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81. 发明公开

EP2564218A1 MICROMACHINED PIEZOELECTRIC THREE-AXIS GYROSCOPE AND STACKED LATERAL OVERLAP TRANSDUCER (SLOT) BASED THREE-AXIS ACCELEROMETER 审中-公开
标题翻译： MIKROGEFERTIGTES PIEZOELEKTRISCHES DREIACHSIGES GYROSKOP UND AUF堆叠式横向叠加式变速箱（SLOT）BASIERENDER DREIACHSIGER BESCHLEUNIGUNGSMESSER
公开(公告)号：EP2564218A1
公开(公告)日：2013-03-06
申请号：EP11717859.0
申请日：2011-04-18
申请人： Qualcomm Mems Technologies, Inc.
发明人： STEPHANOU, Philip, Jason , ACAR, Cenk , SHENOY, Ravindra, Vaman , BURNS, David, William , BLACK, Justin, Phelps , PETERSEN, Kurt, Edward , GANAPATHI, Srinivasan, Kodaganallur
IPC分类号： G01P15/125 , G01P15/18 , G01P15/08 , G01C19/56
CPC分类号： G01C19/5769 , G01C19/5712 , G01C19/5719 , G01C19/5747 , G01C25/00 , G01P15/0802 , G01P15/125 , G01P15/18 , G01P2015/082 , H01L41/25 , H01L41/311 , H01L41/312 , Y10T29/42 , Y10T29/49002 , Y10T29/49005 , Y10T29/49155
摘要： This disclosure provides systems, methods and apparatus, including computer programs encoded on computer storage media, for making and using gyroscopes. Such gyroscopes may include a central anchor, a sense frame disposed around the central anchor, a plurality of sense beams configured for connecting the sense frame to the central anchor and a drive frame disposed around and coupled to the sense frame. The gyroscope may include pairs of drive beams disposed on opposing sides of the sense frame. The gyroscope may include a drive frame suspension for substantially restricting a drive motion of the drive frame to that of a substantially linear displacement along the first axis. The sense frame may be substantially decoupled from drive motions of the drive frame. Such devices may be included in a mobile device, such as a mobile display device.
摘要翻译：本公开提供了系统，方法和装置，包括在计算机存储介质上编码的用于制造和使用加速度计的计算机程序。一些这样的加速度计包括基板，第一多个电极，第二多个电极，附接到基板的第一锚固件，框架和检验块。衬底可以基本上在第一平面中延伸。证明物质可以附接到框架，可以基本上在第二平面中延伸，并且可以基本上被约束用于沿着第一和第二轴线的运动。框架可以附接到第一锚固件，可以基本上在第二平面中延伸，并且可以基本上被约束用于沿着第二轴线的运动。响应于沿着第一或第二轴的施加的横向加速度，证明物质的横向运动可导致第一或第二多个电极处的电容变化。

82. 发明公开

EP2561313A1 MICRO-GYROSCOPE FOR DETECTING MOTIONS 有权转让
标题翻译：微陀螺，用于检测运动
公开(公告)号：EP2561313A1
公开(公告)日：2013-02-27
申请号：EP11715917.8
申请日：2011-04-19
申请人： Maxim Integrated GmbH
发明人： DR. KEMPE, Volker
IPC分类号： G01C19/56
CPC分类号： G01C19/5747 , G01C19/56 , G01C19/5642 , G01C19/5656 , G01C19/5719
摘要： The invention relates to a micro-gyroscope for detecting motions relative to an X and/or Y and Z axis, particularly as a 3D, 5D, or 6D sensor. Said micro- gyroscope comprises a substrate (2), a plurality of oscillating sample masses (1 ), an anchor (3, 4), and anchor springs (5, 6) disposed between the anchor (3, 4) and the sample mass (1 ) for attaching the oscillating sample masses (1 ) to the substrate (2), drive elements (15) for oscillating the sample masses (1 ) in the X-Y plane, in order to generate Coriolis forces when the substrate (2) is rotated and sensor elements (22), particularly electrodes disposed below the sample masses (1 ), in order to capture the deflections of the sample masses (1 ) due to the Coriolis forces generated. The sample masses (1 ) are disposed uniformly about a central anchor (3) and can be driven radially relative to the central anchor (3). The anchor springs (5, 6) are designed such that the sample masses (1 ) can be deflected both radially in the X-Y plane and out of the X-Y plane. A sensor mass (20) is disposed on one, particularly on each of the sample masses (1 ) by means of sensor springs (21 ), and the sensor springs (21 ) allow deflection of the sensor mass (20) within the plane of the sample mass (1 ) or the X-Y plane, and orthogonal to the radial drive direction of the sample masses (1 ).

