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    • 3. 发明公开
    • Shutter system
    • Verschlussvorrichtung
    • EP2868768A1
    • 2015-05-06
    • EP13005128.7
    • 2013-10-29
    • Oerlikon Trading AG, Trübbach
    • Kurapov, Denis
    • C23C14/22C23C14/50
    • C23C14/50C23C14/22C23C14/505
    • The present invention relates to an apparatus for treating and/or coating substrate surfaces having a substrate shutter system which allows a better economical utilization of the apparatus as well as a more versatile buildup of multilayer coating structures. The apparatus according to the present invention is characterized by comprising at least one substrate holding system (3) that comprises at least one shutter system comprising at least one movable shutter element (1) to be arranged around of at least a portion of the holder system for shielding at least some of the substrates arranged in the holding system in such a manner that the surface of the shielded substrates cannot be treated during the execution of the one or more surface treatments or at least during a part of the execution of the one or more surface treatments because the movable shutter element interrupts at least partially or avoid completely the surface treatment of the shielded substrates.
    • 本发明涉及一种用于处理和/或涂覆基材表面的设备,该设备具有基板快门系统,其允许更好地经济地利用设备以及多功能多层涂层结构的积累。 根据本发明的装置的特征在于包括至少一个基板保持系统(3),该基板保持系统(3)包括至少一个快门系统,该快门系统包括至少一个活动快门元件(1),该活动快门元件围绕至少一部分保持器系统 用于屏蔽布置在保持系统中的至少一些基板,使得屏蔽基板的表面在执行一个或多个表面处理期间不能被处理,或者至少在执行一个或多个表面处理的一部分期间 更多的表面处理是因为可移动快门元件至少部分地中断或完全避免了屏蔽基板的表面处理。