专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

71. 发明授权

EP0789431B1 Maintenance strategy control system for gas discharge lasers 失效
标题翻译：用于气体放电激光器的维护策略控制系统
公开(公告)号：EP0789431B1
公开(公告)日：2001-10-17
申请号：EP97300339.5
申请日：1997-01-20
申请人： Cymer, Inc.
发明人： Das, Palash P. , Stephenson, Gary R.
IPC分类号： H01S3/097 , H01S3/225 , H01S3/10 , G01R31/00
CPC分类号： H01S3/225 , H01S3/10

72. 发明公开

EP1137126A1 ELECTRIC DISCHARGE EXCITATION EXCIMER LASER 有权
标题翻译： DURCH ELEKTRISCHE ENTLADUNG ANGEREGTER EXCIMERLASER
公开(公告)号：EP1137126A1
公开(公告)日：2001-09-26
申请号：EP99973186.2
申请日：1999-11-26
申请人： EBARA CORPORATION , KOMATSU LTD.
发明人： Shinozaki, Hiroyuki , Sekiguchi, Shinichi , Barada, Toshimitsu , Nakazawa, Toshiharu
IPC分类号： H01S3/036 , F16C32/04
CPC分类号： F16C32/047 , H01S3/036 , H01S3/225
摘要： A long-life electric discharge excitation excimer laser improved in that the laser gas in the laser enclosure hardly degrades, no dust enters the inside of the magnetic bearing and the inside of the motor, and damage to the portions in contact with the laser gas is little. The electric discharge excitation excimer laser is characterized by comprising a housing connected to both ends of a laser enclosure where the laser gas is sealed and a pair of main discharge electrodes are housed, a cross flow fan rotatably supported at both ends by a magnetic bearing housed in the housing and adapted to produce a laser gas flow, a motor housed in the housing and adapted to rotate the cross flow fan, a laser gas passage extending through the gap between the rotor side and the-stator side of the magnetic bearing and the gap between the rotor side and the stator side of the motor along the full length of the housing and communicating with the laser enclosure, a laser gas introduction passage extending from the inside of the laser enclosure and communicating with the laser gas passage at one end of the housing, and a filter disposed in the laser gas introduction passage.
摘要翻译：长寿命放电励磁准分子激光器的改进在于激光外壳中的激光气体几乎不降解，不会有灰尘进入到磁轴承和电机内部，并且与激光气体接触的部分损坏是小。放电激发准分子激光器的特征在于，包括连接到激光器外壳的两端的壳体，其中激光气体被密封并且容纳一对主放电电极，横流风扇由两个端部旋转地支撑，在壳体中并且适于产生激光气流，马达容纳在壳体中并且适于旋转横流风扇，激光气体通道延伸穿过磁轴承的转子侧和定子侧之间的间隙和沿着壳体的整个长度的电机的转子侧和定子侧之间的间隙，与激光外壳连通，激光气体引入通道从激光外壳的内部延伸并与激光气体通道的一端连通壳体和布置在激光气体导入通道中的过滤器。

73. 发明公开

EP1119082A2 Cross-flow fan for discharge excited gas laser 审中-公开
标题翻译： Querstromventilatorfüreinen durch Entladung angeregten Gaslaser
公开(公告)号：EP1119082A2
公开(公告)日：2001-07-25
申请号：EP01100763.0
申请日：2001-01-12
申请人： USHIODENKI KABUSHIKI KAISHA
发明人： Minobe, Takeshi , Miyasu, Katuoki , Atushi, Moto
IPC分类号： H01S3/036
CPC分类号： H01S3/036 , H01S3/225
摘要： To provide a cross-flow fan that is ideal for use in an excimer laser device or fluoride laser device that is capable of high-speed rotation, that has high mechanical strength even at high-speed rotation and that does not suffer deformation, a rotating shaft is mounted passing through the center of cross-flow fan for a discharge excitation gas laser device. Use of the rotating shaft facilitates alignment of the rotating shaft and high-speed rotation is possible because the mechanical strength is raised. Furthermore, magnetic bearings can be used since misalignment does not develop. The flow velocity is not adversely affected even if a rotating shaft, as noted above, is utilized since a cross-flow fan for gas circulation in an excimer laser device is used under high-head, low-flow velocity conditions. Deformation due to shaft weight can be reduced since the weight of the rotating shaft can be lowered by providing a hollow section within the rotating shaft, and that increases the inherent oscillation frequency which permits still higher speeds.
摘要翻译：为了提供一种理想用于能够高速旋转的准分子激光装置或氟化物激光装置的横流风扇，即使在高速旋转也具有高机械强度并且不会发生变形的旋转轴穿过横流风扇的中心，用于放电激发气体激光装置。旋转轴的使用有助于旋转轴的对准，并且由于机械强度升高，因此可以进行高速旋转。此外，可以使用磁性轴承，因为不会发生不对准。即使使用如上所述的旋转轴，流速也不会受到不利影响，因为用于准分子激光装置中用于气体循环的横流风扇用于高压头，低流速条件下。由于通过在旋转轴内设置中空部，能够降低旋转轴的重量，能够降低因轴重而导致的变形，能够提高允许更高速度的固有振动频率。