83. 发明公开

EP2037285A4 COMBINED SENSOR 审中-公开
标题翻译：组合传感器
公开(公告)号：EP2037285A4
公开(公告)日：2012-11-14
申请号：EP07805914
申请日：2007-08-09
申请人： PANASONIC CORP
发明人： AIZAWA HIROYUKI , OHUCHI SATOSHI
IPC分类号： G01P15/12 , G01C19/56 , G01C19/5607 , G01C19/5628 , G01D21/02 , G01P15/09 , G01P15/14 , H01L29/84
CPC分类号： G01C19/5719 , G01P15/0922 , G01P15/123 , G01P15/18 , G01P2015/0842

84. 发明授权

EP2327959B1 Micromachined gyroscope 有权
标题翻译： Mikromechanisches陀螺仪
公开(公告)号：EP2327959B1
公开(公告)日：2012-09-12
申请号：EP11152369.2
申请日：2003-02-06
申请人： Analog Devices, Inc.
发明人： Geen, John A.
IPC分类号： G01C19/56
CPC分类号： G01C19/5719 , Y10T74/12

85. 发明公开

EP2489981A2 Angular velocity sensor and electronic device 审中-公开
标题翻译：角速度传感器和电子装置
公开(公告)号：EP2489981A2
公开(公告)日：2012-08-22
申请号：EP12155738.3
申请日：2012-02-16
申请人： Seiko Epson Corporation
发明人： Kanemoto, Kei
IPC分类号： G01C19/56
CPC分类号： G01C19/56 , G01C19/5719 , G01C19/5733 , G01C19/5747
摘要： A physical quantity sensor includes: a substrate; a first displacement member and a second displacement member disposed in a spatial plane on the substrate and having rotation shafts, respectively; fixed electrodes disposed on the substrate at positions opposed to the first displacement member and the second displacement member; a support member which supports the respective rotation shafts of the first displacement member and the second displacement member; fixing members which support the support member via a spring unit; and a driving unit which oscillates the support member in an oscillation direction. Each of the first displacement member and the second displacement member shifts in a direction perpendicular to the spatial plane around an axis of the corresponding rotation shaft. Each of the rotation shafts of the first displacement member and the second displacement member is disposed at a position shifted from the center of gravity of the corresponding displacement member. The shift direction of the rotation shaft of the first displacement member from the center of gravity of the displacement member is opposite to the shift direction of the rotation shaft of the second displacement member from the center of gravity of the second displacement member.

86. 发明授权

EP2256504B1 Low vibration rectification in a closed-loop, in-plane mems device 失效
标题翻译：校正在闭环小的振动，平面MEMS装置。
公开(公告)号：EP2256504B1
公开(公告)日：2012-08-22
申请号：EP10173517.3
申请日：2006-02-09
申请人： Honeywell International Inc.
发明人： Lafond, Peter
IPC分类号： G01P21/00 , G01P15/08
CPC分类号： G01C19/5719 , G01P15/125 , G01P15/131

