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1. 发明公开

EP1096554A1 PLASMA PROCESSING APPARATUS 审中-公开
标题翻译： Einrichtung zur Plasmabehandlung
公开(公告)号：EP1096554A1
公开(公告)日：2001-05-02
申请号：EP99923919.7
申请日：1999-06-04
申请人： TOKYO ELECTRON LIMITED , Goto, Naohisa , Ando, Makoto
发明人： GOTO, Naohisa , ANDO, Makoto , ISHII, Nobuo
IPC分类号： H01L21/3065
CPC分类号： H01J37/3222 , H01J37/32192
摘要： In a plasma processing system, microwaves generated by a microwave generator (86) are guided to a plane antenna (62) to introduce the microwaves, which are attenuated exponentially, into a processing vessel (22) in which an object to be processed (W) is subjected to a plasma process. A microwave absorbing means (96) is disposed in a peripheral portion of the plane antenna (62) to absorb the microwaves propagating from a central portion of the plane antenna and to control the amount of reflected microwave. Thus the amount of the microwaves reflected toward the central portion of the plane antenna (62) by a peripheral portion of the plane antenna (62) is reduced to some extent so that electromagnetic field intensity is distributed uniformly.
摘要翻译：在等离子体处理系统中，由微波发生器（86）产生的微波被引导到平面天线（62），以将被指数地衰减的微波引入处理容器（22）中，在该处理容器（22）中，待加工物体（W ）进行等离子体处理。微波吸收装置（96）设置在平面天线（62）的周边部分中，以吸收从平面天线的中心部分传播的微波并控制反射微波的量。因此，通过平面天线（62）的周边部分朝向平面天线（62）的中心部分反射的微波的量减少到一定程度，使得电磁场强度均匀分布。

2. 发明公开

EP1439571A1 DEVICE AND METHOD FOR MICROWAVE PLASMA PROCESSING, AND MICROWAVE POWER SUPPLY DEVICE 有权
标题翻译： DEVICE AND METHOD FOR微波等离子体处理和微波功率器件
公开(公告)号：EP1439571A1
公开(公告)日：2004-07-21
申请号：EP02775374.8
申请日：2002-10-18
申请人： Goto, Naohisa , Ohmi, Tadahiro , TOKYO ELECTRON LIMITED
发明人： GOTO, Naohisa , OHMI, Tadahiro , HIRAYAMA, M., Tohoku University , GOTO, Tetsuya, Tohoku University
IPC分类号： H01L21/205 , C23C16/511 , H01L21/3065 , H01L21/31 , H05H1/46
CPC分类号： H01J37/32229 , H01J37/32192
摘要： A microwave plasma processing apparatus includes a processing vessel, a microwave generator, a waveguide guiding a microwave formed by the microwave generator, and a microwave emitting member emitting the microwave with wavelength compression by a retardation plate, wherein the waveguide has a single microwave output opening in a location corresponding to a central par of the microwave emitting member.
摘要翻译：的微波等离子体处理装置包括处理容器，微波发生器，波导引导由微波发生器形成的微波，以及微波发射部件由一个相位差板发射具有波长压缩的微波，worin波导具有单个微波输出开口在一个位置对应于所述微波发射部件的中央公园。

3. 发明公开

EP0708490A1 ANTENNA HAVING A WAVEGUIDE STRUCTURE AND METHOD OF ITS MANUFACTURE 失效
标题翻译：天竺葵麻醉师WELLENLEITERSTRUKTUR UND VERFAHREN ZU IHRER HERSTELLUNG
公开(公告)号：EP0708490A1
公开(公告)日：1996-04-24
申请号：EP94912057.0
申请日：1994-04-06
申请人： Nippon Steel Corporation , Goto, Naohisa
发明人： GOTO, Naohisa , MORIYA, Masaharu Nippon Steel Corporation , MATSUNO, Keishi Nippon Steel Corporation
IPC分类号： H01P11/00 , H01Q13/10 , H01Q13/20
CPC分类号： H01Q21/005 , H01Q21/0087 , H01Q21/062
摘要： An antenna having a waveguide structure and comprising a base of a thin flat metal; a radiation plate of a thin flat metal arranged in parallel with the base at a distance from the base; and a plurality of thin flat metal side walls secured to the base and radiation plate, and arranged in the space between the base and the radiation plate so as to form a plurality of waveguides connected to each other. The radiation plate and the side walls are joined by spot-welding at given intervals. The base and the side walls are preferably in the form of a single block made of a metallic material.
摘要翻译：一种具有波导结构并且包括薄平金属基底的天线; 与所述底座平行地距离所述基座一定距离的薄扁平金属片的辐射板; 以及固定到基座和辐射板的多个薄平的金属侧壁，并且布置在基座和辐射板之间的空间中，以形成彼此连接的多个波导。辐射板和侧壁通过点焊以给定的间隔连接。基部和侧壁优选为由金属材料制成的单个块的形式。

