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61. 发明授权

EP1403901B1 Control of instruments, in particular of electron microscopes 有权转让
标题翻译：仪器的控制，特别是电子显微镜的控制
公开(公告)号：EP1403901B1
公开(公告)日：2017-04-26
申请号：EP03254620.2
申请日：2003-07-24
申请人： Carl Zeiss Microscopy GmbH
发明人： Preikzsas, Dirk , Hubbard, David Ralph
IPC分类号： H01J37/26 , H01J37/28
CPC分类号： H01J37/265 , H01J2237/0453 , H01J2237/1501

62. 发明公开

EP3089194A3 DEVICE, MANUFACTURING METHOD, AND EXPOSURE APPARATUS 审中-公开
标题翻译：设备，方法和曝光装置
公开(公告)号：EP3089194A3
公开(公告)日：2017-02-15
申请号：EP16166085.7
申请日：2016-04-19
申请人： ADVANTEST CORPORATION
发明人： Yamada, Akio , Sugatani, Shinji , Kurokawa, Masaki , Takizawa, Masahiro , Iwashita, Ryuma
IPC分类号： H01J37/317 , H01J37/04
CPC分类号： H01J37/3174 , H01J37/045 , H01J37/3177 , H01J2237/0213 , H01J2237/0437 , H01J2237/1501 , H01J2237/20228 , H01J2237/31766
摘要： A device that deforms and deflects a beam, including an aperture layer that includes a first aperture that deforms and passes a beam incident thereto from a first surface side of the device and a deflection layer that passes and deflects the beam that has been passed by the aperture layer. The deflection layer includes a first electrode section that includes a first electrode facing a beam passing space in the deflection layer corresponding to the first aperture and a second electrode section that includes an extending portion that extends toward the beam passing space and is independent from an adjacent layer in the deflection layer and a second electrode that faces the first electrode in a manner to sandwich the beam passing space between the first electrode and an end portion of the second electrode.

63. 发明授权

EP2472556B1 Electron beam system having an electron source with multiple selectable electron emitters 有权
标题翻译：其电源被提供有可选择的电动多个发射器ENEL电子束系统
公开(公告)号：EP2472556B1
公开(公告)日：2016-11-09
申请号：EP11194720.6
申请日：2011-12-21
申请人： FEI Company
发明人： Parker, William
IPC分类号： H01J37/26 , H01J37/28 , H01J37/06 , H01J37/08 , H01J37/147
CPC分类号： H01J37/26 , H01J37/06 , H01J37/08 , H01J37/1471 , H01J37/28 , H01J2237/0635 , H01J2237/0802 , H01J2237/083 , H01J2237/1501 , H01J2237/1502 , H01J2237/31749

64. 发明公开

EP2988673A1 TUBE-DETECTOR ALIGNMENT USING LIGHT PROJECTIONS 有权转让
标题翻译： RÖHRENDETEKTORAUSRICHTUNGMIT LICHTPROJEKTIONEN
公开(公告)号：EP2988673A1
公开(公告)日：2016-03-02
申请号：EP14720526.4
申请日：2014-04-16
申请人： Koninklijke Philips N.V. , Philips Deutschland GmbH
发明人： MANKE, Dirk , KURZE, Christoph , VAN DE VEN, Richard Johannus Maria
IPC分类号： A61B6/00 , A61B6/08
CPC分类号： A61B6/587 , A61B6/0492 , A61B6/08 , A61B6/4405 , A61B6/461 , A61B6/547 , A61B6/585 , A61N5/1048 , A61N2005/105 , G02B7/005 , G02B27/64 , H01J37/22 , H01J2237/1501 , H01J2237/20292 , H01J2237/24528 , H01J2237/2482 , H04B10/22
摘要： The present invention relates to acquisition of medical image information of an object. In order to provide a user- friendly alignment of X-ray tube (18) and a detector (24), optionally combined with an anti-scatter grid, an alignment arrangement (200) is proposed, which comprises a tube attachment (26) with a first light projection device (28) and a detector attachment (34) with a second light projection device (36). The first and second light projection devices each generate a light pattern (30, 38) on a projection surface (32). The tube attachment (26) and the detector attachment (34) can be brought into a correct spatial arrangement relative to each other by bringing the first light pattern in a predetermined spatial relation with the second light pattern (38) on the projection surface.
摘要翻译：本发明涉及获取对象的医学图像信息。为了提供X射线管（18）和检测器（24）的用户友好的对准，任选地与防散射格栅组合，提出了一种对准装置（200），其包括管附件（26）具有第一光投射装置（28）和具有第二光投射装置（36）的检测器附件（34）。第一和第二光投射装置各自在投影表面（32）上产生光图案（30,38）。通过使第一光图案与投影表面上的第二光图案（38）成预定的空间关系，可以使管附件（26）和检测器附件（34）相对于彼此进行正确的空间排列。

