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    • 10. 发明公开
    • Acid-labile polymer and resist composition
    • 酸不稳定聚合物和抗蚀剂组合物
    • EP1254915A3
    • 2007-09-19
    • EP02250452.6
    • 2002-01-23
    • Korea Kumho Petrochemical Co. Ltd.
    • Park, Joo-HyeonSeo, Dong-ChulLim, Young-TaekCho, Seong-DukJoo, Hyun-SangKim, Seong-Ju
    • C08F222/06C08F232/00G03F7/033G03F7/039
    • G03F7/0397C08F222/06C08F232/00G03F7/0392G03F7/0395
    • The present invention relates to a copolymer represented by formula 1 and a chemically amplified resist composition consisting of the copolymer, acid generating agent, additive, and solvent.
         
      where, R 1 , R 2 and R 6 are independent each other and respectively include a hydrogen atom or an alkyl, alkoxymethylene, alkoxyethylene, phenyl, alkoxyalkylene, alkylphenyl, alkoxyphenyl, allyl, benzyl, alkylbenzyl, alkoxybenzyl containing 1 to 34 carbon atoms having or not having an hydroxy, ether, ester, carbonyl, acetal, epoxy, nitrile or aldehyde; R 5 is a hydrogen atom, an alkyl or alkoxy group containing 1 to 18 carbon atoms; R 7 is a hydrogen atom, an alkyl group containing 1 to 18 carbon atoms, an alkyl group containing alkoxy 1 to 18 carbon atoms or an alkyl group containing ester of 1 to 18 carbon atoms; R 3 and R 4 are independent and respectively include a hydrogen atom, hydroxy, nitrile, aldehyde, hydroxymethylenc, and alkylcarbonyloxy, alkyl, hydroxyalkylene, alkoxycarbonyl, alkoxymethylene or alkoxyalkanyl group containing 1 to 18 carbon atoms; X is olefin derivatives, vinyl ether derivatives or styrene derivatives containing 1 to 40 carbon atoms, alternatively these derivatives may be comprised of hydroxy, ester, alkoxyalkyloxycarbonyl, ketone or ether; a, b, c, d, e and f are a number represented a repeating unit in the main chain, wherein a+b+c+d+e+f=1, the content of a and b are 0 to 0.7, respectively, (a+b)/(a+b+c+d+e+f) > 0.3, and the content of c, d, e and f are 0 to 0.9, respectively; and n is an integer of 0 or 1.