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    • 7. 发明公开
    • TRENCH MOS-TYPE SCHOTTKY DIODE
    • EP4086974A1
    • 2022-11-09
    • EP22176745.2
    • 2017-04-20
    • Tamura Corporation
    • SASAKI, KoheiHIGASHIWAKI, Masataka
    • H01L29/872H01L29/24H01L29/47H01L29/861H01L29/868H01L29/51H01L29/06H01L29/40
    • A trench MOS-type Schottky diode (1), comprising:
      a first semiconductor layer (10) comprising an n-type Ga 2 O 3 -based single crystal containing a Group IV element as a donor;
      a second semiconductor layer (11), comprising an n-type Ga 2 O 3 -based single crystal containing a Group IV element as a donor, laminated on the first semiconductor layer (10) and having trenches (12) opened on a surface (17) thereof opposite to the first semiconductor layer (10);
      an anode electrode (13) formed on the surface (17) of the second semiconductor layer (11) opposite to the first semiconductor layer (10) and being in Schottky contact with the second semiconductor layer (11);
      a cathode electrode (14) formed on a surface of the first semiconductor layer (10) opposite to the second semiconductor layer (11) and being in ohmic contact with the first semiconductor layer (10);
      an insulating films (15) covering inner surfaces of the trenches (12) of the second semiconductor layer (11); and
      a trench MOS gates (16) embedded in the trenches (12) of the second semiconductor layer (11) so as to be covered with the insulating films (15) and is in contact with the anode electrode (13),
      wherein a donor concentration in the second semiconductor layer (11) is lower than the donor concentration in the first semiconductor layer (10),
      wherein the donor concentration in the second semiconductor layer (11) is not less than 1.0×10 16 cm -3 and not more than 6.0×10 16 cm -3 , and
      wherein a thickness of the second semiconductor layer (11) is not less than 4.5 µm and not more than 9 µm.