65. 发明公开

EP2785249A1 MEDICAL IMAGING SYSTEM AND METHOD FOR PROVIDING AN X-RAY IMAGE 有权转让
标题翻译：医疗成像系统和方法提供射线影像
公开(公告)号：EP2785249A1
公开(公告)日：2014-10-08
申请号：EP12809346.5
申请日：2012-11-26
申请人： Koninklijke Philips N.V. , Philips Deutschland GmbH
发明人： KURZE, Christoph
IPC分类号： A61B6/00
CPC分类号： A61B6/587 , A61B6/0492 , A61B6/08 , A61B6/4405 , A61B6/4411 , A61B6/4452 , A61B6/4464 , A61B6/461 , A61B6/547 , A61B6/585 , A61B6/588 , A61N5/1049 , A61N2005/105 , A61N2005/1051 , G02B7/005 , G02B27/64 , H01J37/22 , H01J2237/1501 , H01J2237/20292 , H01J2237/24528 , H01J2237/2482 , H04B10/22
摘要： An X-ray imaging system comprises an X-ray tube (6), a ceiling suspension (2) for the X-ray tube, a detector trolley (12) with an X-ray detector (10) mounted thereon, an active sensor matrix (24), an optical indication unit (20) and a control unit (26). The active sensor matrix (24) is fixedly mounted on the ceiling suspension (2), the optical indication unit (20) is fixedly mounted to the detector trolley (12) and is adapted for emitting an optical indication (22) onto the active sensor matrix (24). The control unit (26) is connected to the active sensor matrix (24) and is adapted for acquiring the position of the optical indication (22) on the active sensor matrix (24) and to create control signals for aligning the detector trolley position and the ceiling suspension position relative to each other such that the optical indication is present on a predetermined spot on the active sensor matrix. This eliminates the need of a mechanically fixed arm carrying a detector unit at a fixed spatial relationship to an X-ray arm as the detector and the X-ray tube are be linked by a position following process.

66. 发明公开

EP2706556A2 A method for coincident alignment of a laser beam and a charged particle beam 有权转让
标题翻译：一种用于匹配的激光束的对准方法和带电粒子束
公开(公告)号：EP2706556A2
公开(公告)日：2014-03-12
申请号：EP13183272.7
申请日：2013-09-06
申请人： FEI COMPANY
发明人： Straw, Marcus , Emerson, Mark
IPC分类号： H01J37/22 , H01J37/304 , H01J37/305
CPC分类号： H01J37/3045 , G21K5/00 , G21K5/08 , H01J37/226 , H01J37/228 , H01J37/3056 , H01J2237/1501 , H01J2237/28
摘要： A method and apparatus for aligning a laser beam (216) coincident with a charged particle beam (350). The invention described provides a method for aligning the laser beam through the center of an objective lens (214) and ultimately targeting the eucentric point of a multi-beam system (300). The apparatus takes advantage of components of the laser beam alignment system being positioned within and outside of the vacuum chamber (360) of the charged particle system.