4. 发明授权

EP0329079B1 Slotted waveguide Antenna 有权
标题翻译：开槽波导天线。
公开(公告)号：EP0329079B1
公开(公告)日：1994-11-23
申请号：EP89102519.9
申请日：1989-02-14
申请人： Asahi Kasei Kogyo Kabushiki Kaisha , Goto, Naohisa
发明人： Goto, Naohisa
IPC分类号： H01Q21/00 , H01Q21/06
CPC分类号： H01Q21/064 , H01Q21/005

5. 发明授权

EP1439571B1 DEVICE AND METHOD FOR MICROWAVE PLASMA PROCESSING AND MICROWAVE POWER SUPPLY DEVICE 有权
标题翻译： DEVICE AND METHOD FOR微波等离子体处理和微波功率器件
公开(公告)号：EP1439571B1
公开(公告)日：2016-09-14
申请号：EP02775374.8
申请日：2002-10-18
申请人： Goto, Naohisa , Ohmi, Tadahiro , TOKYO ELECTRON LIMITED
发明人： GOTO, Naohisa , OHMI, Tadahiro , HIRAYAMA, Masaki , GOTO, Tetsuya
IPC分类号： H01J37/32
CPC分类号： H01J37/32229 , H01J37/32192

6. 发明公开

EP0329079A3 Slotted waveguide Antenna 有权
标题翻译：插槽波导天线
公开(公告)号：EP0329079A3
公开(公告)日：1990-06-13
申请号：EP89102519.9
申请日：1989-02-14
申请人： Asahi Kasei Kogyo Kabushiki Kaisha , Goto, Naohisa
发明人： Goto, Naohisa
IPC分类号： H01Q21/00 , H01Q21/06
CPC分类号： H01Q21/064 , H01Q21/005
摘要： A slotted waveguide antenna comprises a plurality of radiating waveguides (38-1, 38-2,...) having at least one radiating slot (40), a feed waveguide (36) for feeding to the radiating waveguides (38-1, 38-2,...), and coupling apertures arranged between the feed waveguide (36) and the radiating waveguides (38-1, 38-2,...) at a distance of an integer multiple of teh guide wavelength (λ g ) of the feed waveguide (36). The plurality of radiating waveguides (38-1, 38-2,...) are disposed in parallel to form an array in a manner that the radiating slots (40) in the respective radiating waveguides (38-1, 38-2,...) are directed in the same direction. The feed waveguide (36) is on the same plane as the array formed by the radiating waveguides (38-1, 38-2,...). The transverse width of each radiating waveguide is one half of the distance between the adjacent coupling apertures (46-1, 46-2,...). The coupling apertures (46-1, 46-2,...) provided on the feed waveguide (36) supply electromagnetic waves having the same amplitude and the same phase to each radiating waveguide (38-1, 38-2,...). The feed waveguide (36) and the radiating waveguides (38-1, 38-2,...) are arranged integrally on the same plane so that the overall structure is planar. The structure of the antenna is simple, so that the antenna is manufactured easily and inexpensively.

7. 发明公开

EP1439571A4 DEVICE AND METHOD FOR MICROWAVE PLASMA PROCESSING, AND MICROWAVE POWER SUPPLY DEVICE 有权
标题翻译： DEVICE AND METHOD FOR微波等离子体处理和微波功率器件
公开(公告)号：EP1439571A4
公开(公告)日：2005-09-21
申请号：EP02775374
申请日：2002-10-18
申请人： GOTO NAOHISA , OHMI TADAHIRO , TOKYO ELECTRON LTD
发明人： GOTO NAOHISA , OHMI TADAHIRO , HIRAYAMA MASAKI , GOTO TETSUYA
IPC分类号： H05H1/46 , B01J19/08 , C23C16/511 , H01J37/32 , H01L21/205 , H01L21/302 , H01L21/3065 , H01L21/31
CPC分类号： H01J37/32229 , H01J37/32192
摘要： A microwave plasma processing device, comprising a processing container (12), a microwave generator (24), a wave guide tube (22) for guiding microwave from the microwave generator (24), and a microwave radiating member (19) for radiating the microwave having a wave length shortened by a wave-slowing plate (18) into a space inside the processing container, the wave guide tube (22) further comprising a single microwave output opening (22a) located at the position thereof corresponding to the center portion of the microwave radiating member (19).

