) and a distributed reflector (33, 43, 102, 505, 515, 603, 705, 716, 806, 1039, 1139, 2102, 2305, 2705), and a stimulating unit (113, 114, 115; 1035, 1037; 2109, 2110; 2308, 2309; 2708, 2709) for independently stimulating the active layers of the light waveguides. The semiconductor laser portions are serially arranged in a light propagation direction. The light waveguides are constructed such that a difference between propagation constants for two different polarization modes in one of the waveguides is different from a difference between propagation constants for the two different polarization modes in the other of the waveguides. When one of injection of a modulation current signal into or application of a mudulation voltage to the optical semiconductor apparatus, an oscillation state can be switched between a state in which Bragg wavelengths for one of the two different polarization modes coincide with each other between the light waveguides and a state in which Bragg wavelengths for the other of the two different polarization modes coincide with each other between the light waveguides.
摘要翻译：的光半导体装置包括至少两个半导体激光器的部分（11，12; 21，22; 31，32; 41，42; 51，52; 61，62; 71，72; 81，82; 2011，2013）每一个都具有一个光波导用反射有源层上（35，45，105，503，513，605，703，714，803，1015，1215，2105，2303，2703，2714，2724）和分布式（33，43，102 ，505，515，603，705，716，806，1039，1139，2102，2305，2705），和刺激单元（113，114，115; 1035，1037; 2109，2110; 2308，2309; 2708，2709 ）为unabhängig刺激光波导的活性层。的半导体激光器的部分在光的传播方向串联布置。光波导构造搜索做传播常数之间的差在波导中的一个是从在其它波导的两个不同偏振模式的传播常数之间的差不同的两个不同的偏振模式。当注入的调制电流信号的进入或mudulation电压到光半导体装置的振荡状态的应用中的一个可在其中布拉格波长的状态之间，用于在两个不同的偏振模式之一切换彼此的光之间重合波导和用于所述两个不同偏振模式，其中布拉格波长的状态下彼此的光波导之间一致。

4. 发明公开

EP0735635A2 Optical semiconductor apparatus, driving method therefor, light source apparatus and optical communication system using the same 失效
标题翻译：的光半导体装置的驱动方法和光通信系统
公开(公告)号：EP0735635A2
公开(公告)日：1996-10-02
申请号：EP96105090.3
申请日：1996-03-29
申请人： CANON KABUSHIKI KAISHA
发明人： Mizutani, Natsuhiko , Sakata, Hajime , Furukawa, Yukio
IPC分类号： H01S3/103 , H01S3/085 , H01S3/19 , H04B10/14
CPC分类号： B82Y20/00 , H01S5/06203 , H01S5/06236 , H01S5/0625 , H01S5/1057 , H01S5/106 , H01S5/1064 , H01S5/12 , H01S5/1215 , H01S5/1225 , H01S5/124 , H01S5/204 , H01S5/227 , H01S5/2275 , H01S5/3201 , H01S5/3404 , H01S5/3413 , H01S5/34306 , H01S5/3434 , H01S5/5009 , H01S5/5018 , H01S2301/14
摘要： An optical semiconductor apparatus includes at least two semiconductor laser portions (11, 12; 21, 22; 31, 32; 41, 42; 51, 52; 61, 62; 71, 72; 81, 82; 2011, 2013) each having a light waveguide with an active layer (35, 45, 105, 503, 513, 605, 703, 714, 803, 1015, 1215, 2105, 2303, 2703, 2714, 2724) and a distributed reflector (33, 43, 102, 505, 515, 603, 705, 716, 806, 1039, 1139, 2102, 2305, 2705), and a stimulating unit (113, 114, 115; 1035, 1037; 2109, 2110; 2308, 2309; 2708, 2709) for independently stimulating the active layers of the light waveguides. The semiconductor laser portions are serially arranged in a light propagation direction. The light waveguides are constructed such that a difference between propagation constants for two different polarization modes in one of the waveguides is different from a difference between propagation constants for the two different polarization modes in the other of the waveguides. When one of injection of a modulation current signal into or application of a mudulation voltage to the optical semiconductor apparatus, an oscillation state can be switched between a state in which Bragg wavelengths for one of the two different polarization modes coincide with each other between the light waveguides and a state in which Bragg wavelengths for the other of the two different polarization modes coincide with each other between the light waveguides.

