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1. 发明公开

EP0786305A1 Laser processing apparatus and method for manufacturing a liquid jet recording head by use of such laser processing apparatus 失效
标题翻译：对于由这样的激光加工装置的图的手段制造液体喷射头的激光加工的装置和方法
公开(公告)号：EP0786305A1
公开(公告)日：1997-07-30
申请号：EP97101036.8
申请日：1997-01-23
申请人： CANON KABUSHIKI KAISHA
发明人： Hasegawa, Toshinori , Goto, Akira , Ishimatsu, Shin
IPC分类号： B23K26/06 , B41J2/16
CPC分类号： B41J2/1634 , B23K26/06 , B23K26/064 , B23K26/0648 , B23K26/066 , B23K26/067 , B23K26/16 , B23K26/364 , B23K26/389 , B41J2/162 , B41J2/1637
摘要： A laser processing apparatus is provided with a light source to generate laser beam, a lens to guide laser beam to a predetermined portion of a blank that becomes a structural member of a liquid jet recording head, a split prism arranged on the optical path between the light source and the lens. This laser processing apparatus is arranged to further comprise a rotary mechanism capable of rotating the lens centering on the optical axis of the laser beam. With the structure thus arranged, it is possible to prevent the lens from being locally damaged by the irradiation of laser beam, thus making the life of the lens longer, while reducing the frequency of lens replacements. This arrangement leads to the implementation of a significant reduction of maintenance costs of the apparatus, as well as to the simplified manufacture of a liquid jet recording head at lower costs.
摘要翻译：一种激光加工装置设置有光源以产生激光束，透镜的激光束引导到的坯件的预定部分做成为液体喷射记录头的一个结构件，一个分离棱镜布置在之间的光学路径上光源和透镜。此激光加工装置被设置つweiterer包括能够在透镜上的激光束的光轴为中心旋转的旋转机构。通过该结构这样设置，能够防止由于激光束的照射而局部损坏的透镜，从而使透镜较长的寿命，同时减少透镜更换的频率。这种布置导致一个显著减少的装置的维护费用的实施，以及一种液体喷射记录头的简化制造成本更低。

2. 发明授权

EP0786305B1 Laser processing apparatus and method for manufacturing a liquid jet recording head by use of such laser processing apparatus 失效
标题翻译：使用这样的激光加工装置的制造喷液记录头的激光加工的装置和方法
公开(公告)号：EP0786305B1
公开(公告)日：2003-05-21
申请号：EP97101036.8
申请日：1997-01-23
申请人： CANON KABUSHIKI KAISHA
发明人： Hasegawa, Toshinori , Goto, Akira , Ishimatsu, Shin
IPC分类号： B23K26/06 , B41J2/16
CPC分类号： B41J2/1634 , B23K26/06 , B23K26/064 , B23K26/0648 , B23K26/066 , B23K26/067 , B23K26/16 , B23K26/364 , B23K26/389 , B41J2/162 , B41J2/1637

3. 发明授权

EP0836906B1 A laser processing system and a system for manufacturing ink jet recording heads 失效
标题翻译：一种激光处理装置和用于制造喷墨打印头的系统
公开(公告)号：EP0836906B1
公开(公告)日：2004-12-29
申请号：EP97117881.9
申请日：1997-10-15
申请人： CANON KABUSHIKI KAISHA
发明人： Ishimatsu, Shin , Inaba, Masaki , Abe, Tsutomu , Goto, Akira , Furukawa, Masao , Omata, Kouichi , Hasegawa, Toshinori , Ito, Miki
IPC分类号： B23K26/06
CPC分类号： B41J2/1634 , B23K26/066 , B41J2/1404 , B41J2/1604 , B41J2/1623 , B41J2002/14379

