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71. 发明公开

EP1032097A3 Laser oscillating apparatus 有权
公开(公告)号：EP1032097A3
公开(公告)日：2001-09-12
申请号：EP00301496.6
申请日：2000-02-25
申请人： Ohmi, Tadahiro , CANON KABUSHIKI KAISHA
发明人： Ohmi, Tadahiro , Suzuki, Nobumasa , Shinohara, Toshikuni , Ohsawa, Hiroshi , Hirayama, Masaki , Tanaka, Nobuyoshi
IPC分类号： H01S3/0973 , H01S3/225 , H01S3/03 , H01L21/027
CPC分类号： G03F7/70025 , H01S3/0315 , H01S3/0975 , H01S3/225
摘要： In a slot array structure, electromagnetic wave emission which is uniform as a whole over the length of a laser tube is realized to allow uniform laser emission with minimum energy loss. Slots (10) are formed at a predetermined pitch in a long end face (H plane) of each waveguide (1) along a central line (m) in the longitudinal direction of the H plane to be alternately located on the left and right sides of the central line (m) and spaced apart from the central line (m) by a distance (d).

72. 发明公开

EP1026796A3 Laser oscillating apparatus, exposure apparatus using the same, and device fabrication method 有权
标题翻译： Laservorrichtung，Belichtungsapparat unter Verwendung derselben und Herstellungsverfahren
公开(公告)号：EP1026796A3
公开(公告)日：2001-09-12
申请号：EP00300719.2
申请日：2000-01-31
申请人： TADAHIRO OHMI , CANON KABUSHIKI KAISHA
发明人： Ohmi, Tadahiro , Suzuki, Nobumasa, c/o Canon Kabushiki Kaisha , Tanaka, Nobuyoshi, c/o Canon Kabushiki Kaisha , Hirayama, Masaki, c/o Canon Kabushiki Kaisha , Ohsawa, Hiroshi, c/o Canon Kabushiki Kaisha , Shinohara, Toshikuni, c/o Canon Kabushiki Kaisha
IPC分类号： H01S3/0973 , H01S3/225 , H01S3/03 , H01L21/027
CPC分类号： G03F7/70025 , H01S3/0315 , H01S3/0385 , H01S3/225
摘要： In a laser oscillating apparatus for exciting a laser gas in a laser tube by introducing an electromagnetic wave from a waveguide (1) into the laser tube (2) through a plurality of slots (10) formed in a waveguide wall, and generating a laser beam by resonating light emitted from the laser gas, the slots (10) are formed in a line such that their longitudinal direction is consistent with the longitudinal direction of the waveguide (1), and a metal wall (12) is so formed as to surround these slots. This metal wall (12) forms a gap as a microwave passage from the slots (10) to a window (15) in the laser tube wall, thereby spacing the laser tube wall apart from the slots (10) by a predetermined distance.
摘要翻译：一种激光振荡装置，其特征在于，通过在波导管中形成的多个槽（10）将来自波导管（1）的电磁波引入到激光管（2）中来激励激光管中的激光气体，并产生激光通过谐振来自激光气体的光的光束，槽（10）形成为使得其纵向方向与波导（1）的纵向一致的线，并且金属壁（12）形成为围绕这些插槽。该金属壁（12）形成从激光管壁中的槽（10）到窗（15）的微波通道的间隙，从而将激光管壁与槽（10）分开预定距离。

73. 发明公开

EP1128501A2 Electrode for gas laser 有权
标题翻译： ElektrodenanordnungfürGas-Laser
公开(公告)号：EP1128501A2
公开(公告)日：2001-08-29
申请号：EP01104169.6
申请日：2001-02-21
申请人： TuiLaser AG
发明人： Strowitzki, Claus , Kodeda, Hans
IPC分类号： H01S3/038 , H01S3/225
CPC分类号： H01S3/038 , H01S3/225
摘要： An electrode arrangement for a gas laser is provided. The electrode arrangement includes an elongated high voltage electrode (104), an elongated ground electrode (105) disposed adjacent to the high voltage electrode, a discharge gap between the two electrodes, an insulator element (110), a high voltage conductor (108) having a first end connected to the high voltage electrode and extending through the insulator element, and a shadow plate (210) interposed between the discharge gap and the insulator element. The electrode arrangement may be employed in a variety of gas lasers, including excimer lasers.
摘要翻译：提供了一种用于气体激光器的电极装置。电极装置包括细长的高压电极（104），与高压电极相邻设置的细长接地电极（105），两个电极之间的放电间隙，绝缘体元件（110），高压导体（108）具有连接到高压电极并延伸穿过绝缘体元件的第一端和插入在放电间隙和绝缘体元件之间的阴影板（210）。电极装置可用于各种气体激光器，包括准分子激光器。

