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    • 72. 发明公开
    • Multi-layer ceramic substrate and method for producing the same
    • KeramischerTrägerfürMehrfach-Schichten sowie Herstellungsverfahren
    • EP0929207A3
    • 2000-03-08
    • EP98124881.8
    • 1998-12-30
    • Murata Manufacturing Co., Ltd.
    • Sunahara, Hirofumi A170 Intellect. Property Dept.,
    • H05K3/46H05K1/16
    • H01L25/50H01L21/4857H01L23/5383H01L23/642H01L23/645H01L2924/0002H01L2924/09701H05K1/16H05K1/185H05K3/4629H05K2201/10636Y02P70/611Y10T29/4913Y10T428/24926H01L2924/00
    • The present invention provides a method for producing a high-density multi-layer ceramic substrate (1) with stable characteristics, the substrate (1) incorporating therein a passive component (10, 11) such as a high-precision capacitor or inductor. The method comprises the steps of providing compact blocks containing a green ceramic functional material to form passive components (10, 11); providing a composite green laminate which contains a ceramic green sheet having a plurality of ceramic green sheets comprising a ceramic insulating material and in which the compact blocks are built in pre-disposed spaces and a paste containing a metal inducing, during firing, oxidation reaction accompanied by expansion is provided in space between inside walls of the spaces and the compact blocks; firing the composite green laminate in a state in which the laminate is sandwiched by the sheet-like supports formed of green ceramics that cannot be sintered at the sintering temperature, so as to prevent shrinkage of the laminate; and removing the unsintered sheet-like supports.
    • 本发明提供了一种具有稳定特性的高密度多层陶瓷基板(1)的制造方法,其特征在于:衬底(1)内装有诸如高精度电容器或电感器的无源元件(10,11)。 该方法包括以下步骤:提供含有绿色陶瓷功能材料的紧凑块,以形成无源部件(10,11); 提供一种复合绿色层压体,其包含具有多个包含陶瓷绝缘材料的陶瓷生片的陶瓷生片,并且其中紧凑块被构建在预先设置的空间中,并且含有金属的糊料在烧制期间引起氧化反应伴随 通过膨胀在空间的内壁和紧凑的块之间的空间中设置; 在由烧结温度不能烧结的绿色陶瓷形成的片状载体夹持层压体的状态下烧成复合绿色层压体,以防止层叠体的收缩; 并除去未烧结的片状载体。