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1. 发明公开

EP3290703A1 MANUFACTURING METHOD OF FLUID CONTROL DEVICE 有权
标题翻译：流体控制装置的制造方法
公开(公告)号：EP3290703A1
公开(公告)日：2018-03-07
申请号：EP17179921.6
申请日：2017-07-06
申请人： Microjet Technology Co., Ltd
发明人： CHEN, Shih-Chang , CHANG, Ying-Lun , WU, Hsiang-Dyi , HUANG, Chi-Feng , HAN, Yung-Lung , LIAO, Jia-Yu , CHEN, Jheng-Wei
IPC分类号： F04B43/04
摘要： A manufacturing method of a fluid control device (2) is provided. Firstly, a housing (26), a piezoelectric actuator (23) and a deformable substrate (20) are provided. The piezoelectric actuator (23) includes a piezoelectric element (233) and a vibration plate (230) having a bulge (230c). The deformable substrate (20) includes a flexible plate (22) and a communication plate (21). The flexible plate (22) includes a movable part (22a). Then, the flexible plate (22) and the communication plate (21) are stacked on and coupled with each other to form the deformable substrate (20). Then, the housing (26), the piezoelectric actuator (23) and the deformable substrate (20) are sequentially stacked on each other and coupled with each other. A synchronous deformation process is implemented by applying at least one external force to the deformable substrate (20), so that the flexible plate (22) and the communication plate (21) of the deformable substrate (20) are subjected to a synchronous deformation, and a specified depth (δ) between the movable part (22a) and the bulge (230c) of the vibration plate (230) is defined.
摘要翻译：提供了一种流体控制装置（2）的制造方法。首先，提供壳体（26），压电致动器（23）和可变形衬底（20）。压电致动器（23）包括压电元件（233）和具有凸起（230c）的振动板（230）。可变形基板（20）包括柔性板（22）和连通板（21）。柔性板（22）包括可动部分（22a）。然后，将柔性板（22）和连通板（21）堆叠在一起并彼此连接以形成可变形基板（20）。然后，壳体（26），压电致动器（23）和可变形基板（20）相互依次堆叠并彼此耦合。通过对可变形基板（20）施加至少一个外力来实现同步变形过程，使得可变形基板（20）的柔性板（22）和连通板（21）受到同步变形，并且限定振动板（230）的可移动部分（22a）和凸起（230c）之间的特定深度（δ）。

2. 发明公开

EP3203073A1 PIEZOELECTRIC ACTUATOR 有权
标题翻译：压电执行器
公开(公告)号：EP3203073A1
公开(公告)日：2017-08-09
申请号：EP16207284.7
申请日：2016-12-29
申请人： Microjet Technology Co., Ltd
发明人： CHEN, Shih-Chang , HUANG, Chi-Feng , HAN, Yung-Lung , LIAO, Jia-Yu , CHEN, Shou-Hung , HUANG, Che-Wei , LIAO, Hung-Hsin , CHEN, Chao-Chih , CHEN, Jheng-Wei , CHANG, Ying-Lun , CHANG, Chia-Hao , LEE, Wei-Ming
IPC分类号： F04B43/04
CPC分类号： H01L41/09 , F04B43/046 , F16K99/0015 , F16K99/0048 , F16K2099/0094
摘要： A piezoelectric actuator (13) includes a suspension plate (130), a piezoelectric ceramic plate (133), an outer frame (131) and a bracket (132). The suspension plate (130) is permitted to undergo a curvy vibration from a middle portion (130d) to a periphery portion (130e). The piezoelectric ceramic plate (133) is attached on the suspension plate (130). When a voltage is applied to the piezoelectric ceramic plate (133), the suspension plate (130) is driven to undergo the curvy vibration. The outer frame (131) is arranged around the suspension plate (130). The bracket (132) is connected between the suspension plate (130) and the outer frame (131) for elastically supporting the suspension plate (130), and includes an intermediate part (p21) formed in a vacant space between the suspension plate (130) and the outer frame (131) and in parallel with the outer frame (131) and the suspension plate (130), a first connecting part (p20) arranged between the intermediate part (p21) and the suspension plate (130), and a second connecting part (p22) arranged between the intermediate part (p21) and the outer frame (131).
摘要翻译：压电致动器13包括悬挂板130，压电陶瓷板133，外框131和支架132。允许悬挂板（130）从中间部分（130d）经历弯曲振动到周边部分（130e）。压电陶瓷板（133）安装在悬挂板（130）上。当电压被施加到压电陶瓷板（133）时，悬架板（130）被驱动以经历弯曲振动。外框（131）围绕悬挂板（130）布置。支架（132）连接在悬挂板（130）和外框架（131）之间，用于弹性地支撑悬挂板（130），并包括形成在悬挂板（130）之间的空余空间中的中间部分（p21））和外框架（131）之间并与外框架（131）和悬挂板（130）平行，第一连接部分（p20）布置在中间部分（p21）和悬挂板（130）之间，以及布置在中间部分（p21）和外框架（131）之间的第二连接部分（p22）。

3. 发明授权

EP3290703B1 MANUFACTURING METHOD OF FLUID CONTROL DEVICE 有权
公开(公告)号：EP3290703B1
公开(公告)日：2020-08-26
申请号：EP17179921.6
申请日：2017-07-06
申请人： Microjet Technology Co., Ltd
发明人： CHEN, Shih-Chang , CHANG, Ying-Lun , WU, Hsiang-Dyi , HUANG, Chi-Feng , HAN, Yung-Lung , LIAO, Jia-Yu , CHEN, Jheng-Wei
IPC分类号： F04B43/04

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