74. 发明公开

EP1128498A2 Dedusting unit for a laser optical element 有权
标题翻译：装置用于从光学激光元件中去除尘埃
公开(公告)号：EP1128498A2
公开(公告)日：2001-08-29
申请号：EP01104148.0
申请日：2001-02-21
申请人： TuiLaser AG
发明人： Strowitzki,Claus
IPC分类号： H01S3/034 , H01S3/225
CPC分类号： H01S3/0346 , H01S3/225
摘要： A dedusting unit (115) for a laser optical element is provided. The dedusting unit comprises a high-voltage duct (301) comprising a high-voltage conducting core (304) having a first end and a second end and an insulator element (303) disposed around the core. The first end of the core is connectable to a high voltage power supply and the second end of the core is electrically connected to a wire loop (302). The dedusting unit may be used in connection with a variety of gas lasers. In use, the dedusting unit is mounted to the laser tube (101) so that the wire loop is disposed inside the gas laser tube in proximity to an optical element (116) to be protected from dust. The dedusting unit is further mounted so that the wire loop is transverse to the resonating path of the laser light within the laser tube so that the resonating laser light may pass through the wire loop without being obstructed by the wire loop.

75. 发明公开

EP1110282A1 EXCIMER LASER WITH PULSE MULTIPLIER 审中-公开
标题翻译：准分子激光PULSVERVIELFACHER
公开(公告)号：EP1110282A1
公开(公告)日：2001-06-27
申请号：EP99943806.2
申请日：1999-08-18
申请人： Cymer, Inc.
发明人： MORTON, Richard, G. , PARTLO, William, N.
IPC分类号： H01S3/10 , H01S3/225
CPC分类号： H01S3/0057 , H01S3/225
摘要： A pulse multiplier optical system (79) receives an excimer laser output beam and produces a multiplier output beam having a larger number of pulses, each with substantially reduced intensity values as compared to the laser output beam. The present invention is particularly important as an improvement to the ArF excimer laser to reduce two-photon absorption damage to optical equipment in lithography machines. For damage mechanisms involving two-photon processes, such as the compaction and solarization of fused silica in the DUV spectral region, a factor of 4 reduction in peak power decreases the quantity of two-photon absorption damage done by the synthesized 4-pulse burst by a factor of about 16 compared to delivering all of the energy in the single pulse emitted by the laser. In preferred embodiments, the pulse multiplier system is contained in a module which can be pre-aligned and quickly installed on the excimer laser.

76. 发明公开

EP1100167A2 F2 laser with visible red and IR control 有权
标题翻译： F2-Laser mit Kontrolle des sichtbaren roten und IR-Bereichs
公开(公告)号：EP1100167A2
公开(公告)日：2001-05-16
申请号：EP00111119.4
申请日：2000-05-23
申请人： Cymer, Inc.
发明人： Onkels, Eckehard D. , Sandstrom, Richard L. , Duffey, Thomas P.
IPC分类号： H01S3/225 , H01S3/097 , H01S3/03
CPC分类号： H01S3/10092 , G03F7/70025 , G03F7/70041 , G03F7/70483 , G03F7/70558 , G03F7/70575 , H01S3/036 , H01S3/225
摘要： A reliable, modular, production quality F 2 excimer laser capable of producing, at repetition rates in the range of 1,000 to 2,000 Hz or greater, laser pulses with pulse energies greater than 10 mJ with a full width half, maximum bandwidth of about 1 pm or less at wavelength in the range of 157 nm. Laser gas concentrations are disclosed for reducing unwasted infrared emissions from the laser. Also disclosed are UV energy detectors which are substantially insensitive to infrared light. Preferred embodiments of the present invention can be operated in the range of 1000 to 4000 Hz with pulse energies in the range of 10 to 5 mJ with power outputs in the range of 10 to 40 watts. Using this laser as an illumination source, stepper or scanner equipment can produce integrated circuit resolution of 0.1 µm or less. Replaceable modules include a laser chamber and a modular pulse power system.
In a preferred embodiment the laser was tuned to the F 2 157.6 nm line using a set of two external prisms. In a second preferred embodiment the laser is operated broad band and the 157.6 nm line is selected external to the resonance cavity. In a third preferred embodiment a line width of 0.2 pm is provided using injection seeding. Another embodiment utilizes a grating for line selection and increases the tuning range by operating the laser at a pressure in excess of 4 atmospheres.
摘要翻译：一种可靠，模块化，生产质量高的F2准分子激光器，其能够以1,000至2000Hz或更大的重复频率产生具有大于10mJ的脉冲能量的激光脉冲，全宽度为一半，最大带宽为约1pm，在157nm范围内的波长较小。公开了激光气体浓度以减少来自激光器的未焙烧的红外发射。还公开了对红外光基本上不敏感的紫外线能量检测器。本发明的优选实施例可以在1000至4000Hz的范围内操作，脉冲能量在10至5mJ的范围内，功率输出在10至40瓦的范围内。使用该激光器作为照明源，步进器或扫描仪设备可以产生0.1微米或更小的集成电路分辨率。可更换的模块包括激光室和模块脉冲电源系统。在优选实施例中，使用一组两个外部棱镜将激光器调谐到F2 157.6nm线。在第二优选实施例中，激光器被操作为宽带，并且157.6nm线选择在谐振腔外部。在第三优选实施例中，使用注射接种提供0.2μm的线宽。另一个实施例利用光栅进行线选择，并通过在超过4个大气压的压力下操作激光来增加调谐范围。