4. 发明公开

EP1149658A3 Laser working method and manufacturing method of liquid jet recording head using such a laser working method 失效
标题翻译：使用这种激光加工方法制造喷液记录头的激光加工方法和加工
公开(公告)号：EP1149658A3
公开(公告)日：2002-05-08
申请号：EP01111840.3
申请日：1998-03-13
申请人： CANON KABUSHIKI KAISHA
发明人： Ishimatsu, Shin , Inaba, Masaki , Saito, Akio , Goto, Akira , Furukawa, Masao , Hasegawa, Toshinori , Ito, Miki
IPC分类号： B23K26/06 , B41J2/16
CPC分类号： B41J2/1642 , B23K26/04 , B23K26/066 , B23K26/364 , B41J2/1604 , B41J2/1623 , B41J2/1631 , B41J2/1634 , B41J2/1637 , Y10S430/146
摘要： The invention relates to a laser working method by using a laser light source (31) and a shaping optical system (35a) for shaping a laser beam (32) emitted from the laser light source (31). Further an illumination optical system (35a) is used for illuminating a laser mask (37) having a fine (10) and a less fine (14) pattern corresponding to a working shape of a work (38) to be treated in the laser working method; and a projection optical system (35b) allows formation of an image of the laser mask (37) at a predetermined magnification. According to the invention, an observation measuring system (36) is used, which is arranged behind the work (38) with respect to the laser light source (31) for observing and measuring the position of the work (38) set on a workstation (38), and a moving means (34c) is used for operating the workstation (38a) in accordance with the measured position. Then, the laser source (31) for works the shape of the work (38) sequentially from the shape of the fine mask pattern (10) to the less fine mask pattern (14). This method is particularly suitable for use in the production of ink jet recording heads.

5. 发明公开

EP1149658A2 Laser working method and manufacturing method of liquid jet recording head using such a laser working method 失效
标题翻译：使用这种激光加工方法制造喷液记录头的激光加工方法和加工
公开(公告)号：EP1149658A2
公开(公告)日：2001-10-31
申请号：EP01111840.3
申请日：1998-03-13
申请人： CANON KABUSHIKI KAISHA
发明人： Ishimatsu, Shin , Inaba, Masaki , Saito, Akio , Goto, Akira , Furukawa, Masao , Hasegawa, Toshinori , Ito, Miki
IPC分类号： B23K26/06 , B41J2/16
CPC分类号： B41J2/1642 , B23K26/04 , B23K26/066 , B23K26/364 , B41J2/1604 , B41J2/1623 , B41J2/1631 , B41J2/1634 , B41J2/1637 , Y10S430/146
摘要： The invention relates to a laser working method by using a laser light source (31) and a shaping optical system (35a) for shaping a laser beam (32) emitted from the laser light source (31). Further an illumination optical system (35a) is used for illuminating a laser mask (37) having a fine (10) and a less fine (14) pattern corresponding to a working shape of a work (38) to be treated in the laser working method; and a projection optical system (35b) allows formation of an image of the laser mask (37) at a predetermined magnification. According to the invention, an observation measuring system (36) is used, which is arranged behind the work (38) with respect to the laser light source (31) for observing and measuring the position of the work (38) set on a workstation (38), and a moving means (34c) is used for operating the workstation (38a) in accordance with the measured position. Then, the laser source (31) for works the shape of the work (38) sequentially from the shape of the fine mask pattern (10) to the less fine mask pattern (14). This method is particularly suitable for use in the production of ink jet recording heads.
摘要翻译：本发明通过使用激光光源（31）和用于成形从激光光源（31）发射的激光束（32）一个整形光学系统（35A）涉及一种激光加工方法。进一步对于照明光学系统（35A）用于照射具有微细（10）和以下的细的激光掩模（37）（14）的图案相对应的工件（38）的工作的形状，以在激光加工来治疗法; 和投影光学系统（35B）允许以规定的倍率形成激光掩模（37）的图像的。。根据本发明，观察测量用于观察和测量的工作位置的系统（36）时，所有这一切都在工作（38）相对于所述激光光源（31）的后面布置（38）设置在工作站上（38），和一个移动装置（34C）被用于与所测量的位置操作在雅舞蹈工作站（38A）。然后，激光源（31），用于工作的工作（38）的形状顺序地从精细掩模图案（10）到所述以下的细掩模图案（14）的形状。该方法特别适用于生产喷墨记录头的使用。

