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1. 发明授权

EP2245510B1 OPTICAL COMPONENT FOR EUVL AND SMOOTHING METHOD THEREOF 有权
标题翻译：光学元件用于其EUVL和晚上的方法
公开(公告)号：EP2245510B1
公开(公告)日：2013-07-17
申请号：EP09712929.0
申请日：2009-02-19
申请人： Asahi Glass Company, Limited
发明人： ONO, Motoshi , WATANABE, Mitsuru , ITO, Masabumi
IPC分类号： B23K26/02 , G03F1/00 , C03C23/00 , G03F1/24 , G03F1/72 , G21K1/06 , G03F1/60
CPC分类号： G21K1/062 , B82Y10/00 , C03C23/0025 , G03F1/24 , G03F1/60 , G03F1/72 , G21K2201/067

2. 发明公开

EP2245510A1 OPTICAL COMPONENT FOR EUVL AND SMOOTHING METHOD THEREOF 有权
标题翻译：光学元件用于其EUVL和晚上的方法
公开(公告)号：EP2245510A1
公开(公告)日：2010-11-03
申请号：EP09712929.0
申请日：2009-02-19
申请人： Asahi Glass Company, Limited
发明人： ONO, Motoshi , WATANABE, Mitsuru , ITO, Masabumi
IPC分类号： G03F1/00 , G03F1/14 , B23K26/02
CPC分类号： G21K1/062 , B82Y10/00 , C03C23/0025 , G03F1/24 , G03F1/60 , G03F1/72 , G21K2201/067
摘要： The present invention is to provide a method for smoothing the optical surface having a concave defect of an optical component for EUVL. The present invention relates to a method for smoothing the optical surface of an optical component for EUVL, comprising irradiating, with an excimer laser having a wavelength of 250 nm or less with a fluence of 0.5 to 2.0 J/cm2, the optical surface having a concave defect of an optical component for EUV lithography (EUVL), the optical component being made of a TiO
2 -containing silica glass material comprising SiO
2 as a main component.

3. 发明授权

EP2219416B1 LIGHT TRANSMITTING SUBSTRATE, METHOD FOR MANUFACTURING LIGHT TRANSMITTING SUBSTRATE, ORGANIC LED ELEMENT AND METHOD FOR MANUFACTURING ORGANIC LED ELEMENT 有权
标题翻译：透光基板，制造透光基板的方法，有机发光二极管元件以及制造有机发光二极管元件的方法
公开(公告)号：EP2219416B1
公开(公告)日：2018-02-14
申请号：EP08848564.4
申请日：2008-11-06
申请人： Asahi Glass Company, Limited
发明人： NAKAMURA, Nobuhiro , ONO, Motoshi , IMAKITA, Kenji , ODAKA, Hidefumi , ISHIBASHI, Nao , HAYASHI, Kazutaka
IPC分类号： H01L51/52 , H01L51/56 , H05B33/10 , H05B33/22
CPC分类号： H01L51/5268 , H01L51/56 , H01L2251/5346 , H01L2251/5361 , H01L2251/5392 , H05B33/10 , H05B33/22
摘要： The present invention is intended to provide an organic LED element in which the extraction efficiency is improved up to 80% of emitted light, and provides a translucent substrate comprising a translucent glass substrate; a scattering layer formed on the glass substrate and comprising a glass which contains a base material having a first refractive index for at least one wavelength of light to be transmitted and a plurality of scattering materials dispersed in the base material and having a second refractive index different from that of the base material; and a translucent electrode formed on the scattering layer and having a third refractive index higher than the first refractive index, wherein distribution of the scattering materials in the scattering layer decreases toward the translucent electrode.