77. 发明公开

EP1021856A4 NARROW BAND EXCIMER LASER 有权
标题翻译： SCHMALBANDIGER EXCIMERLASER
公开(公告)号：EP1021856A4
公开(公告)日：2001-03-21
申请号：EP98943303
申请日：1998-08-21
申请人： CYMER INC
发明人： ISHIHARA TOSHIHIKO , HOFMANN THOMAS , DAS PALASH P , ERSHOV ALEXANDER I
IPC分类号： H01S3/038 , G03F7/20 , H01S3/02 , H01S3/03 , H01S3/034 , H01S3/036 , H01S3/08 , H01S3/0971 , H01S3/1055 , H01S3/225
CPC分类号： G03F7/70025 , G03F7/70041 , G03F7/70558 , G03F7/70575 , H01S3/02 , H01S3/03 , H01S3/036 , H01S3/08009 , H01S3/0971 , H01S3/225 , H01S3/2251 , H01S3/2256
摘要： A very narrow band pulse excimer laser capable of producing pulses at a rate in the range of about 500 to 2000 Hz with enhanced energy dose control and reproducibility. A prior art burst mode 'slug effect' occurring at one gas circulation time after the beginning of a burst of pulses is eliminated by the addition of a minute quantity of oxygen. In a preferred embodiment very narrow bandwidth is achieved by reducing fluorine partial pressure to less than 0.10 percent and by increasing the reflectance of the output coupler to greater than 25 percent. In a preferred embodiment, prior art fused silica beam expansion prisms used in the prior art line narrowing module were replaced with calcium fluoride prisms.
摘要翻译：本发明提供了一种非常窄带脉冲准分子激光器，其能够以增强的能量剂量控制和再现性以大约500至2000Hz范围内的速率产生脉冲。将非常少量由氧气或重稀有气体（用于KrF激光器的氙气或氪气，或用于ArF激光器的氪气，氙气或氡气）组成的稳定添加剂加入气体混合物中。所进行的测试通过向KrF激光器添加约30ppm的氙气来显示出能量稳定性的显着改善。测试显示ArF激光器的性能提高，加入约6-10ppm的Xe或40ppm的Kr。在一个优选实施例中，通过将氟分压降低到小于0.10％并通过将输出耦合器的反射率增加到大于25％，在KrF激光器上实现非常窄的带宽。在一个优选实施例中，现有技术中用现有技术的线条变窄模块的熔融石英束膨胀棱镜被氟化钙棱镜代替。

78. 发明公开

EP1075060A2 Automatic fluorine concentration control system for excimer laser 有权
标题翻译：准分子激光自动氟浓度控制系统
公开(公告)号：EP1075060A2
公开(公告)日：2001-02-07
申请号：EP00116028.2
申请日：2000-07-26
申请人： Cymer, Inc.
发明人： Gong, Mengxiong , Carlesi, Jason R. , Binder, Michael C. , Das, Palash P.
IPC分类号： H01S3/225 , H01S3/036
CPC分类号： H01S3/03 , G03F7/70025 , G03F7/70041 , G03F7/70358 , G03F7/70558 , G03F7/70575 , H01S3/036 , H01S3/08009 , H01S3/134 , H01S3/225 , H01S3/2251 , H01S3/2256
摘要： An excimer laser system with an automatic fluorine control system to permit precise control of the fluorine concentration within an F 2 "sweet spot" in a gas discharge laser chamber. This is done with a computer control system which monitors laser parameters, determines ΔE/ΔV, the change of pulse energy with voltage, and automatically and precisely controls the fluorine concentration based on ΔE/ΔV without the need to actually measure the fluorine concentration.
摘要翻译：具有自动氟控制系统的准分子激光系统，可精确控制气体放电激光室中F2“甜蜜点”内的氟浓度。这是通过计算机控制系统完成的，该系统监测激光参数，确定ΔE/ΔV，脉冲能量随电压的变化，并基于ΔE/ΔV自动而精确地控制氟浓度，而无需实际测量氟浓度。