6. 发明公开

EP0958882A2 Method for forming through holes 有权
标题翻译： Verfahren zum Erzeugen durchgehenderL¸chern
公开(公告)号：EP0958882A2
公开(公告)日：1999-11-24
申请号：EP99109868.2
申请日：1999-05-19
申请人： CANON KABUSHIKI KAISHA
发明人： Hasegawa, Toshinori , Ishimatsu, Shin , Koide, Jun
IPC分类号： B23K26/00
CPC分类号： B41J2/162 , B23K26/384 , B41J2/1634 , H05K3/0026 , H05K2203/0557 , Y10T29/49401
摘要： A method for forming through holes, which has laser beam as the light source to project the laser beam to the work object using an optical system through a photomask for the formation of through holes on the work object by ablation processing, comprises the steps of increasing the concentration of the optical processing energy contributing to the process using the reflected beam created from the work object in the laser ablation processing; and forming each of through holes having the configuration enabling the narrower end to be changed to the wider end in the incident direction of laser beam. With the structure thus arranged, it becomes possible to increase the energy concentration that contributes to the process as compared with the usual ablation processing, because the reflected beam created in the ablation processing can be utilized again for the optical processing. Then, each of the through holes can be formed easily in the configuration in which the narrower end changes to the wider end in the incident direction of laser beam, which cannot be easily processed by the application of the usual ablation processing.
摘要翻译：一种用于形成通孔的方法，其具有激光束作为光源，以使用光学系统通过光掩模将激光束投射到工件上，用于通过消融处理在工件上形成通孔，所述方法包括以下步骤：增加使用在激光烧蚀处理中从工件上产生的反射光的过程的光处理能量的浓度; 并且形成具有使得较窄端部能够在激光束的入射方向上更宽的端部的每个通孔。通过这样布置的结构，由于在烧蚀处理中产生的反射光束可以再次用于光学处理，因此可以增加与通常的烧蚀处理相比有助于工艺的能量集中。然后，可以容易地形成每个通孔，其中较窄的端部变化到激光束的入射方向上的较宽端部的结构，这不能通过施加通常的消融处理而容易地处理。

7. 发明授权

EP0958882B1 Method for forming through holes 有权
标题翻译：一种用于通孔制造方法
公开(公告)号：EP0958882B1
公开(公告)日：2007-05-02
申请号：EP99109868.2
申请日：1999-05-19
申请人： CANON KABUSHIKI KAISHA
发明人： Hasegawa, Toshinori , Ishimatsu, Shin , Koide, Jun
IPC分类号： B23K26/00 , B23K26/38 , B41J2/16 , B23K26/06 , B23K26/073
CPC分类号： B41J2/162 , B23K26/384 , B41J2/1634 , H05K3/0026 , H05K2203/0557 , Y10T29/49401

8. 发明公开

EP0958882A3 Method for forming through holes 有权
标题翻译： Verfahren zum Erzeugen vonDurchlöchern
公开(公告)号：EP0958882A3
公开(公告)日：2003-08-13
申请号：EP99109868.2
申请日：1999-05-19
申请人： CANON KABUSHIKI KAISHA
发明人： Hasegawa, Toshinori , Ishimatsu, Shin , Koide, Jun
IPC分类号： B23K26/00 , B23K26/38 , B41J2/16 , B23K26/06 , B23K26/073
CPC分类号： B41J2/162 , B23K26/384 , B41J2/1634 , H05K3/0026 , H05K2203/0557 , Y10T29/49401
摘要： A method for forming through holes, which has laser beam as the light source to project the laser beam to the work object using an optical system through a photomask for the formation of through holes on the work object by ablation processing, comprises the steps of increasing the concentration of the optical processing energy contributing to the process using the reflected beam created from the work object in the laser ablation processing; and forming each of through holes having the configuration enabling the narrower end to be changed to the wider end in the incident direction of laser beam. With the structure thus arranged, it becomes possible to increase the energy concentration that contributes to the process as compared with the usual ablation processing, because the reflected beam created in the ablation processing can be utilized again for the optical processing. Then, each of the through holes can be formed easily in the configuration in which the narrower end changes to the wider end in the incident direction of laser beam, which cannot be easily processed by the application of the usual ablation processing.
摘要翻译：一种用于形成通孔的方法，其具有激光束作为光源，以使用光学系统通过光掩模将激光束投射到工件上，用于通过消融处理在工件上形成通孔，所述方法包括以下步骤：增加使用在激光烧蚀处理中从工件上产生的反射光的过程的光处理能量的浓度; 并且形成具有使得较窄端部能够在激光束的入射方向上更宽的端部的每个通孔。通过这样布置的结构，由于在烧蚀处理中产生的反射光束可以再次用于光学处理，因此可以增加与通常的烧蚀处理相比有助于工艺的能量集中。然后，可以容易地形成每个通孔，其中较窄的端部变化到激光束的入射方向上的较宽端部的结构，这不能通过施加通常的消融处理而容易地处理。

