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71. 发明授权

EP1441209B1 Gas-selective permeable membrane and method for its production 有权
标题翻译：气体选择性permeabele膜以及它们的制造方法
公开(公告)号：EP1441209B1
公开(公告)日：2008-10-15
申请号：EP03028872.4
申请日：2003-12-16
申请人： VARIAN S.p.A.
发明人： Carboneri, Roberto , Vittozzi, Sandro
IPC分类号： G01M3/20 , B01D53/22
CPC分类号： B01D65/102 , B01D53/22 , B01D53/228 , B01D2257/11 , G01M3/205

72. 发明授权

EP1739308B1 Vacuum pump 有权
公开(公告)号：EP1739308B1
公开(公告)日：2008-06-18
申请号：EP05425468.5
申请日：2005-06-30
申请人： VARIAN S.p.A.
发明人： Maccarrone, Christian , Cerruti, Roberto, c/o Varian S.P.A.
IPC分类号： F04D19/04 , F04D27/02
CPC分类号： F04D19/042 , F04D27/0292

73. 发明授权

EP1484508B1 Compact vacuum pump 有权
标题翻译：紧凑型真空泵
公开(公告)号：EP1484508B1
公开(公告)日：2008-01-30
申请号：EP04009519.2
申请日：2004-04-22
申请人： VARIAN S.p.A.
发明人： Casaro, Fausto , Del Missier, Cinzia , Gotta, Romina Silvia , Maccarrone, Cristian
IPC分类号： F04D19/04 , H02K7/14
CPC分类号： F04D25/0606 , F04D19/044 , F04D19/046 , H02K7/14

74. 发明公开

EP1808685A2 Pressure sensor with vibrating member 有权
标题翻译： Drucksensor mit Schwingungselement
公开(公告)号：EP1808685A2
公开(公告)日：2007-07-18
申请号：EP07105760.8
申请日：2003-11-07
申请人： VARIAN S.p.A.
发明人： Maccarrone, Cristian , Correale, Raffaele , Busso, Mario
IPC分类号： G01L21/22
CPC分类号： G01L9/0016 , G01L9/0019 , G01L21/22
摘要： The invention concerns a pressure sensor including: a micro-electromechanical vibrating device, comprising a silicon substrate (15') onto which a multilayer vibrating assembly (321) is formed; a control device (21') of said assembly in order to make it oscillate relative to said substrate at the resonance frequency or at another known frequency; and a detector for detecting the actual frequency and/or amplitude of said oscillation. Since said actual frequency and/or amplitude are affected by the conditions, in particular the pressure, of the external environment, the variations of said frequency and said amplitude with respect to the values set by said control device can be used to measure pressure variations in the surrounding environment.
摘要翻译：本发明涉及一种压力传感器，包括：微机电振动装置，其包括形成多层振动组件（321）的硅衬底（15'）; 所述组件的控制装置（21'），以使其以共振频率或另一已知频率相对于所述衬底振荡; 以及用于检测所述振荡的实际频率和/或振幅的检测器。由于所述实际频率和/或振幅受到外部环境的条件特别是压力的影响，因此所述频率和所述振幅相对于由所述控制装置设定的值的变化可用于测量压力变化周边环境。

75. 发明公开

EP1739308A1 Vacuum pump 有权
标题翻译：真空泵
公开(公告)号：EP1739308A1
公开(公告)日：2007-01-03
申请号：EP05425468.5
申请日：2005-06-30
申请人： VARIAN S.p.A.
发明人： Maccarrone, Christian , Cerruti, Roberto, c/o Varian S.P.A.
IPC分类号： F04D19/04 , F04D27/02
CPC分类号： F04D19/042 , F04D27/0292
摘要： The present invention concerns a rotary vacuum pump (101) including a plurality of pumping stages obtained through the cooperation between alternate rotor discs (123) and stator discs or rings (115), at least one duct (135, 127) for introducing a gas or a gas mixture into the pump, said duct being interrupted by an electrically controllable valve (133), and an electronic control device (129) programmed to detect at least one operating parameter of the pump and to modify the configuration of said valve (133) so as to cause an increase or a decrease in the amount of gas passing through said duct (135) based on the detected value of said parameter. The invention further concerns a method of operating said pump, a pumping system including one or more such vacuum pumps and a method of operating said pumping system.
摘要翻译：本发明涉及一种旋转式真空泵（101），其包括通过交替的转子盘（123）和定子盘或环（115）之间的配合而获得的多个泵送级，至少一个用于将气体或气体混合物进入所述泵，所述管道被电控制阀（133）中断，以及电子控制装置（129），其被编程为检测所述泵的至少一个操作参数并且修改所述阀（133 ），以便基于所述参数的检测值引起通过所述管道（135）的气体量的增加或减少。本发明还涉及操作所述泵的方法，包括一个或多个这种真空泵的泵送系统以及操作所述泵送系统的方法。