74. 发明公开

EP1108274A1 A BLOWER ASSEMBLY FOR A PULSED LASER SYSTEM INCORPORATING CERAMIC BEARINGS 审中-公开
标题翻译：陶瓷商店获取脉冲激光系统，风扇单元
公开(公告)号：EP1108274A1
公开(公告)日：2001-06-20
申请号：EP99938945.5
申请日：1999-08-02
申请人： Cymer, Inc.
发明人： WEBB, R., Kyle
IPC分类号： H01S3/041 , H01S3/225
CPC分类号： H01S3/036 , H01S3/225
摘要： A blower assembly (70) for circulating gases in a laser chamber (10). The blower assembly (70) includes a driving assembly (132) operatively engaged to a drive side shaft (72) for rotating a fan assembly (102). A first bearing assembly (90A) supports the drive side shaft (72). The blower assembly (70) may further include an idle side shaft (73) for supporting the fan assembly (102) and a second bearing assembly (90B) circumscribing the idle side shaft (73). The driving assembly (132) includes a motor (130) disposed over a rotor (110). The fan assembly (102) includes a pair of hubs (104A, 104B) supporting a plurality of blades (110). The first and second bearing assemblies (90A, 90B) comprise a ceramic compound, such as silicon nitride (Si3N4), and are lubricated with a synthetic oil, such as perfluoropolyalkylether (PFPE).

75. 发明公开

EP1102368A2 Narrow-band excimer laser apparatus 审中-公开
标题翻译： Schmalband-准分子Laservorrichtung
公开(公告)号：EP1102368A2
公开(公告)日：2001-05-23
申请号：EP00124355.9
申请日：2000-11-17
申请人： Ushio Research Institute of Technology, Inc. , NEC Corporation
发明人： Tada, Akifumi
IPC分类号： H01S3/081 , H01S3/225
CPC分类号： H01S3/0812 , H01S3/225
摘要： An excimer laser apparatus using a bandwidth-narrowing optical system including a beam diameter-enlarging optical system and a Littrow mounting reflection type diffraction grating is made suitable for use as a laser light source for semiconductor lithography or the like by surmounting the limit to bandwidth narrowing due to wavefront distortion induced by the reflection type diffraction grating. In an excimer laser apparatus having a bandwidth-narrowing optical system including a Littrow mounting reflection type diffraction grating and a combination of a beam diameter-enlarging optical system and a slit placed on the entrance side of the reflection type diffraction grating, diffracted wavefront distortion (a measured value for He-Ne laser light) within the laser irradiation area of the reflection type diffraction grating in Littrow mounting is not more than λ/10, where λ is a measuring wavelength.
摘要翻译：使用包括光束扩大光学系统和Littrow安装反射型衍射光栅的带宽窄化光学系统的准分子激光装置适合用作半导体光刻等的激光光源，从而克服了带宽变窄的极限由于由反射型衍射光栅引起的波前失真。在具有包括Littrow安装反射型衍射光栅的带宽窄化光学系统和放置在反射型衍射光栅的入射侧的光束直径扩大光学系统和狭缝的组合的准分子激光装置中，衍射波前失真在Littrow安装中的反射型衍射光栅的激光照射区域内的He-Ne激光的测量值不大于λ/ 10，其中λ是测量波长。