9. 发明公开

EP0968824A1 Method for processing discharge port of ink jet head, and method for manufacturing ink jet head 审中-公开
标题翻译： Bearbeitungsverfahren einerTintenstrahldruckkopfdüse和Tintenstrahldruckkopfherstellungsverfahren
公开(公告)号：EP0968824A1
公开(公告)日：2000-01-05
申请号：EP99112352.2
申请日：1999-06-28
申请人： CANON KABUSHIKI KAISHA
发明人： Koide, Jun , Hasegawa, Toshinori
IPC分类号： B41J2/16
CPC分类号： B41J2/1623 , B41J2/162 , B41J2/1634 , Y10T29/42 , Y10T29/49401
摘要： A method for processing the discharge port of an ink jet head provided with discharge port for discharging ink and a discharge port plate having the discharge port, comprising the following steps of closely contacting the mask plate having opening in the form of the discharge port with the face of the discharge port plate on the ink discharge side; and forming the discharge port on the discharge port plate by irradiating plural high energy ultraviolet parallel beams simultaneously through the mask plate in the direction inclined at a specific angle to the vertical axis of the mask plate face. With the method thus arranged, the aperture diameters on the ink discharge side can be made uniform, and the tapered configuration becoming thinner toward the ink discharge side can also be formed reliably, hence making it possible to stabilize the discharge direction of ink droplets, and enhance the flying speed of discharged ink for the performance of high quality printing with each clear dot having an extremely small amount of mist.
摘要翻译：一种用于处理喷墨头的排出口的方法，该喷墨头设置有用于排出墨的排出口和具有该排出口的排出口板，包括以下步骤：使具有排出口形式的开口的掩模板与在排墨侧的排出口板的表面; 以及通过沿掩模板面的垂直轴线以特定角度倾斜的方向通过掩模板照射多个高能量紫外线平行光束，在排出口板上形成排出口。通过如此布置的方法，可以使喷墨侧的孔径均匀，并且还可以可靠地形成朝向油墨排出侧变薄的锥形构造，从而可以稳定墨滴的排出方向，并且提高排墨量的飞行速度，进行高质量打印，每个清点具有极少的雾度。

10. 发明公开

EP0864393A1 Laser working method and manufacturing method of liquid jet recording head using such a laser working method 失效
标题翻译：通过这样的激光加工方法的装置的制造液体喷射头绘图的激光加工方法和工艺
公开(公告)号：EP0864393A1
公开(公告)日：1998-09-16
申请号：EP98104625.3
申请日：1998-03-13
申请人： CANON KABUSHIKI KAISHA
发明人： Ishimatsu, Shin , Inaba, Masaki , Saito, Akio , Goto, Akira , Furukawa, Masao , Hasegawa, Toshinori , Ito, Miki
IPC分类号： B23K26/06 , B41J2/16
CPC分类号： B41J2/1642 , B23K26/04 , B23K26/066 , B23K26/364 , B41J2/1604 , B41J2/1623 , B41J2/1631 , B41J2/1634 , B41J2/1637 , Y10S430/146
摘要： A laser working method which can easily and accurately work a fine and complicated shape by irradiation of a laser beam is provided. When a plurality of channel grooves (3) are laser worked on a second board (1) constituting a liquid jet recording head and projections (6) are laser worked on the joint surface of groove walls (4) between the channel grooves and the like, the projections (6) are first worked and formed by irradiating the laser beam through a first mask pattern (10) of a high space frequency arranged by transmitting portions (11) to work the projections (6) and light shielding portions (12). After that, the channel grooves (3) are worked and formed by irradiating the laser beam through a second mask pattern (14) of a low space frequency arranged by transmitting portions (15) to work the channel grooves (3) and light shielding portions (16). The formation of a secondary product due to the laser working can be reduced. Even when the laser working secondary product exists, the influence by the secondary product can be reduced and the working can be performed. A fine and complicated shape can be stably and cheaply worked.
摘要翻译：提供一种能够通过激光束的照射和容易精确地设定工作的微细且复杂的形状的激光加工方法。当信道槽的多个（3）激光上的第二板加工（1）构成的液体喷射记录头和预测（6）的激光的槽壁的接合面上工作（4）的流路槽等之间中，凸起（6）的第一工作，并通过由透光部配置在高的空间频率的第一掩模图案（10）照射激光束（11）形成的工作凸起（6）和遮光部（12）的，在此之后，信道的槽（3）由通过透射部分设置的低空间频率的第二掩模图案（14）照射激光束成型加工（15）工作的信道的槽（3）和遮光部（16）。二次产品的由于激光加工形成可被减小。甚至当激光加工次级产物存在，由二次产物的影响可以被减小，并且能够进行工作。甲精细和复杂的形状也能够稳定地且廉价地制作。

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