8. 发明公开

EP1096554A4 PLASMA PROCESSING APPARATUS 审中-公开
标题翻译： EINRICHTUNG ZUR PLASMA-BEHANDLUNG
公开(公告)号：EP1096554A4
公开(公告)日：2004-09-29
申请号：EP99923919
申请日：1999-06-04
申请人： TOKYO ELECTRON LTD , GOTO NAOHISA , ANDO MAKOTO
发明人： GOTO NAOHISA , ANDO MAKOTO , ISHII NOBUO
IPC分类号： H05H1/46 , C23C16/00 , C23C16/511 , H01J37/32 , H01L21/00 , H01L21/203 , H01L21/3065 , H05H1/00
CPC分类号： H01J37/3222 , H01J37/32192
摘要： In the plasma processor, the microwaves generated from a microwave generator (86) are led to a plane antenna (62), which in turn introduces exponentially attenuating microwaves into a container (22) that processes an object (W) in plasma. Microwave absorption means (96) provided in the circumference of the plane antenna (62) absorbs microwaves propagating from the center of the plane antenna (62) and suppresses the reflection. As a result, the microwaves reflected in the circumference of the plane antenna (62) and returned to the center are decreased to some degree, and the electromagnetic field distribution of the microwave becomes uniform.
摘要翻译：在等离子体处理系统中，由微波发生器（86）产生的微波被引导到平面天线（62），以将被指数地衰减的微波引入处理容器（22）中，在该处理容器（22）中，待加工物体（W ）进行等离子体处理。微波吸收装置（96）设置在平面天线（62）的周边部分中，以吸收从平面天线的中心部分传播的微波并控制反射微波的量。因此，通过平面天线（62）的周边部分朝向平面天线（62）的中心部分反射的微波的量减少到一定程度，使得电磁场强度均匀分布。

9. 发明公开

EP0329079A2 Slotted waveguide Antenna 有权
标题翻译： Antenne mit geschlitztem Hohlleiter。
公开(公告)号：EP0329079A2
公开(公告)日：1989-08-23
申请号：EP89102519.9
申请日：1989-02-14
申请人： Asahi Kasei Kogyo Kabushiki Kaisha , Goto, Naohisa
发明人： Goto, Naohisa
IPC分类号： H01Q21/00 , H01Q21/06
CPC分类号： H01Q21/064 , H01Q21/005
摘要： A slotted waveguide antenna comprises a plurality of radiating waveguides (38-1, 38-2,...) having at least one radiating slot (40), a feed waveguide (36) for feeding to the radiating waveguides (38-1, 38-2,...), and coupling apertures arranged between the feed waveguide (36) and the radiating waveguides (38-1, 38-2,...) at a distance of an integer multiple of teh guide wavelength (λ g ) of the feed waveguide (36). The plurality of radiating waveguides (38-1, 38-2,...) are disposed in parallel to form an array in a manner that the radiating slots (40) in the respective radiating waveguides (38-1, 38-2,...) are directed in the same direction. The feed waveguide (36) is on the same plane as the array formed by the radiating waveguides (38-1, 38-2,...). The transverse width of each radiating waveguide is one half of the distance between the adjacent coupling apertures (46-1, 46-2,...). The coupling apertures (46-1, 46-2,...) provided on the feed waveguide (36) supply electromagnetic waves having the same amplitude and the same phase to each radiating waveguide (38-1, 38-2,...). The feed waveguide (36) and the radiating waveguides (38-1, 38-2,...) are arranged integrally on the same plane so that the overall structure is planar. The structure of the antenna is simple, so that the antenna is manufactured easily and inexpensively.
摘要翻译：开槽波导天线包括具有至少一个辐射槽（40）的多个辐射波导（38-1,38-2，...），馈送波导（36），用于馈送到辐射波导（38-1,38-2，...） 38-2，...），以及布置在馈送波导（36）和辐射波导（38-1,38-2，...）之间的距离为导向波长的整数倍（λ g）馈送波导（36）。多个辐射波导（38-1,38-2，...）平行布置以形成阵列，使得各个辐射波导（38-1,38-2，...）中的辐射槽（40） ...）指向相同的方向。馈电波导（36）在与由辐射波导（38-1,38-2，...）形成的阵列相同的平面上。每个辐射波导的横向宽度是相邻耦合孔径（46-1,46-2，...）之间距离的一半。设置在馈电波导（36）上的联接孔（46-1,46-2，...）向每个辐射波导（38-1,38-2，...）提供具有相同振幅和相同相位的电磁波。）。馈电波导（36）和辐射波导（38-1,38-2 ...）一体地布置在同一平面上，使得整体结构是平面的。天线的结构简单，使得天线易于且廉价地制造。

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