76. 发明公开

EP1037339A3 Very stable excimer or molecular fluorine laser 有权
标题翻译： Besondes稳定准分子或分子氟激光
公开(公告)号：EP1037339A3
公开(公告)日：2001-04-25
申请号：EP00105119.2
申请日：2000-03-10
申请人： Lambda Physik AG
发明人： Borneis, Stefan , Brunwinkel, Klaus , Stamm, Uwe, Dr. , Voss, Frank
IPC分类号： H01S3/225
CPC分类号： G03F7/70025 , G03F7/70041 , G03F7/70575 , H01S3/036 , H01S3/134 , H01S3/225
摘要： A technique of stabilizing during operation a gas mixture with a gas composition initially provided within a discharge chamber of an excimer or molecular fluorine gas discharge laser includes monitoring a temporal pulse shape of the laser beam and adjusting and/or determining the status of the gas mixture based on the monitored temporal pulse shape. The monitored temporal pulse shape is preferably compared with a reference temporal pulse shape. The difference or deviation between the monitored temporal pulse shape and a reference temporal pulse shape is calculated. The amounts of and intervals between gas replenishment actions are determined based on the calculated deviation. The energy of the beam is also monitored and the driving voltage and gas actions are adjusted to stabilize the energy, energy stability and/or energy dose.

77. 发明公开

EP1008210A4 AERODYNAMIC CHAMBER DESIGN FOR HIGH PULSE REPETITION RATE EXCIMER LASERS 失效
标题翻译：气动腔设计FOR HIGH受激准分子激光的脉冲重复率
公开(公告)号：EP1008210A4
公开(公告)日：2001-04-18
申请号：EP98907360
申请日：1998-02-04
申请人： CYMER INC
发明人： MORTON RICHARD G , FOMENKOV IGOR V , PARTLO WILLIAM NORMAN
IPC分类号： H01S3/097 , H01S3/036 , H01S3/225 , H01S1/00
CPC分类号： H01S3/036 , H01S3/225
摘要： An excimer laser chamber capable of arc-free operation at repetitive pulse rates of 1 kHz or greater is provided. The chamber balances the electrode design criteria required to produce a well-defined discharge channel with the flow design criteria required to achieve high clearing rates at comparatively high blower efficiency. A ceramic insulator located on either side of the cathode/pre-ionizer assembly enhances the flow of gas through the discharge region by reducing the turbulence in the electrode region. A series of specifically designed flow vanes further enhance the gas flow. The gas exiting the blower fan is guided into the discharge region with one vane. The anode support bar is extended downwardly, thus improving the efficiency of the tangential blower and also minimizing the amount of gas bypassing the discharge region. A pair of vanes downstream from the discharge region smoothly direct the heated gas towards the heat exhanger. These vanes reduce the collapse of the flow velocity as it leaves the electrode region, thus minimizing turbulence.

78. 发明公开

EP1075061A2 Automatic fluorine concentration control system for excimer laser 有权
标题翻译：自动化Flukeonentent-SteuersystemfürExcimerlaser
公开(公告)号：EP1075061A2
公开(公告)日：2001-02-07
申请号：EP00116029.0
申请日：2000-07-26
申请人： Cymer, Inc.
发明人： Padmabandu, Gamaralalage G. , Das, Palash P. , Watson, Tom A. , Zambon, Paolo
IPC分类号： H01S3/225 , H01S3/036
CPC分类号： G03F7/70025 , G03F7/70041 , G03F7/70358 , G03F7/70558 , G03F7/70575 , H01S3/036 , H01S3/134 , H01S3/225 , H01S3/2251 , H01S3/2256
摘要： An excimer laser system with an automatic fluorine control system to permit precise control of the fluorine concentration within an F 2 "sweet spot" in a gas discharge laser chamber. This is done with a computer control system which monitors laser parameters, determines ΔE/ΔV, the change of pulse energy with voltage, and automatically and precisely controls the fluorine concentration based on ΔE/ΔV without the need to actually measure the fluorine concentration.
The present invention is especially useful in lithography environments in which photo resist having a wide range of sensitivity are used. The present invention permits operation of the laser at substantially maximum efficiency over a wide range of pulse energy outputs.
摘要翻译：一种具有自动氟控制系统的准分子激光系统，可以精确控制气体放电激光室中F2“甜点”内的氟浓度。这是通过电脑控制系统进行的，该系统监视激光参数，确定DELTA E / DELTA V，脉冲能量随电压的变化，并根据DELTA E / DELTA V自动精确控制氟浓度，无需实际测量氟浓度。本发明在其中使用具有宽范围的光敏抗蚀剂的光刻环境中特别有用。本发明允许激光器在宽范围的脉冲能量输出上以最大的效率运行。