4. 发明公开

EP2635091A1 ORGANIC EL DEVICE, TRANSLUCENT SUBSTRATE, AND METHOD FOR MANUFACTURING ORGANIC EL DEVICE 审中-公开
标题翻译：有机EL元件，用于生产有机EL元件的透光性基板和方法
公开(公告)号：EP2635091A1
公开(公告)日：2013-09-04
申请号：EP11836177.3
申请日：2011-10-21
申请人： Asahi Glass Company, Limited
发明人： NAKAMURA, Nobuhiro , YAMADA, Tomohiro , ONO, Motoshi , ISHIBASHI, Nao , SUZUKI, Susumu
IPC分类号： H05B33/02 , H01L51/50 , H05B33/10
CPC分类号： H01L51/5275 , H01L51/0096 , H01L51/5215 , H01L51/5268 , H01L51/56 , H05B33/10 , H05B33/24 , Y02E10/549 , Y02P70/521
摘要： An organic EL element includes a transparent substrate; a first electrode; an organic light emitting layer formed on the first electrode; and a second electrode formed on the organic light emitting layer, wherein a scattering layer including a base material made of glass and scattering substances dispersed in the base material is provided on the transparent substrate, and a light extraction assistance layer is provided between the scattering layer and the first electrode, the light extraction assistance layer being made of an inorganic material other than glass.
摘要翻译：透明的有机EL元件包括：基板; 第一电极; 到形成在第一电极的有机发光层; 和设置在所述透明基板上形成的有机发光层，worin一个散射层，其包括由玻璃和分散在该基体材料的散射物质的基体材料的第二电极，和在所述散射层之间的光提取辅助层和第一电极，所述光提取辅助层由玻璃以外的无机材料构成。

5. 发明公开

EP2323138A1 METHOD FOR SMOOTHING OPTICAL MEMBER FOR EUVL AND OPTICAL MEMBER FOR EUVL HAVING SMOOTHED OPTICAL SURFACE 有权
标题翻译： VERFAHREN ZURGLÄTTUNGEINES OPTISCHEN ELEMENTSFÜREUVL
公开(公告)号：EP2323138A1
公开(公告)日：2011-05-18
申请号：EP09812983.6
申请日：2009-08-19
申请人： Asahi Glass Company Limited
发明人： ONO, Motoshi , WATANABE, Mitsuru , YOKOYAMA, Mika
IPC分类号： G21K1/06 , C03C23/00 , G03F7/20 , H01L21/027
CPC分类号： B82Y40/00 , B82Y10/00 , C03C23/0025 , C03C2204/08 , G03F1/24 , G03F1/60 , G21K2201/067
摘要： The present invention provides a method for smoothing an optical surface of an optical component for EUVL. Specifically, the present invention provides a method for smoothing an optical surface of an optical component for EUVL made of a silica glass material containing TiO 2 and comprising SiO 2 as a main component with a laser having an oscillation wavelength, to which the optical component for EUVL has an absorption coefficient of 0.01 µm -1 or more, at a fluence of 0.3 to 1.5 J/cm 2 in an atmosphere having a water vapor partial pressure of 3.6 mmHg or less.
摘要翻译：本发明提供了一种用于平滑EUVL的光学部件的光学表面的方法。具体地说，本发明提供了一种用于使用包含TiO 2并包含SiO 2作为主要成分的石英玻璃材料制成的EUVL的光学部件的光学表面的平滑光学表面的方法，所述激光具有振荡波长，光学部件在水蒸汽分压为3.6mmHg以下的气氛中，EUVL的吸收系数为0.01μm-1以上，流量为0.3〜1.5J / cm 2。

6. 发明授权

EP2323138B1 METHOD FOR SMOOTHING OPTICAL MEMBER FOR EUVL 有权
标题翻译： PROCESS EUVL用光学元件的晚上
公开(公告)号：EP2323138B1
公开(公告)日：2013-10-23
申请号：EP09812983.6
申请日：2009-08-19
申请人： Asahi Glass Company, Limited
发明人： ONO, Motoshi , WATANABE, Mitsuru , YOKOYAMA, Mika
IPC分类号： G21K1/06 , C03C23/00 , G03F1/60 , G03F1/24 , G03F7/20 , H01L21/027
CPC分类号： B82Y40/00 , B82Y10/00 , C03C23/0025 , C03C2204/08 , G03F1/24 , G03F1/60 , G21K2201/067

