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    • 67. 发明公开
    • MANUFACTURING METHOD OF FLUID CONTROL DEVICE
    • 流体控制装置的制造方法
    • EP3290700A1
    • 2018-03-07
    • EP17179905.9
    • 2017-07-06
    • Microjet Technology Co., Ltd
    • HAN, Yung-Lung
    • F04B43/04
    • B41J2/1623B29C53/04B29C65/48B29C69/00B29L2031/7496B29L2031/767B41J2/1618F04B17/003F04B43/046H01L41/23H01L41/25
    • A manufacturing method of a fluid control device (2) is provided. Firstly, a housing (26), a piezoelectric actuator (23) and a deformable substrate (20) are provided. The piezoelectric actuator (23) includes a piezoelectric element (233) and a vibration plate (230). The deformable substrate (20) includes a flexible plate (22) and a communication plate (21). A bulge (230c) is formed on the vibration plate (230). The flexible plate (22) includes a movable part (22a). Next, the flexible plate (22) and the communication plate (21) are stacked and coupled, and a preformed synchronous deformation process is implemented by applying at least one external force to outer portion of the deformable substrate (20) to form a preformed synchronously-deformed structure. Then, the housing (26), the piezoelectric actuator (23) and the deformable substrate (20) are sequentially stacked and coupled. The preformed synchronously-deformed structure is aligned with the bulge (230c) of the vibration plate (230). Consequently, a specified depth (δ) is defined between the movable part (22a) of the flexible plate (22) and the bulge (230c) of the vibration plate (230).
    • 提供了一种流体控制装置(2)的制造方法。 首先,提供壳体(26),压电致动器(23)和可变形衬底(20)。 压电致动器(23)包括压电元件(233)和振动板(230)。 可变形基板(20)包括柔性板(22)和连通板(21)。 在振动板(230)上形成凸起(230c)。 柔性板(22)包括可动部分(22a)。 接下来,柔性板(22)和连通板(21)被堆叠和连接,并且通过将至少一个外力施加到可变形基板(20)的外部部分以同步形成预成形件来执行预成形的同步变形处理 - 变形的结构。 然后,壳体(26),压电致动器(23)和可变形基板(20)顺序地堆叠并联接。 预先形成的同步变形结构与振动板(230)的凸起(230c)对齐。 因此,在可挠板(22)的可动部(22a)与振动板(230)的凸部(230c)之间形成规定的深度(δ)。
    • 69. 发明公开
    • PIEZOELECTRIC ACTUATOR
    • 压电执行器
    • EP3203073A1
    • 2017-08-09
    • EP16207284.7
    • 2016-12-29
    • Microjet Technology Co., Ltd
    • CHEN, Shih-ChangHUANG, Chi-FengHAN, Yung-LungLIAO, Jia-YuCHEN, Shou-HungHUANG, Che-WeiLIAO, Hung-HsinCHEN, Chao-ChihCHEN, Jheng-WeiCHANG, Ying-LunCHANG, Chia-HaoLEE, Wei-Ming
    • F04B43/04
    • H01L41/09F04B43/046F16K99/0015F16K99/0048F16K2099/0094
    • A piezoelectric actuator (13) includes a suspension plate (130), a piezoelectric ceramic plate (133), an outer frame (131) and a bracket (132). The suspension plate (130) is permitted to undergo a curvy vibration from a middle portion (130d) to a periphery portion (130e). The piezoelectric ceramic plate (133) is attached on the suspension plate (130). When a voltage is applied to the piezoelectric ceramic plate (133), the suspension plate (130) is driven to undergo the curvy vibration. The outer frame (131) is arranged around the suspension plate (130). The bracket (132) is connected between the suspension plate (130) and the outer frame (131) for elastically supporting the suspension plate (130), and includes an intermediate part (p21) formed in a vacant space between the suspension plate (130) and the outer frame (131) and in parallel with the outer frame (131) and the suspension plate (130), a first connecting part (p20) arranged between the intermediate part (p21) and the suspension plate (130), and a second connecting part (p22) arranged between the intermediate part (p21) and the outer frame (131).
    • 压电致动器13包括悬挂板130,压电陶瓷板133,外框131和支架132。 允许悬挂板(130)从中间部分(130d)经历弯曲振动到周边部分(130e)。 压电陶瓷板(133)安装在悬挂板(130)上。 当电压被施加到压电陶瓷板(133)时,悬架板(130)被驱动以经历弯曲振动。 外框(131)围绕悬挂板(130)布置。 支架(132)连接在悬挂板(130)和外框架(131)之间,用于弹性地支撑悬挂板(130),并包括形成在悬挂板(130)之间的空余空间中的中间部分(p21) )和外框架(131)之间并与外框架(131)和悬挂板(130)平行,第一连接部分(p20)布置在中间部分(p21)和悬挂板(130)之间,以及 布置在中间部分(p21)和外框架(131)之间的第二连接部分(p22)。