87. 发明公开

EP2475960A1 DOPPELAXIALER, SCHOCKROBUSTER, DREHRATENSENSOR MIT INEINANDERLIEGENDEN, LINEAR SCHWINGENDEN SEISMISCHEN ELEMENTEN 有权转让
标题翻译： DOPPELAXIALER，SHOCK HARDY，网，带卧旋转速率传感器，直线振动地震ELEMENTS
公开(公告)号：EP2475960A1
公开(公告)日：2012-07-18
申请号：EP10750135.5
申请日：2010-09-09
申请人： Continental Teves AG & Co. oHG
发明人： GÜNTHNER, Stefan , LOHMANN, Jasmin , SCHMID, Bernhard , SIVARAMAN, Ramnath
IPC分类号： G01C19/56
CPC分类号： G01C19/574 , G01C19/5642 , G01C19/5719
摘要： The invention relates to a micromechanical yaw rate sensor, comprising a substrate, the base area of which is oriented parallel to the x-y plane of a Cartesian coordinate system (x, y, z), wherein the yaw rate sensor comprises at least one first (1) and a second seismic mass (2), which are coupled to at least one first drive device (14), and are mounted, such that the first and second seismic masses (2) are driven in a drive mode so as to deflect in phase opposition, wherein the yaw rate sensor is designed such that it can detect yaw rates about at least two sensitive axes (z, y) that are substantially perpendicular to each other, wherein at least the second seismic mass (2) is designed as a frame, which surrounds the first seismic mass (1) at least partially with respect to the positioning in the x-y plane.

88. 发明公开

EP2269000A4 METHOD AND SYSTEM FOR FORMING AN ELECTRONIC ASSEMBLY HAVING INERTIAL SENSORS MOUNTED THERETO 失效转让
标题翻译：形成电子设备符合事实的方法和系统，安装传感器低迷
公开(公告)号：EP2269000A4
公开(公告)日：2011-11-23
申请号：EP09732749
申请日：2009-04-06
申请人： HONEYWELL INT INC
发明人： FLY BRIAN E , MOYA DAVE
IPC分类号： G01C19/56 , G01C21/16 , G01P1/02 , G01P15/125 , G01P15/18
CPC分类号： G01P15/125 , G01C19/5719 , G01C21/16 , G01P1/023 , G01P15/18 , G01P2015/0831

89. 发明公开

EP2256460A1 Quadrature Compensation Technique for Vibrating Gyroscopes 审中-公开
标题翻译： Quadratur-KompensationfürSchwingungsgyroskope
公开(公告)号：EP2256460A1
公开(公告)日：2010-12-01
申请号：EP10173549.6
申请日：2003-04-07
申请人： Northrup Grumman Corporation
发明人： Wyse, Stanley F.
IPC分类号： G01C19/56
CPC分类号： G01C19/5719 , G01C19/56
摘要： Quadrature error occurs in vibrating gyroscopes because of manufacturing flaws that permit the sensing element (proof mass) to oscillate about an axis that is not orthogonal to the output axis. This creates an oscillation about the output axis that has a component of the sensing element's vibration acceleration. This output axis oscillation, which is in phase with the driven acceleration of the sensing element, is called quadrature torque since it is ninety degrees out of phase with the angular rate induced acceleration. In order to eliminate this output axis oscillation, the present invention generates sinusoidal forces on the dither mass by applying dc voltages on the dither mass pickoff electrodes. These forces create a counter dither motion about the output axis that cancels the output axis oscillation generated by the non-orthogonal dither axis.
摘要翻译：由于制造缺陷使得感测元件（检验质量）围绕不与输出轴正交的轴振荡，所以在振动陀螺仪中发生正交误差。这产生了一个关于感应元件的振动加速度分量的输出轴的振荡。与感应元件的驱动加速度相同的输出轴振荡被称为正交转矩，因为它与角速率感应加速度相差90度。为了消除该输出轴振动，本发明通过在抖动质量传感电极上施加直流电压来产生抖动质量上的正弦力。这些力产生关于输出轴的反抖动运动，其消除由非正交抖动轴产生的输出轴振动。

90. 发明授权

EP1173773B1 DYNAMICALLY BALANCED MICROELECTROMECHANICAL DEVICES 有权
标题翻译：动态平衡微机电装置
公开(公告)号：EP1173773B1
公开(公告)日：2010-04-28
申请号：EP00918314.6
申请日：2000-03-23
申请人： THE CHARLES STARK DRAPER LABORATORY, INC.
发明人： WEINBERG, Marc, S. , KUMAR, Kaplesh , KING, A., Thomas
IPC分类号： G01P9/04 , B23K26/02 , G01C19/56 , B23K26/00
CPC分类号： G01C25/005 , B23K26/032 , B23K26/1224 , B23K26/123 , B23K26/125 , G01C19/5719

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