5. 发明公开

EP1835345A2 Photosensitive silane coupling agent, method of modifying surface, method of forming pattern, and method of fabricating device 有权
标题翻译：感光硅烷偶联剂，用于形成微粒图案和所述硅烷偶联剂的使用的表面改性方法的工艺
公开(公告)号：EP1835345A2
公开(公告)日：2007-09-19
申请号：EP07102685.0
申请日：2007-02-20
申请人： CANON KABUSHIKI KAISHA
发明人： Ito, Toshiki , Mizutani, Natsuhiko , Yamaguchi, Takako , Inao, Yasuhisa
IPC分类号： G03F7/075
CPC分类号： G03F7/0755 , C07F7/12 , C07F7/1836 , G03F7/022 , G03F7/0751 , G03F7/165
摘要： Provided are a photosensitive silane coupling agent for forming a low-defect microparticle pattern, dot array pattern, or hole array pattern through fewer steps, and a method of forming a pattern using such photosensitive silane coupling agent. Used is a photosensitive silane coupling agent comprising a 1,2-naphthoquinone-2-diazido-5-sulfonyl group or a 1,2-naphthoquinone-2-diazido-4-sulfonyl group.
摘要翻译：本发明提供用于形成低缺陷的微粒图案，点阵排列图案，或通过更少的步骤孔阵列图案的光敏硅烷偶联剂，以及使用搜索光敏硅烷偶联剂的图案的方法。采用的是包含1,2-萘醌-2-二叠氮基-5-磺酰基或1,2-萘醌-2-二叠氮-4-磺酰基的感光硅烷偶联剂。

6. 发明公开

EP0663710A2 Optical semiconductor device and method for producing the same 失效
标题翻译： Optische Halbleitervorrichtung und Herstellungsverfahren。
公开(公告)号：EP0663710A2
公开(公告)日：1995-07-19
申请号：EP95100496.9
申请日：1995-01-16
申请人： CANON KABUSHIKI KAISHA
发明人： Mizutani, Natsuhiko
IPC分类号： G02F1/15 , H01S3/19 , H01S3/103
CPC分类号： H01L33/24 , H01L33/18 , H01S5/0424 , H01S5/3081 , Y10S438/915
摘要： 5n7 An optical semiconductor device includes a plurality of electrodes formed on a common side of a substrate. The device is fabricated without using a heat treatment process. On the substrate, a first type conductivity layer, a first main layer such as an active layer, whcih has any one of an undoped type, a first type conductivity and a second type conductivity, and a second type conductivity layer are formed in this order. The layers down to at least the second type conductivity layer are removed to form a ridge and at least one contact groove, which reaches the first type conductivity layer, is formed, such that surfaces having different surface indices from a surface index of the substrate are exposed at the ridge and the contact groove. A regrowth is performed on the exposed surfaces using an amphi-conductivity impurity as a dopant, such that a first portion having a first type conductivity is grown on the contact groove and a second portion having a second type conductivity is grown on the ridge. At least one transverse pn reverse junction portion is also formed during the regrowth performing step. The first type conductivity layer and the first portion act as a current injection path or first means for applying an electric field to the first main layer, and the second type conductivity layer and the second portion act as another current injection path or second means for applying an electric field to the first main layer which cooperates with the first means. The transverse pn reverse junction portion electrically separates the current injection path or the first means from the another current injection path or the second means.
摘要翻译：光学半导体器件包括形成在基板的共同侧上的多个电极。该装置是在不使用热处理工艺的情况下制造的。在基板上，以该顺序形成第一导电层，第一主层，例如有源层，具有未掺杂型，第一导电型和第二导电型中的任一种，第二导电层，。去除至少第二类型导电层的层以形成脊，形成到达第一类型导电层的至少一个接触槽，使得具有与衬底的表面折射率不同的表面指数的表面是暴露在脊和接触槽处。在暴露的表面上使用amphi-导电杂质作为掺杂剂进行再生长，使得在接触槽上生长具有第一类型电导率的第一部分，并且在脊上生长具有第二类型导电性的第二部分。在再生长执行步骤期间还形成至少一个横向pn反向连接部分。第一类型导电层和第一部分充当电流注入路径或用于向第一主层施加电场的第一装置，并且第二类型导电层和第二部分作为另一电流注入路径或第二装置施加与第一装置配合的第一主层的电场。横向pn反向连接部分将电流注入路径或第一装置与另一个电流注入路径或第二装置电气分离。

7. 发明授权

EP1835345B1 Photosensitive silane coupling agent, method of modifying surface, method of forming a microparticle pattern, and uses of the silane coupling agent 有权
标题翻译：感光硅烷偶联剂，用于形成微粒图案和所述硅烷偶联剂的使用的表面改性方法的工艺
公开(公告)号：EP1835345B1
公开(公告)日：2014-07-16
申请号：EP07102685.0
申请日：2007-02-20
申请人： CANON KABUSHIKI KAISHA
发明人： Ito, Toshiki , Mizutani, Natsuhiko , Yamaguchi, Takako , Inao, Yasuhisa
IPC分类号： C07F7/12 , C07F7/18 , G03F7/022 , G03F7/16 , G03F7/075
CPC分类号： G03F7/0755 , C07F7/12 , C07F7/1836 , G03F7/022 , G03F7/0751 , G03F7/165