7. 发明公开

EP2392549A1 GLASS SUBSTRATE FOR SEMICONDUCTOR DEVICE MEMBER, AND PROCESS FOR PRODUCING GLASS SUBSTRATE FOR SEMICONDUCTOR DEVICE MEMBER 审中-公开
标题翻译：玻璃基板用于制造玻璃基板，半导体元件的半导体元件和方法
公开(公告)号：EP2392549A1
公开(公告)日：2011-12-07
申请号：EP10735943.2
申请日：2010-02-01
申请人： Asahi Glass Company, Limited
发明人： ONO, Motoshi , KOIKE, Akio
IPC分类号： C03B33/09 , B23K26/00 , B23K26/06 , B23K26/38 , C03B33/02 , C03C3/076
CPC分类号： B23K26/382 , B23K26/384 , B23K26/40 , B23K2203/50 , C03C3/076 , C03C23/0025 , Y10T428/24273
摘要： It is an object of the present invention to provide a glass substrate having plural through-holes which is not likely to peel from a silicon wafer, even though laminated on and jointed to a the silicon wafer and then subjected to heat treatment.
The above object is accomplished by a glass substrate having an average thermal expansion coefficient of from 10×10 -7 to 50×10 -7 /K within a range of from 50°C to 300°C, having plural through-holes with a taper angle of from 0.1 to 20° and having a thickness of from 0.01 to 5 mm.
摘要翻译：这是本发明的一个目的是提供具有多个通孔的所有这是不容易从硅晶片剥离，即使层压上并接合到硅晶片上，然后将进行过热处理的玻璃基板。上述目的是通过一种为50℃至300℃的范围内具有从10×10 -7〜50×10 -7 / K的平均热膨胀系数的玻璃基板来实现，通孔与具有多个锥度为0.1的角度到20°，并且具有的厚度为0时01分至5毫米。

8. 发明公开

EP2136224A1 PHASE DIFFERENCE PLATE AND ITS MANUFACTURING METHOD 审中-公开
标题翻译： PHASENVERSCHIEBUNGSPLATTE UND HERSTELLUNGSVERFAHRENDAFÜR
公开(公告)号：EP2136224A1
公开(公告)日：2009-12-23
申请号：EP08739998.6
申请日：2008-04-07
申请人： Asahi Glass Company, Limited
发明人： ONO, Motoshi
IPC分类号： G02B5/30 , G11B7/135
CPC分类号： G02B5/3083 , C03C23/0025 , G11B7/0065 , G11B7/1353
摘要： Provision of a wave plate and its production process, which is of low cost and which has a high durability and a wide band property, and which is easily produced.
A wave plate is provided, which has a retardation value of from 80 to 450 nm measured at incident light having a wavelength of 540 nm, which is a glass plate having a thickness of at least 0.1 mm and at most 5 mm, and which is produced by irradiating the glass plate with a condensed laser beam, and scanning the glass plate or the condensed laser beam in this state, so as to form a tensile stress distribution along the scanning direction and thereby induce a uniaxial birefringence. Further, a wave plate is provided, which has a retardation value of from 100 to 150 nm as measured with incident light having a wavelength of 486 nm, and which has a retardation value of from 130 to 200 nm as measured with incident light having a wavelength of 656 nm.
摘要翻译：提供波片及其制造方法，其成本低，耐久性高，带宽广，容易制造。提供一种波片，其具有在波长为540nm的入射光下测量的80至450nm的延迟值，该厚度为至少0.1mm至最多5mm的玻璃板，并且其为通过用凝结的激光束照射玻璃板而产生，并且在该状态下扫描玻璃板或聚光激光束，从而沿着扫描方向形成拉伸应力分布，从而引起单轴双折射。此外，提供了一种波片，其具有从波长为486nm的入射光测得的延迟值为100至150nm，并且具有130至200nm的延迟值，该入射光的入射光具有波长656 nm。

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