67. 发明公开

EP2672502A1 High brightness electron gun with moving condenser lens 有权
标题翻译： Elektronenoptisches System mit High-Brightness-Elektronenkanone mit Kondensatorlinse mit variabler Achse
公开(公告)号：EP2672502A1
公开(公告)日：2013-12-11
申请号：EP12171023.0
申请日：2012-06-06
申请人： ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
发明人： Frosien, Juergen
IPC分类号： H01J37/141 , H01J37/067
CPC分类号： H01J37/067 , H01J37/141 , H01J2237/06325 , H01J2237/1501
摘要： A condenser lens arrangement (320; 420; 600; 720) for an electron beam system is described. The condenser lens arrangement includes a magnetic condenser lens (321; 42; 610; 721) adapted for generating a magnetic condenser lens field, the condenser lens having a symmetry axis (450; 725), and a magnetic deflector (322; 422; 500) adapted for generating a magnetic deflector field. The deflector is configured so that the superposition of the magnetic condenser lens field and the magnetic deflector field results in an optical axis (730) of the condenser lens arrangement being movable relative to the symmetry axis (450; 725). Further, an electron beam optical system including a condenser lens arrangement (700) and a method (800; 900) for moving a condenser lens are described.
摘要翻译：描述了一种用于电子束系统的聚光透镜装置（320; 420; 600; 720）。聚光透镜装置包括适于产生磁聚焦透镜场的磁聚焦透镜（321; 42; 610; 721），所述聚光透镜具有对称轴（450; 725）和磁偏转器（322; 422; 500 ）适于产生磁偏转器场。偏转器被配置为使得磁聚光透镜场和磁偏转器场的叠加导致聚光透镜装置的光轴（730）能够相对于对称轴线（450; 725）移动。此外，描述了包括聚光透镜装置（700）和用于移动聚光透镜的方法（800; 900）的电子束光学系统。

68. 发明公开

EP2472556A3 Charged particle source with multiple selectable particle emitters 有权
标题翻译：具有可选择的多个粒子发射带电粒子源
公开(公告)号：EP2472556A3
公开(公告)日：2013-01-23
申请号：EP11194720.6
申请日：2011-12-21
申请人： FEI Company
发明人： Parker, William
IPC分类号： H01J37/26 , H01J37/06 , H01J37/08 , H01J37/147
CPC分类号： H01J37/26 , H01J37/06 , H01J37/08 , H01J37/1471 , H01J37/28 , H01J2237/0635 , H01J2237/0802 , H01J2237/083 , H01J2237/1501 , H01J2237/1502 , H01J2237/31749
摘要： A charged particle source (202) for a focused particle beam system (200) such as a transmission electron microscope (TEM), scanning transmission electron microscope (STEM), scanning electron microscope (SEM), or focused ion beam (FIB) system is disclosed. The source employs a multiplicity of independently-addressable emitters within a small region which can be centered on the axis of the charged particle system. All of the emitters may be individually controlled to enable emission from one or more tips simultaneously. A mode with only one emitter activated corresponds to high brightness, while modes with multiple emitters simultaneously activated provides high angular intensities with lower brightness. Source lifetimes can be extended through sequential use of single emitters. A combined mechanical and electrical alignment procedure for all emitters is described.

69. 发明公开

EP2463887A2 Method of making axial alignment of charged particle beam and charged particle beam system 审中-公开
标题翻译：一种生产带电粒子束的轴向对准处理和带电粒子束
公开(公告)号：EP2463887A2
公开(公告)日：2012-06-13
申请号：EP11192488.2
申请日：2011-12-07
申请人： JEOL Ltd.
发明人： Yamada, Mitsuru , Nakamura, Motohiro , Sato, Mitsuru
IPC分类号： H01J37/147 , H01J37/22 , H01J37/28
CPC分类号： H01J37/1471 , H01J37/222 , H01J37/28 , H01J2237/1501
摘要： A method of making axial alignment of a charged particle beam (B) is offered which facilitates making axial alignment of the beam (B). The method starts with obtaining at least first through sixth image data while controlling the focal position of the beam on a sample (S) in the direction of incidence, the excitation current in a first alignment coil (10a), and the excitation current in a second alignment coil (10b) . Then, values of the excitation currents in the first (10a) and second alignment coils (10b) for the axial alignment of the beam (B) are calculated from the at least first through sixth image data.
摘要翻译：使带电粒子光束（B）的轴向对准的方法是提供有利于使得光束（B）的轴向对准。该方法以获得至少第一至第六图像数据，同时控制在入射方向的试样（S）的光束的焦点位置开始时，在第一对准线圈（10a）的激励电流，并且在励磁电流第二对准线圈（10B）。那么，对于光束（B）的轴向对准的第一（10A）的励磁电流和第二对准线圈（10B）的值是从所述至少第一至第六图像数据计算。

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