8. 发明授权

EP0921615B1 Distributed feedback semiconductor laser in which light intensity distributions differ in different polarization modes, and driving method therefor 有权
标题翻译：半导体激光器与分布反馈和不同偏振模式的不同的光强度分布和相关的驱动
公开(公告)号：EP0921615B1
公开(公告)日：2002-11-13
申请号：EP98122892.7
申请日：1998-12-02
申请人： CANON KABUSHIKI KAISHA
发明人： Nitta, Jun , Mizutani, Natsuhiko
IPC分类号： H01S5/12 , H01S5/0625 , H04B10/14
CPC分类号： H04B10/503 , B82Y20/00 , H01S5/06236 , H01S5/0625 , H01S5/06258 , H01S5/12 , H01S5/3201 , H01S5/3216 , H01S5/3404 , H01S5/3409 , H01S2301/14

9. 发明授权

EP0735635B1 Optical semiconductor apparatus, driving method therefor, light source apparatus and optical communication system using the same 失效
标题翻译：的光半导体装置的驱动方法和光通信系统
公开(公告)号：EP0735635B1
公开(公告)日：2000-08-02
申请号：EP96105090.3
申请日：1996-03-29
申请人： CANON KABUSHIKI KAISHA
发明人： Mizutani, Natsuhiko , Sakata, Hajime , Furukawa, Yukio
IPC分类号： H01S5/06 , H01S5/10 , H01S5/32 , H04B10/14
CPC分类号： B82Y20/00 , H01S5/06203 , H01S5/06236 , H01S5/0625 , H01S5/1057 , H01S5/106 , H01S5/1064 , H01S5/12 , H01S5/1215 , H01S5/1225 , H01S5/124 , H01S5/204 , H01S5/227 , H01S5/2275 , H01S5/3201 , H01S5/3404 , H01S5/3413 , H01S5/34306 , H01S5/3434 , H01S5/5009 , H01S5/5018 , H01S2301/14

10. 发明公开

EP0921615A1 Distributed feedback semiconductor laser in which light intensity distributions differ in different polarization modes, and driving method therefor 有权
标题翻译：半导体激光器与分布反馈和不同偏振模式的不同的光强度分布和相关的驱动
公开(公告)号：EP0921615A1
公开(公告)日：1999-06-09
申请号：EP98122892.7
申请日：1998-12-02
申请人： CANON KABUSHIKI KAISHA
发明人： Nitta, Jun , Mizutani, Natsuhiko
IPC分类号： H01S3/085 , H01S3/103 , H04B10/14
CPC分类号： H04B10/503 , B82Y20/00 , H01S5/06236 , H01S5/0625 , H01S5/06258 , H01S5/12 , H01S5/3201 , H01S5/3216 , H01S5/3404 , H01S5/3409 , H01S2301/14
摘要： A distributed feedback semiconductor laser includes a cavity extending in a cavity-axial direction. The cavity has a plurality of regions including a first region (110, 210, 311, 451 and 561) and a second region (111, 211, 312, 452 and 562) arranged along the cavity-axial direction and capable of being independently pumped. The laser further includes a plurality of waveguides with a diffraction grating (101a, 201a, 315, 411 and 511) and an active layer (103, 203, 303, 403 and 432) extending along the cavity-axial direction. The waveguides are formed in the regions, respectively, and coupled to each other along the cavity-axial direction. Different first and second polatization modes are defined by the coupled waveguides. The waveguides are constructed such that light intensity distributions along the cavity-axial direction in the first and second regions when pumped are different between the first and second polarization modes.
摘要翻译：分布式反馈半导体激光器包括腔体中的腔体轴方向上延伸。该空腔具有包括沿着空腔轴方向排列并能够被unabhängig泵送的第一区域（110，210，311，451和561）和第二区域（111，211，312，452和562）的区域的多元性，激光进一步包括波导的具有衍射光栅（101A，201A，315，411和511）和沿着腔轴方向上延伸有源层（103，203，303，403和432）上的多个。所述波导是形成在各区域，分别与沿腔轴方向彼此耦接。不同的第一和第二polatization模式由耦合波导限定。该波导被构造寻求沿着在第一和第二区域中的空腔轴方向轻微强度分布当泵浦是在第一和第二偏振模之间不同。

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