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    • 66. 发明公开
    • Pressure sensor
    • Druckwandler。
    • EP0640818A1
    • 1995-03-01
    • EP94113160.9
    • 1994-08-23
    • MURATA MANUFACTURING CO., LTD.
    • Nakamura, Takeshi, c/o Murata Manufac. Co., Ltd.
    • G01L9/08
    • G01L9/0016G01L9/0022
    • A pressure sensor 10 using a vibrator 11 as a pressure detection means is disclosed. The vibrator 11 includes a diaphragm valve 12. On both principal planes of the diaphragm valve 12, circular piezoelectric bodies 14a and 14b are formed respectively. On one principal plane of the piezoelectric body 14a, a first circular electrode 18a is formed. On one principal plane of the piezoelectric body 14a, a second hollow circular electrode 18b is formed outside the first electrode 18a. On one principal plane of the piezoelectric body 14b, a third circular electrode 20a is formed opposing to the first electrode 18a. On one principal plane of the piezoelectric body 14b, a fourth hollow circular electrode 20b is formed outside the third electrode 20a, opposing to the second electrode 18b. In the diaphragm valve 12, an inside circular portion 12a interposed between the first electrode 18a and the third electrode 20a and an outside circular portion 12b interposed between the second electrode 18b and the fourth electrode 20b vibrate radially in such a manner that they expand and contract in the reverse directions.
    • 公开了使用振动器11作为压力检测装置的压力传感器10。 振动器11包括隔膜阀12.在隔膜阀12的两个主平面上分别形成圆形压电体14a和14b。 在压电体14a的一个主平面上形成第一圆形电极18a。 在压电体14a的一个主平面上,在第一电极18a的外部形成第二中空圆形电极18b。 在压电体14b的一个主平面上,形成与第一电极18a相对的第三圆形电极20a。 在压电体14b的一个主平面上,第四中空圆形电极20b形成在与第二电极18b相对的第三电极20a的外部。 在隔膜阀12中,介于第一电极18a和第三电极20a之间的内部圆形部分12a和介于第二电极18b和第四电极20b之间的外部圆形部分12b以径向方式振动,使得它们膨胀和收缩 在相反的方向。
    • 69. 发明公开
    • Piezoelectric-type pressure sensor
    • 压电器Druckwandler。
    • EP0574046A2
    • 1993-12-15
    • EP93114634.4
    • 1991-03-15
    • MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.
    • Okauchi, TohruKusakabe, HirokiTakigawa, Masuo
    • G01L9/08G01L9/00
    • G01L9/008G01L19/14
    • Members as an upper fixing screw, piezoelectric element (15), a pressure transmitting member (14) are located closer to region of an engine to be measured and the like than a fitting thread portion of a sensor casing so that a pre-stress on the piezoelectric element can be constantly maintained at a predetermined value, thus enabling pressure measurement with a high degree of accuracy. Further, a projecting portion or a spacer is provided on the backside of a pressure receiving surface (13) in order to ensure the surface contact between the pressure transmitting member (14) and the back surface of the pressure receiving surface, thus preventing the stress from concentrating on corners of the bottom surface of the pressure transmitting member.
    • 作为上固定螺钉的构件,压电元件(15),压力传递构件(14)位于比传感器壳体的装配螺纹部分更靠近待测发动机的区域,使得预应力 压电元件可以恒定地保持在预定值,从而能够高精度地进行压力测量。 此外,为了确保压力传递部件(14)与受压面的背面之间的表面接触,在受压面(13)的背面设有突出部或间隔件,能够防止受压面 集中在压力传递部件的底面的角部。