79. 发明公开

EP1054490A3 Line narrowed laser with spatial filter 有权
标题翻译：激光打印机Linienbreite und Raumfilter
公开(公告)号：EP1054490A3
公开(公告)日：2001-01-24
申请号：EP00109628.8
申请日：2000-05-05
申请人： Cymer, Inc.
发明人： Ershov, Alexander I. , Fomenkov, Igor V.
IPC分类号： H01S3/22 , H01S3/08 , G02B5/20
CPC分类号： G03F7/70025 , G03F7/70041 , G03F7/70575 , H01S3/08 , H01S3/08004 , H01S3/08009 , H01S3/225 , H01S3/2251 , H01S3/2256 , H01S3/2258
摘要： A line narrowed laser system (42) having a spatial filter (44) to filter light at wavelengths greater and/or smaller than a desired range of wavelengths. The laser system is line narrowed with a line narrowing mechanism (8,10,12,14,16) having a dispersive element which disperses laser light into wavelength dependent directions. By spatially filtering the resulting beam the bandwidth of the beam can be reduced substantially. There is also a reduction of beam energy as a result of the spatial filtering but this reduction is substantially less than some other known techniques for reducing bandwidths. A preferred spatial filter (44), for reducing the bandwidth of a line narrowed gas discharge laser, includes two cylindrical focusing lenses (46 and 48) separated by a distance equal to their focal lengths with a slit aperture (50) positioned at the common focal line. The spatial filtering technique of the present invention is a low cost technique, relatively easy to implement and does not significantly complicate laser operation as compared to some more elaborate systems for reducing laser bandwidth.
摘要翻译：具有空间滤波器（44）的线变窄的激光系统（42）以对波长更大和/或小于期望的波长范围的波长进行滤光。激光系统由具有将激光分散到波长相关方向的分散元件的线窄机构（8,10,12,14,16）而变窄。通过对所得到的光束进行空间滤波，可以显着地减小光束的带宽。作为空间滤波的结果，还有光束能量的减少，但是这种减少显着小于用于减少带宽的一些其它已知技术。用于减小线窄气体放电激光器的带宽的优选空间滤光器（44）包括两个圆柱形聚焦透镜（46和48），其间隔开等于其焦距的距离，其中狭缝孔径（50）位于共同的焦线与用于减少激光器带宽的一些更复杂的系统相比，本发明的空间滤波技术是一种低成本的技术，相对容易实现并且不会使激光器操作显着复杂化。

80. 发明公开

EP1054490A2 Line narrowed laser with spatial filter 有权
标题翻译：激光具有减少的线的宽度和空间滤波器
公开(公告)号：EP1054490A2
公开(公告)日：2000-11-22
申请号：EP00109628.8
申请日：2000-05-05
申请人： Cymer, Inc.
发明人： Ershov, Alexander I. , Fomenkov, Igor V.
IPC分类号： H01S3/22 , H01S3/08 , G02B5/20
CPC分类号： G03F7/70025 , G03F7/70041 , G03F7/70575 , H01S3/08 , H01S3/08004 , H01S3/08009 , H01S3/225 , H01S3/2251 , H01S3/2256 , H01S3/2258
摘要： A line narrowed laser system (42) having a spatial filter (44) to filter light at wavelengths greater and/or smaller than a desired range of wavelengths. The laser system is line narrowed with a line narrowing mechanism (8,10,12,14,16) having a dispersive element which disperses laser light into wavelength dependent directions. By spatially filtering the resulting beam the bandwidth of the beam can be reduced substantially. There is also a reduction of beam energy as a result of the spatial filtering but this reduction is substantially less than some other known techniques for reducing bandwidths. A preferred spatial filter (44), for reducing the bandwidth of a line narrowed gas discharge laser, includes two cylindrical focusing lenses (46 and 48) separated by a distance equal to their focal lengths with a slit aperture (50) positioned at the common focal line.
The spatial filtering technique of the present invention is a low cost technique, relatively easy to implement and does not significantly complicate laser operation as compared to some more elaborate systems for reducing laser bandwidth.

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