76. 发明公开

EP1619400A1 Annular support for rolling bearings 有权
标题翻译： RingförmigerLaufstützkörperfürWälzlagern
公开(公告)号：EP1619400A1
公开(公告)日：2006-01-25
申请号：EP04103444.8
申请日：2004-07-20
申请人： VARIAN S.p.A.
发明人： Casaro, Fausto
IPC分类号： F16C27/04
CPC分类号： F16C27/04 , F01D25/164 , F04D29/059 , F04D29/668 , F16C2360/45
摘要： A support ring (1) for rolling bearings (11), especially for rolling bearings applied to rotors with very high rotation speed, such as rotors of rotary vacuum pumps, the ring comprising a pair of concentric cylindrical shells (3, 5) connected together by a plurality of oblique radial plates (9), at least one of said shells (3, 5) being circumferentially broken so as to define a plurality of shoes (7), each said shoe being connected to at least one of said radial plates (9), wherein said plates (9) are resilient and allow the radial displacement of said shoes (7) so as to restrain vibrations of the rotating portion.
摘要翻译：一种用于滚动轴承（11）的支撑环（1），特别是用于转动非常高的转子的滚动轴承（例如旋转式真空泵的转子），该环包括一对连接在一起的同心圆柱形壳体（3,5）通过多个倾斜径向板（9），所述壳体（3,5）中的至少一个周向断开以限定多个鞋子（7），每个所述鞋子连接到所述径向板中的至少一个（9），其中所述板（9）是弹性的并且允许所述鞋（7）的径向位移，以便抑制所述旋转部分的振动。

77. 发明公开

EP1577559A1 Vacuum pumping system 有权
标题翻译：真空系统
公开(公告)号：EP1577559A1
公开(公告)日：2005-09-21
申请号：EP04425172.6
申请日：2004-03-15
申请人： VARIAN S.p.A.
发明人： Maccarrone, Cristian , Titolo, Massimiliano
IPC分类号： F04C29/10 , F04B49/06
CPC分类号： F04D27/00 , F04B37/14 , F04B49/065 , F04C28/00 , F04C2220/10 , F04C2270/56 , F04C2270/80 , F04C2270/90 , F04D19/04
摘要： The present invention concerns a vacuum pumping system (1) comprising at least one vacuum pumping device (11; 31), including a vacuum pump (13; 33) and a local electronic control unit (15; 35) for monitoring and controlling the operating parameters of said pump, and a control station (51), remotely located relative to said at least one pumping device (11; 31) and equipped with a corresponding remote control unit (53); wherein said remote control unit (53) and said local control unit (15; 35) are equipped with wireless communication modules (27, 55; 47, 55) for communicating data and commands for controlling the operation of said at least one vacuum pumping device.

78. 发明公开

EP1406020A3 Vibrating pumping stage for vacuum pumps, and vacuum pump with vibrating pumping stages 有权
标题翻译：振动泵级真空泵和真空泵与摆动泵级
公开(公告)号：EP1406020A3
公开(公告)日：2005-01-12
申请号：EP03021648.5
申请日：2003-09-26
申请人： VARIAN S.p.A.
发明人： Correale, Raffaele
IPC分类号： F04D33/00
CPC分类号： F04D33/00 , F04B43/043 , F04B45/047
摘要： The invention concerns a micro-electro-mechanical vibrating pumping stage comprising a silicon substrate (15) on which there are formed a single-layer or multilayer oscillating assembly (27; 127; 227; 327) and a device controlling said membrane in order to make it oscillate with respect to said substrate. The invention further concerns a molecular vacuum pump incorporating said stage.

79. 发明公开

EP1484507A1 Process for manufacturing a stator for vacuum pump and stator obtained thereby 有权
标题翻译：一种用于制造定子的真空泵和根据该方法制造的定子的方法
公开(公告)号：EP1484507A1
公开(公告)日：2004-12-08
申请号：EP04009518.4
申请日：2004-04-22
申请人： VARIAN S.p.A.
发明人： Casaro, Fausto , Del Missier, Cinzia , Gotta, Romina Silvia , Maccarrone, Cristian
IPC分类号： F04D19/04
CPC分类号： F04D19/046
摘要： A process for manufacturing vacuum pump stators, and stators obtained thereby, comprising a first step in which a plurality of stator discs or rings (11a) are formed, preferably by pressing, and a second step in which said stator discs or rings (11a) are coaxially stacked and mutually rotated so as to form a stator surface having defined thereon at least one groove (13'; 15') extending in substantially axial direction with respect to the stator body.
摘要翻译：一种用于制造真空泵的定子的方法，和定子由此获得，包括：第一步骤，其中定子盘或环（11A）的形成有多个，优选地通过压制，和第二步骤，其中，所述定子盘或环（11A）是同轴地堆叠并相互旋转，从而形成其上具有至少一个凹槽限定的定子表面（13“; 15”）相对于所述定子本体沿大致轴向方向延伸英寸

80. 发明公开

EP1482178A1 Vacuum pumping device 有权
标题翻译： Vakuumpumpgerät
公开(公告)号：EP1482178A1
公开(公告)日：2004-12-01
申请号：EP04010342.6
申请日：2004-04-30
申请人： VARIAN S.p.A.
发明人： Busso, Mario , Carboneri, Roberto
IPC分类号： F04C29/10 , F04C27/02 , H02P7/628
CPC分类号： F04C28/08 , H02P29/40
摘要： The present invention concerns a vacuum pumping device comprising an oil mechanical vacuum pump (P), equipped with an electric motor (M), and an electronic control device (C) for supplying said electric motor (M) with power, wherein said control device (C) comprises means for controlling the excitation frequency F ecc of the voltage signal S U by which said motor is powered as a function of at least one operating parameter of the pump and of at least one threshold value that can be modified depending on the pump operating conditions.
摘要翻译：该装置具有通过电压信号向电动机（M）供电的电子控制装置（C）。设备中的控制算法根据油机械泵（P）的测量电流消耗和可以传送的最大功率提供变化的等效电压和激励频率。该算法调节信号向电机供电的等效电压和频率。

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