79. 发明公开

EP1056171A2 Discharge-pumped excimer laser device 有权
标题翻译： Entladungsgepumpter准分子激光
公开(公告)号：EP1056171A2
公开(公告)日：2000-11-29
申请号：EP00111269.7
申请日：2000-05-25
申请人： EBARA CORPORATION
发明人： Sekiguchi, Shinichi , Shinozaki, Hiroyuki , Barada, Toshimitsu , Nakazawa, Toshiharu
IPC分类号： H01S3/225 , H01S3/03
CPC分类号： F16C32/047 , H01S3/03 , H01S3/036 , H01S3/225
摘要： A discharge-pumped excimer laser device has a casing (1), a pair main discharge electrodes (2), a cross-flow fan (3) for producing a high-speed laser gas flow between the main discharge electrodes (2), the cross-flow fan (3) having a rotatable shaft (4) projecting from opposite ends thereof, magnetic bearings (8,9,10,11), the rotatable shaft (4) being rotatably supported by the bearings, protective bearings (13,14,15) for supporting the rotatable shaft (4) when the magnetic bearings are not in operation, and a motor (12) for actuating the cross-flow fan (3). The magnetic bearings include radial magnetic bearings (8,9,10) disposed on the opposite ends of the rotatable shaft (4). One of the radial magnetic bearings which is disposed closely to the motor (12) has a bearing rigidity greater than the bearing rigidity of the magnetic bearing that is disposed remotely from the motor.
摘要翻译：排出泵浦准分子激光装置具有壳体（1），一对主放电电极（2），用于在主放电电极（2）之间产生高速激光气流的横流风扇（3），横流风扇（3）具有从其两端突出的可旋转轴（4），所述旋转轴（4）由所述轴承可旋转地支撑，所述旋转轴（4,9） 14,15），用于当所述磁轴承不工作时支撑所述可旋转轴（4），以及用于致动所述横流风扇（3）的马达（12）。磁性轴承包括设置在可旋转轴（4）的相对端上的径向磁轴承（8,9,10）。靠近电动机（12）设置的径向磁轴承之一具有大于远离电动机的磁性轴承的轴承刚性的轴承刚性。

80. 发明公开

EP1012929A2 LASER WITH LINE NARROWING OUTPUT COUPLER 失效
标题翻译：激光与线窄行输出耦合器
公开(公告)号：EP1012929A2
公开(公告)日：2000-06-28
申请号：EP98948059.5
申请日：1998-07-27
申请人： Cymer, Inc.
发明人： ERSHOV, Alexander I.
IPC分类号： H01S3/00
CPC分类号： G03F7/70483 , G03F7/70575 , H01S3/0812 , H01S3/1055 , H01S3/225
摘要： A laser (2) having a line-narrowing output coupler. This output coupler (5) reflects a portion of light generated in the gain medium (3) and provides a spectral narrowing of that reflected light. A portion of the line narrowed beam is directed back into the gain medium for further amplification and a portion is transmitted as a part of the laser output. In a preferred embodiment, the laser is line narrowed in the rear as well as by the line narrowing output coupler.
摘要翻译：具有线缩窄输出耦合器的激光器（2）。该输出耦合器（5）反射在增益介质（3）中产生的一部分光并提供该反射光的光谱变窄。线变窄的光束的一部分被引导回增益介质用于进一步放大，并且一部分作为激光输出的一部分被传输。在一个优选实施例中，激光器在后部以及通过线窄化输出耦合器线变窄。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式